Description
March PX500 plasma asher with Advanced Energy RFX-600 13.56mhz Rf generator.
Advanced Energy RFX600 13.56mhz RF power supply,1 ground and 1 powered shelf.Leybold vacuum pump
Location: CA, U.S.A.
Condition: We sell this item at complete, working, functional test with OEM specifications.
These are subject to prior sale. These are only for end user. Appreciate your time.
The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.
Info below from website is for your reference only.
The March PX-500 Plasma Asher is a highly versatile plasma etch tool that can etch using a direct plasma configuration, a downstream plasma, and a directional plasma (Reactive Ion Etch). The March Plasma Asher is used for the removal of photoresists from etched wafers, wafer descum, and wafer cleaning prior to wet etching, among other applications. It is capable of high photoresist ashing rates with minimal exposure to electrostatic discharge (ESD).
Key Features
- Stainless Steel chamber taking wafers to 4”
- 13.56 MHz frequency; power output up to 600 W
- Microprocessor-controlled
- Recipe editor for fast, versatile parameter control
- 2 mass flow controllers (O2 and N2)
Key Applications and available processes
- Photo-resist stripping
- Wafer descum/cleaning
- Etching of passivation layers
- Cleaning of filters and membranes
- Chemical trace analysis
- MEMS
- Photonics
The photo is only for your reference.
SS7270-1-2-1-1 and SS7270W
