Tegal Spare parts

39-431-002 / FEEDTHROUGH-RF CERAMIC 39-431-002 / TEGAL

40-294-003D / CYLINDER, CERAMIC, LOWER ELECTRODE IT900 (4 INCH) / TEGAL

40-297-002 Tegal 903e Pin for Plasma Etcher

507008615 / AC/DC POWER SUPPLY FOR RF GENERATOR / TEGAL

901E Monthly PM O-ring kit, Tegal P/N

98-176-001 / PCB SNS-1 SENSOR 15 90X / TEGAL

99-002-004 / PCB MOTHERBOARD 415 / TEGAL

99-003-002 / PCB PROCESS AUTOMATION / TEGAL

99-004-001 / PCB AUTO END POINT DETECT / TEGAL

99-013-001 / PCB 3 SET POINT TIMER 60HZ 515 / TEGAL

99-054-001 / PCB AUTOTUNE AT-1.5 415 / TEGAL

99-089-001 / PCB E6S-1 SENSOR BLANK / TEGAL

99-106-001 / PCB AUTOTUNE SLUG ATS-1 415 421 515 / TEGAL

99-165-002 / PCB ESI-2 ELEVATOR SENSOR 900 / TEGAL

99-187-001 / PCB AUTOTUNE ATO-1 90X / TEGAL

99-187-002 / PCB AUTOTUNE 2 ATO-2 90X / TEGAL

99-197-001 / PCB SSL-1 SLOTTED SENSOR 90X / TEGAL

99-207-004 / PCB MICRO PROCESSOR / TEGAL

99-287-003 / SHUTTLE INTERFACE BOARD SST-3 / TEGAL

Acromag AVME 921X Circuit Board Tegal 6550 Etcher

Acromag AVME 9320 1018-473B Circuit Board Tegal 6550 Etcher 

Acromag AVME 932X Circuit Board Tegal 6550 Etcher 

ADM-3 POWER MONITOR PCB FOR TEGAL 9XXe SYSTEMS PN: 99-209-003

AIRTROL F-4200-60 Pressure Swtich, Tegal p/n: 80-679-008

AIRTROL F-4200-60 Pressure Swtich, Tegal p/n: 80-679-008

Applied Ceramics 40-588-003B Insulator Outer Tegal 95-00054A

Applied Ceramics 40-753-004-3 Disc Top Oblated Stripper Tegal 

APPLIED CERAMICS TEGAL RING, INSULATOR , OUTER

BURKS 81-007-145 SEAL PUMP TEGAL SEAL 1/2 TEPOLITE TGL-1013 PHANTOM 

Carrier ring 4 inch, Tegal P/N

CAT 99-142-001 PCB ADIS-1 TEGAL 915

CD1009-00301 / 903E MICROPROCESSOR BOARD FOR PLASMA ETCHER / TEGAL

CERAMIC STANDOFF 1/2 OD X 3/4 LG 6-32 (TEGAL) 80-170-013

CollabRx/Tegal CD1043-00601 Industrial Main Controller Control Module/Plug-In

Comdel T1000E/RF RF Signal Generator Supply Tegal T-1000E

Comdel T1000E/RF RF Signal Generator Supply Tegal T-1000E

CR1113-00301EX / MATCHING NETWORK / TEGAL

CR1113-00801RW / TEGAL PLASMA, REWORK-MATCHING NETWORK / TEGAL

Curved indexer block, Tegal P/N 8100-1091

ECM 0-1-115 Tegal 93-101-006 Rev E Cable RF p/n 39–804-001 1 , 41-147-001

Edwards 1850 Mechanical Vacuum Throttle Valve ISO200 Tegal 6500 

Edwards W185-08-001 Mechanical Vacuum Throttle Valve 1850 ISO200 Tegal 6500 

Endpoint cable, Fiber Optic, Tegal P/N 80-207-159

EPROM Firmware Load/Unload, Tegal P/N 26-003-001

GCA 66635-14 Circulating System Tegal Precision Scientific

GCA Tegal (66635-14) Circulating System (-15C-to +85C)

