Description
Model: STS / CPX Pegasus Etcher
Category: DRIE ICP
Original Equipment Manufacturer: Surface Tech Sys ( STS )
Condition: Used, Complete, working condition. We sell it at AS IS,Where IS condition. Refurbished and fully tested is optional at extra charge.
Vintage: 2012, CE Mark.
Valid Time: Subject to prior sale
Warranty: No warranty for the AS IS,WHERE IS condition. 12 months for the Refurbished and fully tested condition.
Installation and training: Available at extra charge for the Refurbished and fully tested condition
Service Contract: Available at extra charge for the Refurbished and fully tested condition
STS / CPX Pegasus Etcher SPTS Pegasus DRIE (Deep Reactive Ion Etcher)
- With (2) DRIE Pegasus chambers
- (2) Process modules
- Twin vacuum cassette cluster tool with pegasus process chamber
- Database version: 4.16
- Platform: CPX
- Module: Pegasus
- Installation: Thru-Wall
- Voltage: 400V
- Pumps: Yes
- EPD: No
- Wafer size: 200mm
- Wafer flat size: Round with notch
- Clamp: TDESC
- Gasbox: Peg / HRM
- MFCs: MKS
- PM Pump type: EDWARDS PM Pump
- Lower electrode PSI: LF
- ASE Requirement: Switched licence
- Cluster transfer pump: ALCATEL Handler pump
- We are looking for the highest offers for this system
