Description
Model: OXFORD Plasmalab 133
Category: RIE
Original Equipment Manufacturer: Oxford
Condition:Refurbished
Price: Please contact us.
Valid Time: Subject to prior sale without notice
Lead Time: 8-12 weeks depending on PO time
Location: U.S.A.
Warranty: 7 months
- RIE set up for SiO2 Etch
- 330mm Platen
- RF Power: 600W, 13.56MHz
- Water cooled electrode 10C-80C
- Load Lock with turbo pump
- Gas pod with 6 lines including following MFCs:
- Ar – 100sccm , CL – 100sccm , BCL3 – 100sccm , N2O – 100sccm
- Windows PC , user friendly interface
- Pump and chiller(Optional)