Integrated Circuit Support ICS-40-297-002 Quartz Pin, Tegal 40-297-002, 410475

Isel 10-27-0038 Atmospheric Elevator Tegal 80-055-717 w/Platform & Cables Spare

Isel Robotik 10-27-0038 7″ Atmospheric Elevator Robot Tegal 80-055-717 

Isel Robotik 10-27-0038 7″ Atmospheric Elevator Tegal 80-055-717 

Manifold weldment, 3 line with ultratorr fitting, Tegal P/N 33-091-001

Manifold weldment, 4 line with ultratorr fitting, Tegal P/N

Manual for Tegal 801/803, operational and maintenance, schematic manual

manual for Tegal 804

MOTOR, Belt drive Barber Coleman, Tegal P/N

OEM Part TEGAL 39-34-005 Chamber body 903E

OEM Part TEGAL 39-341-005 CHAMBER BODY

OEM Part TEGAL 40-297-110C TEGAL 40-297-110C Pin Ceramic 901

ORIENTAL MOTOR PH266L-33 STEPPER MOTOR 24V 0.3A 1.8/STEP, TEGAL 901E / 903E

PCB, Process Control, Tegal P/N 99-019-02

PCB, Sensor with cables, Tegal P/N 99-089-001

PCB, TEGAL Main, Tegal P/N 99-114-001, 99-117-001

PCB, Tegal P/N 99-095-001

Photocell, Tegal P/N 80-500-007

PROFACTURE TEGAL ICG-6 Gas Interface Board

Qualidyne 234AA0A-0172 Power Supply 23092EFG Tegal VME-PS400-01 

QUARTZ LIFT PINS TEGAL 903ACS, 903e 40-297-002 Rev E 5 PIN LOTS

RF Match Box for Tegal 803

RFPP RF Plasma Products T-501 RF Generator Tegal CR1087-20101 Untested As-Is

RFPP RF Plasma Products T-502S RF Generator Tegal CR1087-20101 Untested As-Is

Risshi/Tegal YR-9030DHF(T) 2-Ch. Constant Temperature Circulator/Heat Exchanger

Risshi/Tegal YR-9030DHI(T) 2-Ch. Constant Temperature Circulator/Heat Exchanger

SEALED Tegal XJET-14004-2 HGST Carrier 6500 Centring Ring Assembly

Sekidenko 2000 Optical Fiber Thermometer Tegal 950-2013-01 Tegal 6550 

Semi Parts SPI-99-247-003ALT Spatula Inerface SPI-3, Tegal 99-247-003, 410390

Semi-Parts SPI-99-224-001 Center Sensor, CSN-1, PCB, Tegal 99-224-001

Semitool 26-096-004 949298-00 Spin Rinse Dryer 6500 OEM Controller Tegal 6550

Sensor, Cybeq, Siltec, Tegal P/N 0121-6260-100

Sensor, E4 Ring Present, Tegal P/N

Sensor, temperature, Tegal P/N

SET OF BELTS FOR SENDER RECEIVER TEGAL 901 903

Shaft, Tegal P/N 50-007-001

SMC / Tegal 98-008-01 Rev-B PCB Assy ULUSP-98008-01

Switch, Tegal P/N 80-678-004

Switch, Tegal P/N 80-678-014

Tegal , RF Match

Tegal / Bay Pneumatic 80-095-217 BES-530-8-8-24-OMT-R BES-530-8-PCB Pneumatic

Tegal 00755601 Temperature Display Board, PCB

Tegal 0100-00136 Pcb Circuit Board Rev C

TEGAL 03601-22-040 / 0360122040 

Tegal 045-048 Temperature Probe Assembly for 903e

Tegal 07-175-004 RF CART AC MODULE w/ 1 Pipe Protect High Voltage Cable

Tegal 1011-00301 Display Board Assembly

TEGAL 211 PLASMA-ASHER

Tegal 211 Plasmaline Etcher Asher Chamber

Tegal 211 Plasmaline Industrial Semiconductor Etcher Asher Chamber Unit PARTS

Tegal 30-251-001 RF Conn Assy

Tegal 31-086-006 Wafer Etcher Microprocessor Mag Phase RF Input Output Module

Tegal 3152140-00B PEP 250-T Industrial Z-Match Antenna Tuner Module

TEGAL 33-337-001 INNER BELLOWS

Tegal 33-527-001 Bellow Chuck 

Tegal 37-231-602 Chuck Ring 

Tegal 37-423-001 Rev.4 Industrial Lab Metal Disk w/ Dual Protruding Modules

Tegal 37-441-004 Cooling Flange 6500 HRe Dual Frequency Etch System 

Tegal 39-680-003 Showerhead Electrode Cone Head Vented for 903e

Tegal 39-680-003 Showerhead Electrode Cone Head Vented for 903e Aluminum 9″

Tegal 39-680-003, Electrode, Non-anodize shower head Tegal 903, Aluminum

Tegal 39-733-003 Lower Non-anodize Electrode

Tegal 39-735-003 Lower Electrode, 5″

Tegal 39-735-003 Lower Non-anodize Electrode

Tegal 40-046-001 Quartz Window Rev. D 

Tegal 40-140-003D, Ring, Insultator, Ceramic

TEGAL 40-275-001 UPPER INSULATOR

Tegal 40-606-004 Ceramic Liner HRE2

Tegal 41-137-001, Chuck, BTTM Flag 903

TEGAL 41-215-001 GASKET GROUND RING RETAINER FOR USE WITH SOLID GROUND

Tegal 41-238-008 RF Shield React Fill

Tegal 41-399-001 Gasket, RF-90Xe

TEGAL 415 PLASMA ASHER

TEGAL 42-401-001 Bracket Slide Rear LH T915

Tegal 42-841-001 Rev.B Industrial Upper Chamber Assembly 39-700-007 Rev.A PARTS

Tegal 46-952-002 Stripper Gas Panel UFC-1100A As-Is

Tegal 50566-02-ISS3 AUX/RF Controller Control Module/Board/Card 83-126-003

TEGAL 50590 01

TEGAL 50590 01 PCB

Tegal 50590-01 PCB Plasma Etching

Tegal 50590-01 Wafer Etcher Main Controller 80-095 CD1043 Daughter Board PCB

TEGAL 515 PLASMA ASHER (With Warranty)

