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OXFORD Plasmalab 133

OXFORD Plasmalab 133 RIE Reactive Ion Etching System, Refurbished system, Morgan Hill, CA USA,Valid Time: Subject to prior sale w/o notice

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Description

Model OXFORD Plasmalab 133

Category:  RIE

Original Equipment Manufacturer: Oxford

Condition:Refurbished

Price: Please contact us.

Valid Time: Subject to prior sale without notice

Lead Time: 8-12 weeks depending on PO time

Location: U.S.A.

Warranty: 7 months

 OXFORD Plasmalab 133 RIE
  1. RIE set up for GaN Etch
  2. 330mm Platen
  3. RF Power: 600W, 13.56MHz
  4. Water cooled electrode 10C-80C
  5. Load Lock with turbo pump
  6. End point detection: Verity Optical emission spectroscopy (200-800nm)
  7. Gas pod with 6 lines including following MFCs:
  8. Ar – 100sccm , CL – 100sccm , BCL3 – 100sccm , N2O – 100sccm
  9. Windows PC , user friendly interface
  10. Pump and chiller(Optional)

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