Description
STS / CPX Multiplex Plasma Enhanced Chemical Vapor Deposition (PECVD) System, 4″-6″
- High quality semiconductor
- Dielectric thin film
- Loadlock with (2) wafer carousal
- Low/high frequency RF power supply
- Gases: SiO2, Si3N4, a-Si
- P+/N Doping gases.
Condition: Used. It was complete, working.
Valid time: Subject to prior sale without notice. This is only for end user. Appreciate your time.
Contact us (sales@semistarcorp.com) for more info pls. Appreciate your time.
ID-OEM-38