Tegal 53-024-003 Sensor Assembly

Tegal 53-025-001 Retina Lamp

TEGAL 58-027-001

Tegal 59-011-001, Linkage Top PL Latch

Tegal 6550 CC1326-00600 Chamber Stripper CR1324-00400 MTCH NTWK Source Strip

Tegal 701 Inline Automatic Wafer RF Plasma Etcher 

Tegal 701 Plasma Inline Wafer RF Etcher Made in USA

TEGAL 701 RFG Plasma Inline Wafer RF Etcher, RF MATCH, 106423

TEGAL 701-SP MN RF Match Plasma in-line etcher, 106424

Tegal 80-095-1026 PCB MATCH CONTROLLER IP1.5

Tegal 80-095-270 50555-01 ISS-8 Wafer Etcher CD1043 Main Controller Module Board

TEGAL 80-095-278 PCB MICROPROCESSOR CONTROLLER 99-207-004

TEGAL 80-200-219 “SLIM-TRACK” BARNES ENG. CO.; SLIDE CHAMBER T915

Tegal 80-202-046, Gromnet, 5/16ID, 7/16DIA Hole

Tegal 80-202-186, Timing Belt

Tegal 80-202-190, O-R 10, 1/2ID 3/16W, D70

TEGAL 80-202-291

TEGAL 80-202-361 Bearing

Tegal 803 Inline Automatic RF Plasma Wafer Etcher

Tegal 803 Inline Automatic Wafer RF Plasma Etcher 

Tegal 803 Inline Automatic Wafer RF Plasma Etcher 

Tegal 80-500-002 Photocell 250V 55K

Tegal 80-640-018 Profacture For Tegal 901e 903e 12v 0.8w Bay Base

Tegal 80-678-029 Flow Switch, AUTOFLOW FS574-587

Tegal 81-007-138 Bellow Plug for Plasma Etcher 900 Series

Tegal 81-105-223 Heater 120V 60Hz

TEGAL 83-099-001 Lift Pin 3ea

Tegal 83-126-003 Rev.C Industrial/Laboratory Controller Aux Board Assy

Tegal 900 series upper Chamber, complete

Tegal 901e Plasma Etcher #2

Tegal 901e Plasma Etcher 901e Plasma Etcher #1 with ENI ACG-10 RF Power Supply

Tegal 903 Showerhead Profacture Pro-37-221-002 Electrode Upper 903E

TEGAL 903e ALUMINUM UPPER ELECTRODE, NOS PN: 39-680-003 Rev D

TEGAL 903e ALUMINUM UPPER ELECTRODE, PN: 39-680-003 Rev F

Tegal 903E CW 1078-40203 Send/Receive Sender/Receiver Spatula Drive/Driver

TEGAL 903e PLASMA ETCHER EIA-3 ELEVATOR PCB P/N 99-246-003

Tegal 903E PLASMA ETCHER PCB, 50590-01

Tegal 903e Plasma ETCHER Quartz Pins, Set of 6, 40-297-002

Tegal 93-137-009, RF Cable

Tegal 94-400-001, Harness Sensor

Tegal 94-484-001 Cable Assy

Tegal 965 / 915 Plasma Asher / Removed Operational from facility /Complete/Clean

TEGAL 98-129-003 PCB CIRCUIT BOARD REV A NIB

Tegal 98-176-001 B 99-176-001 K Wafer Plasma Etcher Sensor SNS Board Assembly

Tegal 98-176-001 Pcb Circuit Board Rev D

Tegal 98-223-002 Pcb Circuit Board Rev B

TEGAL 98-249-001 PCB CIRCUIT BROAD REV 2

TEGAL 98-249-002 PCB CIRCUIT BOARD, REV C

TEGAL 98-287-002 PCB CIRCUIT BOARD REV A

Tegal 98-354-002 CPU Transition Board VME PCB Card 

Tegal 98-363-00 VME Backplane Board PCB CTC-ML 

Tegal 98-398-002 Pcb Circuit Board Rev A

Tegal 98-429-001 PCB, 

Tegal 99-052-001 PCB, AUX-1, 99-049-001 PCB

TEGAL 99-081-001 Gas control interface, GCS-1 PCB assy

TEGAL 99-081-001 Gas control interface, GCS-1 PCB board assy

TEGAL 99-082-003 gas control logic, GCL-3 PCB board assy

Tegal 99-089-001 Sensor and Cables for 903 or 915 Etcher/Asher

Tegal 99-096-09 DIP Board PCB Rev. G Untested As-Is

TEGAL 99-104-001 PCB ELEVATOR CONTROL FAB 98-104-001 

Tegal 99-104-001, PCB Elevator Control, FAB 98-104-001

TEGAL 99-112-001 Top display control, TDC-1 PCB board assy

Tegal 99-126-005 903e IGC-5 PCB Module / Card for Plasma Etcher Semiconductor

