Description
Model: LAM TCP9408 SE
Category: Plasma Etch
Original Equipment Manufacturer: Lam Research
Condition: Unhooked, Complete,Working
Process: POLY ETCHER
Wafer Size: 8-inch
Valid Time: Subject to prior sale
Vintage: 2004
Serial Number:40155
Software Version: 1.6.012A
Main System:LAM POLY ETCHER
SMIF System: ASSYST (2 Units)
Handler System: 1 Unit
Process Chamber: 1 Unit
AC Power Box: 1 Unit
RF rack: 2 Units
Inspection: Against appointment after PO and payment.
Equipment Configuration:
- Machine Serial Number 40155
- Chamber config Type TCP 9400SE-II
- TCP RF Match Part No. 853-032294-002
- Bias RF Match 853-330951-001
- ESC Power Supply 810-017086-018
- Chamber manometer. MKS Make (All) E29B-23813
- Turbo Manometer MKS Make (All) 625A-14375
- Ref Manometer MKS Make (All) 625A-14059
- Turbo Pump STPH1301L1B
- TCP RF Gen. -AE Make(All) 660-024637-006 RFDS
- BIAS RF Gen.AE Make( All) 3155027-003 B
- Wafer Drag Back ENABLE
- Wafer Offset alignment Alignment 310
- Gas Ring Capacitance 1300+/- 15 pf
- Software Version1.6.012A
- MFC Config.CL2-200 sccm 200
- MFC Config.O2-100 sccm 100
- MFC Config.HE/O2-20 sccm 20
- MFC Config.CF4-100 sccm 100
- MFC Config.HBR-500sccm 500
- MFC Config.SF6-100 sccm 100
- MFC Config.HE-500 sccm 500
- MFC Config.CL2-30 sccm 30
- TCP Coil position 8 O’CLK
- Turbo Pump capacity 1300L
- Vat Vale/Pendulum Valve Pendulum
All the Lam Plasma Etcher equipment trademarks belongs to Lam Research , the original equipment manufacturer. All rights reserved.
