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STS / CPX Multiplex PECVD

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Description

STS / CPX Multiplex Plasma Enhanced Chemical Vapor Deposition (PECVD) System, 4″-6″

  • High quality semiconductor
  • Dielectric thin film
  • Loadlock with (2) wafer carousal
  • Low/high frequency RF power supply
  • Gases: SiO2, Si3N4, a-Si
  • P+/N Doping gases.

Condition: Used. It was complete, working.

Valid time: Subject to prior sale without notice. This is only for end user. Appreciate your time.

Contact us (sales@semistarcorp.com) for more info pls. Appreciate your time.

ID-OEM-38

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