Tegal 99-126-005 IGC-5 Gas Control PCB Rev. N

Tegal 99-126-005 IGC-5 PCB Rev. J for 901E and 903E

Tegal 99-126-005 PCB Gas Interface

Tegal 99-126-005 PCB, IGC-6, Gas Interface, 99-126-005

TEGAL 99-126-005 REV H.IGC-5 PCB GAS INTERFACE CONTROLLER BOARD

TEGAL 99-126-005 REV P.IGC-5 98-126-005 PLASMA DS-5-4-002 CONTROLLER SHIPSAMEDAY

Tegal 99-126-006 Interface Board PCB ICG-6 Untested AS-IS

Tegal 99-126-006 PCB IGC-6 Gas Interface

Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-005

Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-006

Tegal 99-129-003 Pcb Circuit Board Rev B

TEGAL 99-129-006 PCB CIRCUIT BOARD REV A NNB

Tegal 99-138-001 PCB Assembly, FAB 98-138-001

TEGAL 99-138-004 TEMP MONITOR CONTROL PCB. Rev.E, TMC-4

TEGAL 99-138-004 TEMPERATURE MONITOR CONTROL CONTROL BOARD, REV. E TMC-4

Tegal 99-160-006 Industrial/Laboratory Controller Board Assembly

Tegal 99-160-006 Rev.E Industrial/Laboratory RFI-6 Controller Board Assembly

TEGAL 99-165-003 REV A ESI-3 Plasma Etcher Etching

Tegal 99-169-005 PHC-5 Wafer Etcher Detector Light Sensor Photocell Board PCB

Tegal 99-172-003 PCB

Tegal 99-173-003 RFG-3 PCB

TEGAL 99-173-004 GENERATOR BOARD. REV D

Tegal 99-173-004 Pcb Circuit Board Rev E

Tegal 99-173-004 PCB, RFG-4, RF Gen Interface

Tegal 99-173-005 PCB RFG-5

tegal 99-173-007 RF Interface PCB

Tegal 99-173-008 PCB, RFG-8, RF Gen Interface

Tegal 99-173-008 PCB, RFG-8, RF Gen Interface

Tegal 99-174-007 Rev.1 BPL-7 Industrial PCB Printed Circuit Board Card Unit

Tegal 99-174-008 REV A BPL-8 Wafer Module Driver Controller I/O Interface Board

Tegal 99-174-008 REV. A BPL-8 Wafer Etcher Interface Main I/O Backplane Board

Tegal 99-174-008 REV-F BLP-8 Industrial PCB Printed Circuit Board Card Unit

Tegal 99-184-004 MIC-4 Main Controller Module CD1043 Interface Connector Board

Tegal 99-185-002 MMI-2 Wafer Etcher CD1043 Main Controller Rear Interface Board

Tegal 99-186-001 Rev. 2A Interface Board PCB Att-1 Untested As-Is

Tegal 99-187-002 ATO-2 Board

Tegal 99-187-002 ATO-2 Interface Board PCB Rev. B Untested As-Is

Tegal 99-196-002 ATI-2 PCB Rev. W

Tegal 99-196-002 PCB ATI-2 for Tegal 901e

Tegal 99-196-003 ATI-3 Microprocessor Controller Module RF Processor Board Assy

Tegal 99-196-003 Rev.A Industrial ATI-3 Auto-Tune Board Assembly Unit

Tegal 99-200-005 M300353 903e Sensor Interface Spatula SIS-5 REV G

Tegal 99-200-005 PCB, SIS-5, Sensor Interface, 98-200-002

Tegal 99-200-005 Sensor Interface PCB SIS-5

TEGAL 99-200-300 REV. B, PCB SENSOR INTERFACE

Tegal 99-201-001 IIQ-1 REV D Wafer Chamber Etcher System Driver Interface Board

TEGAL 99-203-004 PCB MNP-4 MTCH NTWK

Tegal 99-203-004 Rev G MNP-4 Control Board

Tegal 99-204-001 Rev. E OMD-1 Wafer Elevator Handling Selector Driver PCB Board

Tegal 99-207-004 MBE-4 Mem And Baud PCB Lagacy Semi Repaired 99-207-004RW

Tegal 99-207-004 MBE-4 Wafer Main Controller CD1043 Module PCB Daughter Board

Tegal 99-207-004 PCB

Tegal 99-207-004/K MBE-4 PCB

Tegal 99-209-002 Industrial AC/DC Power Monitor PCB Circuit Board Assembly

Tegal 99-209-003 Pcb Circuit Board Rev D

TEGAL 99-214-003 / G AME-3

TEGAL 99-214-003RW Rev. A RWK-PCB ANE-3 AUTOTUNE 3

Tegal 99-217-001 SOH-1 Wafer Elevator Motor Transfer Selector PCB Board

