March PX-1000

March PX-1000 Plasma System / PX1000 / Plasma Asher / Etcher

RFX600 RF Generator – 600 watts
One set of Power and Ground Shelves.
All standard system features.
2 MFC Controllers

Options available include:

1000 Watt ACG10B RF Generator
Additional Shelf Sets
Additional MFC Controllers
Vacuum pumps for  Oxygen service , or Hydrocarbon pumps for non- Oxygen Plasma processes.
Vertical door system