Perkin-Elmer

• Oxford Plasmalab System 133
• Oxford Plasmalab System 133
• Oxford Plasmalab System 133
• Oxford Plasmalab System 133
• STS PRO ICP Etcher
• STS Multiplex DRIE
• STS Multiplex ICP 
• STS MESC Multiplex ICP
• STS Multiplex ICP MACS
• STS multi-chamber Cluster
• STS Mutiplex ICP
• Matrix 302
• Matrix 303 
• Tegal 903e Plasma Etch
• Tegal 903e Plasma Etch
• Tegal 903e Plasma Etch
• Lam AutoEtch 590
• Lam Auto Etch 590
• Lam Rainbow 4728
• Lam Rainbow 4420  Envision ver1.5.1
• Plasma Therm 700
• Plasmatherm SLR 720
• Plasmatherm 790
• Branson/IPC 4150
• Branson/IPC 3000
•  Technics PE-11A

Vacuum Pump

• Edwards QDP80 + QMB500
• Ebara A10S Dry Pump 
• Edwards IQDP40 Dry Pump

• • Plasma Therm 700
  • AMAT AMP-3300 PECVD
  • Varian 3118 E-Beam Thermal
  • Varian 3120 Evaporator
  • Varian 3120 EB Evaporator
  • CVC  AST-601 Sputter
  • Airco Temescal FC-1800 
  • Temescal FC-1800  
  • Temescal FC-1800  
  • Temescal FC-1800  
  • Temescal FC-1800   -TES
  • Airco Temescal FC-1800
  • Temescal BJD-1800 -TES
  • MRC 603 Sputter
  • MRC 643 Sputter
  • MRC 603 Sputter
  • MRC 603 MRC 693 TES
  • MRC 8671 Sputtering
  • Perkin-Elmer 4400 Sputter
  • Perkin-Elmer 4400 Sputter
  • Perkin-Elmer 4450 Sputter
  • Kurt J Lesker Dual Thermo 
  • Plasmalab CVD-2 

Mask Aligner/Stepper

• Canon / Neutronix PLA501 Front & Back Aligner
• Neutronix NV2 Canon PLA 500/501 Wafer Mask Aligner
• Neutronix PLA-545 UV Mask Aligner

• Branson IPC 3000
• Branson 3000 Barrel
• Matrix 105
• Matrix 205
• Matrix Bobcat 209S
• Matrix Bobcat 209S 
• Gasonics L3510 
• Gasonics L3500
• Gasonics Aura 2000LL
• Matrix System One Stripper
• Technics Macro Series 2000
• PVA Tepla M4L

Chillers

• SMC HRS024-AN-20
• SMC HRS018-AN-20
•  SMC HRS018-WN-20-M
• Fisher Scientific Chiller
• PolyScience 9102A Chiller 
• PolyScience 9105 Chiller 
• FTS System MAXI COOL
• NESLAB SYSTEM II
• Neslab CFT-25 Recirculator
• Thermo MERLIN Series m150
• NESLAB CFT-75
• NESLAB CFT-33
• NESLAB SYSTEM I
• NESLAB SYSTEM II
• Neslab RTE-110 Chiller 
• Thermo Fisher Scientific Chiller 
• Thermo Fisher  Neslab 7
• ThermoRack 10-R6AF-3G30-10
• Temptronic TP03500

• Heatpulse 8800
• Heatpulse 8108
• Heatpulse 4108
• Heatpulse 4100S
• Heatpulse 4100 
• Heatpulse 610
• Mini-Pulse 310
• Heatpulse 610  
• Heatpulse 210
• RTP-3000

Metrology Tester Prober Others

• EG 1034
• EG 2001X with NAVITAR
• EG4090u+
• Nanometrics 210 Nanospec AFT 
• HP 4062 and Testers
• Hewlett Packard 4061A
• Clone Screening Colony Picker
• VWR 1410 VWR
• SVG-8136 HPO SVG Spin Track
• Technic Inc. Portable Wet Bench
•  Semitool SD250 Spin Dryer
• Sheldon / Bellco 1927 Laboratory Oven
• MTI OTF-1200X Open Tube Furnace
• Kulicke & Soffa K&S 8028 Auto Gold Ball Bonder
•  Kulicke & Soffa (K&S) Triton RDA Auto Wedge Bonder

All Equipment Inventory