Tegal 99-219-001 Wafer Elevator 15-Pin Interface Sensor Controller PCB Board

Tegal 99-223-002 Pcb Circuit Board Rev G

Tegal 99-223-002 PCB, DSN-2, Dual Sensor

Tegal 99-228-001 PCB, FLS-1, Flag Sensor, 98-228-001

Tegal 99-231-001 ITP-1 Wafer Etcher CE1029 DC Module Power Supply Board PCB

Tegal 99-232-003 Rev.5 M0C-3 Plug-In PCB Circuit Board Assembly Module

Tegal 99-232-003 Rev.P M0C-4 Plug-In PCB Circuit Board Assembly Module

Tegal 99-232-004 EX Plug-In PCB Circuit Board Assembly Module

Tegal 99-232-004 Rev.T M0C-4 Plug-In PCB Circuit Board Assembly Module

Tegal 99-232-004RW PCB

Tegal 99-235-004 Rev E MCM-4 Control Board

Tegal 99-237-002 Interface Board PCB EEP-2 Untested AS-IS

Tegal 99-240-002 PCB

Tegal 99-240-003 PCB

Tegal 99-240-004 ETS-4 Wafer Etcher CD1043 Main Controller Daughter Board PCB

Tegal 99-247-002 PCB

Tegal 99-249-002 PCB For Tegal 901E & 903E Plasma Etcher

Tegal 99-253-001 PMT-1 Rev-K Industrial Board Module Assy

Tegal 99-261-002 MFC-2 Wafer Chamber Etcher Gas Delivery Interface Board PARTS

Tegal 99-261-002 REV.C MFC-2 Wafer Etcher Gas Flow Control Interface PCB Board

Tegal 99-261-002 Rev.C-MFC-2 Industrial/Laboratory Connector Board Assy

Tegal 99-261-002 Rev.C-MFC-2 Industrial/Laboratory Connector Board Assy 

Tegal 99-287-001D REV C SST PCB

Tegal 99-287-003 PCB SST-3 Shuttle Interface

Tegal 99-287-003 SST-3 Board

Tegal 99-287-003RW Board

Tegal 99-287-003RW Platine

Tegal 99-299-001 REV. D MCR-1 Wafer Etcher Transfer Driver Interface PCB Board

Tegal 99-299-001 REV. F MCR-1 Wafer Etcher Transfer Driver Interface PCB Board

Tegal 99-299-001 Rev.F Industrial/Laboratory MCR-1 Board Assembly Unit

Tegal 99-299-001RW Rev.F Industrial/Laboratory MCR-1 Board Assembly Unit

Tegal 99-318-001/B Industrial/Laboratory CSI-1 PCB Board Assembly

Tegal 99-339-001 PMC CPU Transition Board Plug-In Module Assembly

Tegal 99-340-001/A PMC Serial Transition Board Plug-In Module Assembly

Tegal 99-341-001 Industrial/Laboratory Console Interface Board PCB Assembly

Tegal 99-343-001/A Industrial/Laboratory Master Control Console Board Assembly

Tegal 99-344-001/C Industrial/Laboratory System Cable Interface Board Assy

Tegal 99-360-001 Processor Board VME PCB Card AOB-1 98-360-001 

Tegal 99-385-001 DC/DC Converter Board PCB Rev. 4 6500 HRe Dual Frequency

Tegal 99-385-001 DC/DC Converter Board PCB Rev. A 6500 HRe Dual Frequency 

Tegal 99-395-002 CIP-2 CTC Board PCB Card 98-395-001 

Tegal 99-80267-01 PCB Shuttle Interface

Tegal 9XX PCB TMC-3 TEMP MONITOR CONTROL, P/N 99-138-003, NOS

Tegal 9XX PCB TMC-4 TEMP MONITOR CONTROL, P/N 99-138-004, NOS

Tegal 9XX PCB, 99-165-003 REV.J, NOS

Tegal 9XX PCB, 99-207-003 REV.2 MBE-3

Tegal 9XX PCB, 99-207-004 REV.C MBE-4

Tegal 9XX PLASMA ETCHER INTERFACE PCB, P/N 98-223-002 REV A, NOS

Tegal 9XX PLASMA ETCHER PCB IMN-3 RF MATCH INTERFACE, 99-172-003, 98-172-003

Tegal 9XX PLASMA ETCHER PCB SIS-5 SENSOR INTERFACE P/N 99-200-005 REV B

Tegal 9XX PLASMA ETCHER SOLENOID VALVE ASSY SND/RCV 31-173-001

TEGAL AC MODULE 1028-00302

Tegal BES-530-8-PCB 8-Port/Channel Solenoid Valve Control Board

Tegal CC1147-00303 REAC Industrial/Laboratory Triode Split Assembly Unit

