The AG Associates Heatpulse 8108 Rapid Thermal Processing System is a versatile tool which can be useful for many applications, such as (but not limited to):
• Silicon dielectric growth
• Implant annealing
• Glass re-flow
• Silicide formation and annealing
• Nitridation of metals
• Contact alloying
• Oxygen donor annihilation
The AG Associates Heatpulse 8108 Rapid Thermal Processing System is a single-wafer, cassette-to-cassette rapid thermal processor, capable of processing in inert or corrosive ambients. The AG Associates Heatpulse 8108 Rapid Thermal Annealing System is built for the production environment. It is installed stand-alone (which can also be housed in a compact, through-the-wall frame , if desired).
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