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March PX-1000

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March PX-1000 Plasma System / PX1000 / Plasma Asher / Etcher
RFX600 RF Generator – 600 watts
One set of Power and Ground Shelves.
All standard system features.
2 MFC Controllers
Options available include:

1000 Watt ACG10B RF Generator
Additional Shelf Sets
Additional MFC Controllers
Vacuum pumps for  Oxygen service , or Hydrocarbon pumps for non- Oxygen Plasma processes.
Vertical door system

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