Tegal CC1326-00100 Chamber-Stripper For Parts As-Is

Tegal CC1327-00300 EZ Reactor Assembly HRE-PM1 6500 HRe 

Tegal CD1039-00301 Industrial/Laboratory Endpoint Detector Assembly Unit

Tegal CD-1039-00303 Endpoint Detector Detection System Module/Plug-In

Tegal CD-1039-00303 Endpoint Detector Detection System Module/Plug-In #2

Tegal CD1039-00403 Wafer Etcher Plasma Chamber System Endpoint Detector Module

Tegal CD1043-00601 Industrial Wafer Etcher System Main Controller Module

Tegal CD1043-00601 Wafer Etcher Plasma Main Controller Module Chassis Frame

Tegal CD1043-00601RW Industrial/Lab Main Controller Assembly Module

TEGAL CD1298-02300 CON-MDL-VME-1HD CHASIS

Tegal CD1310-00104 Endpoint Module

Tegal CD1310-00300 Endpoint Module PM1 PM Tegal 6550 Etcher *

Tegal CD1310-00300 Endpoint Module Tegal 6550 Etcher *

Tegal CE00839 2 PINS WIDE 104ZA051 FEEDTHROUGH

Tegal CE00840 WDE 103 ZA053-600

Tegal CE00841 2 CTS FEMALE PLUG S 104 Z051-1

Tegal CE00842 4 CTS FEMALE PLUG S 103 Z053-1

Tegal CE00843 2 CTS MALE PLUG S 104 A051-130

Tegal CE00844 4 CTS MALE PLUG S 103 A053-130

Tegal CE00845 CABLE CLAMP E3 103.6/6.7 103.1

Tegal CE00845 CABLE CLAMP E3 104.3/6.7 + B I

Tegal CE1028-00303 AC Module Wafer Etcher 1/3/5/10/15A Power Controller Module

Tegal CE1028-00303 Industrial AC Module Wafer Processing Plug-In Assembly

Tegal CE1028-00304 AC Module Wafer Etcher 1/2/5/15A Power Controller Module

Tegal CE1028-00304 Industrial AC Module Wafer Processing Plug-In Assembly

Tegal CE1028-00304 Industrial/Laboratory AC Module Assembly Unit

Tegal CE1028-00401RW Industrial/Lab AC Module Assembly Unit

Tegal CE1029-00201 DC Module Wafer Etcher Power Supply Chassis Enclosure Frame

Tegal CE1029-00201 DC Module Wafer Etcher System -15/5/15/24V Power Supply PSU

Tegal CE1029-00201 DC Module Wafer Etcher System -15/5/15/24V Power Supply Unit

Tegal CE1029-00201 Industrial/Laboratory DC Module Assembly Unit

Tegal CE1029-00201 Industrial/Laboratory DC Power Module Plug-In Unit

Tegal CE1029W00840 Industrial/Laboratory DC Power Module Plug-In Assembly

Tegal CE1093-0030 Industrial Motor Controller Control Module/Unit/Plug-In

Tegal CE1093-00303 Industrial Motor Controller Module Plug-In Unit

Tegal CE1093-00303 Industrial Plug-In Motor Controller Module Assembly

Tegal CE1153-00102 Industrial/Lab PSVTN Module Assy w/Watlow 804 Controller Unit

Tegal CE1153-00102 Watlow 804 Temperature Controller Passivation Module PARTS

Tegal CE1153-00102RW PSVTN Watlow 804 Temperature Controller Passivation Module

Tegal CE1323-10101 AC Module Distribution

Tegal CE1323-10101 AC Module Distribution Unit 6500 HRe SW HTR 208 

Tegal CE1354-00200 DC Power Supply Module

Tegal CG1041-00402RW Industrial Pressure Controller Module Assembly

Tegal CG1148-00602 Wafer Chamber Gass Delivery Valve UFC-1020 BCI3 MFC Assembly

Tegal CG1150-00205RN Industrial 8-Channel RWK Gas Controller Plug-In Module Unit

Tegal CG1150-00206 Industrial 8-Channel Plug-In Gas Controller Module Unit

Tegal CG1150-0020G Industrial 8-Channel Gas Controller Module

Tegal CM04345 POTENTIOMETER MONOTURN 10K 1 TURN BIAS MATCH

Tegal CM05136 O-RING KIT VAT PENDULUM THROTTLE VALVE PUMPING CHAMBER

Tegal CM05346 POT, 10K, 10 TURN, SOURCE MATCH (PKG 2)

Tegal CM05473 BELT TIMING BROOKS MX600 116GRV LOAD LOCK

Tegal Compact Air Products Water Chuck, Vacuum Pump

Tegal Control Unit

Tegal Corp 39-452-002A ARM UPPER LH DOOR T915

TEGAL CORP 39-453-001

TEGAL CORP 39-453-002

Tegal Corp 39-659-001 Screw Stud Standoff Aluminum 38 T915

Tegal Corp 39-958-001 TEGAL PULLEY TENSION DOOR T915

TEGAL CORP 40-575-002-C RING, CHUCK FRONTLINE – 6″

TEGAL CORP 40-751-601-A RING, 6″ WAFER CENTER STRIPPER

Tegal Corp 42-401-002 O-Ring, 235 V

Tegal Corp 42-402-001 Bracket Slide Front LH T915

Tegal Corp 42-402-002 Bracket Slide Front RH T915

Tegal Corp 57-017-001 TEGAL PULLEY IDLER (BIG) DOOR T915

Tegal Corp 80-095-146 Transformer 220/115-24V AC Module T9156-P-1623420

Tegal Corp 81-105-222 Sensor, Control(Platinum)Temperature TEGAL T915 RES-ASHER

Tegal Corp 99-196-003RW PCB ATI-3 AUTO TUNE T915

Tegal Corp 99-206-001 PCB AGCP-1 TEGAL 915

Tegal CP1037 CRT Program Terminal 13″ Wafer Etcher System Display Monitor PARTS

Tegal CR1031-00305 Industrial 100kHz Matching Network Plug-In Module Unit

Tegal CR1031-00305RW Industrial 100kHz Matching Network Plug-In Module Unit

Tegal CR1031-00306 Industrial/Laboratory 100kHz Matching Network Assembly

Tegal CR1040-00205EX Industrial RF Controller Plug-In Module Unit

Tegal CR1040-00205RW RF Controller Wafer Etcher Signal Generator Module PARTS

Tegal CR1296-00100 KHZ Controller CONT MTCH NTWK 500W 45 Tegal 6500 Etcher

Tegal CR1324-00100 RF Match Network Source Strip Untested As-Is

Tegal CR1324-00400 RF Match Network Source Strip 6500 HRe 

Tegal CR1325-00300 MHz Controller CONT MTCH NTWK STRIPPE *

Tegal CR1330-10100 MHz Controller Cont 6550 RF Source Tegal 6550 Etcher 

Tegal CR1338-10102 RF Match MTCH NTWK 450KHZ-ESC T Tegal 6550 

Tegal CR1338-10102 RF Match MTCH NTWK 450KHZ-ESC T Tegal 6550 *

Tegal CR1350-00100 Source Reactor Module Process Chamber Tegal 6550 Etcher

Tegal CR1350-00100 Source Reactor Module Process Chamber Tegal 6550 Etcher Tool

Tegal CV00110 O-RING 699

Tegal CV00133 O-RING 178 01250

Tegal CV00134 O-RING 200 21313 G2 T47501 FPM

Tegal CV00136 O-RING 300 41145 COOLANT LOWER COOLING PLATE OUTER SOURCE

Tegal CV00137 O-RING 300 38500 COOLANT LOWER COOLING PLATE OUTER SOURCE

Tegal CV00325 O-RING 200 23100 COOLANT LOWER COOLING PLATE INNER SOURCE

Tegal CV00476 O-RING 0.138 X 0.609

Tegal CV00477 O-RING 0.139 X 0.734 CHEMRAZ

Tegal CV00481 O-RING 0.210 X 1.1 (PKG 2)

Tegal CV00482 O-RING CHEMRAZ 366C639 7.225 INCH X 0.210 INCH SC639 (PKG 2)

Tegal CV00507 O-RING 533

Tegal CV00508 O-RING 270 (PKG 2)

Tegal CV00527 O-RING TOR 240 00660 HE FEED ESCP SH

Tegal CV00528 O-RING 200 00570 HE FEED ESCP SH

Tegal CV00553 O-RING KIT VAT VALVE PROCESS PUMPING (PKG 2)

Tegal CW 1047-00302 Industrial Electrostatic Wafer Chuck Assembly Unit

Tegal CW 1047-01101RW Industrial Wafer Chuck Assembly W/ 2x SMC NAQ2000

Tegal CW1033-00301 Industrial Wafer Elevator Assembly w/Stepping Motor

Tegal CW1033-00302 Industrial Wafer Elevator Assembly w/Stepping Motor

Tegal CW1033-00303 Wafer Elevator Library Selector Transfer Handling Assembly

Tegal CW1033-00303 Wafer Elevator Library Selector Transfer Handling Assembly #2

Tegal CW1038-00402 Industrial Spatula Drive Belt Assembly w/Stepping Motor

Tegal CW1038-00402RW Industrial/Laboratory Spatula Drive Assembly AS-IS

Tegal CW1048-00502 Industrial Wafer Shelf Lift Assembly Machine Indexer Module

Tegal CW1048-00502 Industrial/Lab Pneumatic Indexer Module Assembly Unit

Tegal CW1048-00502 Industrial/Laboratory Indexer Pneumatic Assembly

Tegal CW1048-00502 Industrial/Laboratory Indexer Pneumatic Assembly #2

Tegal CW1048-00502 Wafer Chamber Shelf Lift Assembly Machine Indexer Module

Tegal CW1078-W00304RW Spatula Drive, 99-200-003 PCB Board

Tegal CW1299-20103 VCE Left Generic Load Lock Chamber Tegal 6550 Etcher

Tegal CW-1302 00500 Wafer Aligner Tegal 6550 Etcher

TEGAL DEIONIZED WATER HEATER CONTROLLER CE132100201

Tegal elevator frame assembly

TEGAL ENDPOINT MODULE, STRIPP, 99-390-004 CD1310-00202

TEGAL EPROM 400k MEMORY PCB, PN 99-095-320

Tegal FLIP 03601-22-040 Alphanumeric Fluorescent Display 

TEGAL Front Robot Loader interface

TEGAL GENERATOR ENI MODEL ACG.107

Tegal Heater Controller Tegal 6550 Etcher 

Tegal Industrial Computer Source 7410-14H Control Unit CD1100-00302 4U Rack

Tegal Industrial Heated Upper Electrode Chamber Assembly Unit 39-700-007

Tegal Industrial Lab Plasma Etcher Upper Body Chamber Ring w/Viewing Port #2

Tegal Industrial Lab REAC Heated Upper Electrode Chamber Assembly Plate Unit

Tegal Industrial Lab Upper Body Chamber Ring Unit w/Viewing Side Ports PARTS

Tegal Industrial Lab Upper Body Chamber Ring w/Viewing Side Ports 39-662-002

Tegal Industrial Optical Fiber Laser Head System I/O RF Driver Amplifier Module

Tegal Industrial Plasma Etcher Chamber Ceramic Insulator Ring 12.5″ Diameter

Tegal Industrial Plasma Etcher Chamber Ceramic Insulator Ring 13.5″ Diameter

Tegal Industrial REAC Heated Upper Electrode Chamber Assembly Plate CC1230-00100

Tegal INS-1 Wafer Etcher System 15-Pin Connector Sensor Component Board PCB

Tegal M3 X 16MM SCREW BUTON HEAD STAINLESS STEEL CLS. .3C16BHCS

Tegal Model 421 Manual PCB 99-011-001

Tegal Model 421, 3″, 75 mm Aluminum Wafer Carrier, 25 Slot

Tegal Model 421, 3″, 75 mm Aluminum Wafer Carrier, 25 Slot, 1

Tegal Model 901e / 903e Plasma Etcher SHUTTLE REBUILD KIT, 80-202-034, NOS

Tegal Model 903e Plasma Etcher FRONT PANEL INTERFACE PCB, 99-125-008, NOS

Tegal Model 903e Plasma Etcher GAS INTERFACE PCB ICG5 99-126-005 REV M

Tegal MX01136 PHYTRONIC ASSEMBLY ESCP SH 

Tegal MyDax 2H14A Temperature Controller Instruction Manual

Tegal P/N 31-165-006 Stepping Motor, Carrier

TEGAL PCB ASSY (PARTS) 98-391-004

TEGAL PCB ASSY 31-398-002

TEGAL PCB ASSY 98-391-004

TEGAL PCB ASSY 99-406-001

TEGAL PCB ASSY 99-416-001

Tegal PEP-250-Te High Voltage Power AC Plasma Source Generator 100Kz RF Supply

Tegal PEP-250-Te Industrial/Laboratory AC Plasma Source Assembly 3157508-000A

TEGAL PLASMA 903

TEGAL PLASMA ETCHER 9XX 98-247-002, TSI. REV B

TEGAL PLASMA ETCHER 9XX GAS INTERFACE PCB, ICG-6, 99-126-006 REV F

TEGAL Plasma ETCHER SST TEMPERATURE PROBE, P/N 80095-057, NOS

Tegal PlasmaLine 200 Plasma Barrel Etcher 

Tegal Plasmaline 415 Plasma Chamber w/Varian L6267-301 NW40 Vacuum Valve

TEGAL PLASMALINE MODEL 421 WITH SPARE PARTS

TEGAL PLASMOD w/ MARCH GCM 100 PLASMA ASHER CLEANER ETCHER

Tegal PM3 Over Temp PM4 Level Sense Tegal 6550 Etcher *

Tegal Quartz PIN P/N 40-297-001-E

Tegal RF Delivery

Tegal RF Interface PCB # 99-173-008

TEGAL RF SIGNAL GENENRATOR SUPPLY T-1000E

Tegal SE 1496A A/D Plug-In PCB Circuit Board Assembly Unit

Tegal SE 2059 AX CPU Plug-In PCB Circuit Board Assembly Unit

Tegal source reactor ICP CR1350-00300 with Tegal MHZ controller CR1325-00400

Tegal SPI-80-095-057 Probe Temperature SST

Tegal T-1000E Comdel T1000E/DCX Wafer RF Signal Generator DC Power Supply Module

Tegal T-1000E Comdel T1000E/RFG 13.56MHz RF Signal High Voltage Power Supply

Tegal T-1000E Industrial 40VDC DC Power Supply Plug-In Module Unit Assembly #2

Tegal TG00461 MONOBLOCK CENETRING RING CERAMIC PART

Tegal TGL 99-013-001 Rev. G SET-1 Circuit Board TGL 99-013-001

Tegal TGL 99-106-001 PCB ATS Auto Tune Slug / 99-106-001 Rev.K

Tegal TGL 99-106-001 PCB ATS Auto Tune Slug Printed Circuit Board

Tegal TR01785 PIPE ALUMINA INTEGRATED CIRCUIT SUPPORT ICS-2471883

Tegal TR05113 CONNECTOR HELIUM ESCP SH (PKG 2)

Tegal Type 41-137-001 Flag Chuck For Tegal Etcher

Tegal Type 80-202-186 Timing Belt (Pack Of 4)

Tegal Vacuum Cassette Elevator Loadlock VCE, 100/150MM, Left CW1299-10102 324878

Tegal Wafer Elevator Vexta Motorized Linear Transfer Selector Library Handler

Tegal Wafer Lift Quartz Tip ANOD PIN, 49-042-002, 6 ea.

Tegal Wafer Transfer System Motorized Linear Selector Handler +Vexta C4412 PARTS

TEGAL XJET-11503 TCU Elbow Fitting, 416192

Tegal/Bay Pneumatic BES-530-8-PCB 8-Port/Channel Solenoid Valve Control Board

Tegal/Comdel T1000E/RF Industrial/Laboratory 13.56MHz RF Power Supply Unit

TEGAL/DDI SHUTTLE INTERFACE CIRCUIT BOARD 00094072, 98-287-002 REV. A DVO 450-B

TEGAL1513e MOTOR CONTROLLER ITEM CE 1093

Thermo Couple (TC) TEGAL 80-700-xx JES-CE

Unit/Tegal CHF3 80SCCM — UFC-1000

Vacuum valve, KF-40. Tegal P/N

VAT 14046-PE44-1016 HV High Vacuum Gate Valve Tegal 6500 HRe 

Veriflo NPR400Z (TEGAL) High Pressure Regulator w/ Vacuum Torr Gauge

Xycom MVME-490/1 Circuit Board Tegal 6550 Etcher *