Description
Refurbished Temescal FC-1800 Loadlock Electron Beam Evaporator System
SemiStar Corp. offers refurbished Temescal FC-1800 loadlock electron beam evaporator systems for semiconductor, optical coating, compound semiconductor, university, research institute, and advanced materials thin film deposition applications.
We currently have 4 sets of Temescal FC-1800 systems in stock. These systems are offered in refurbished condition with OEM specifications, warranty, and installation support if applicable.
The Temescal FC-1800 is a production-proven fast-cycle loadlock evaporation system designed for high-throughput vacuum deposition, improved reproducibility, and reduced contamination by keeping the evaporation chamber under vacuum while substrates are loaded and unloaded through an isolated chamber. :contentReference[oaicite:0]{index=0}
Photos shown are for reference only. Actual configuration, options, condition, and installed accessories may vary. Final specifications are subject to formal quotation.
Availability
- Temescal FC-1800 Loadlock E-Beam Evaporator Systems
- Quantity: 4 sets in stock
- Refurbished condition
- Refurbished with OEM specifications
- Warranty included
- Installation and startup support available if applicable
- Subject to prior sale
Current Available Configuration
- Temescal FC-1800 Evaporator System
- Temescal CV-14 Electron Beam Power Supply
- CTI Cryopump 8
- CTI-Cryogenics Compressor Model SC
- Varian Vacuum Pump Model EXPPTS06003
- Electron beam source assembly
- Vacuum chamber and loadlock system
- Vacuum gauges and vacuum controls
- System control cabinet and accessories
System Description
The Temescal FC-1800 is a compact fast-cycle loadlock coating system designed for production-scale vacuum deposition. The system uses an isolated load/unload chamber concept to keep the evaporation chamber under vacuum during operation, helping improve reproducibility and reduce contamination.
The compact 20-inch diameter by 11-inch deep deposition chamber provides fast pumpdown and flexible deposition capability. The FC-1800 can support canted-dome or angle-of-incidence planetary fixtures, electron beam sources, shutters, rate and thickness monitoring, and optional substrate heating depending on final configuration.
Key Features
- Fast-cycle loadlock electron beam evaporation system
- High-throughput evaporation design
- Improved reproducibility due to continuous vacuum source chamber design
- Reduced source and substrate heater contamination through isolated lower chamber
- Low-profile construction for convenient cleanroom or laminar-flow hood operation
- 20-inch diameter deposition chamber
- 18-inch diameter source chamber
- Automatic valve sequencing for pumpdown and venting
- Manual, semi-automatic, or fully automatic operation depending on configuration
- Optional canted-dome planetary fixturing
- Optional substrate heaters
- Optional rate and thickness monitor system
- Optional multi-crucible or second electron beam source
- Optional wire feeders, shutters, and process automation modules
Electron Beam Source and Power Supply
- Temescal 270-degree deflection electron beam source capability
- Single or multiple-crucible source configurations available depending on system setup
- Single, sequential, or graded deposition capability depending on configuration
- Temescal CV-14 electron beam power supply available
- 14 kW / 10 kV class electron beam power supply capability
- Optional NE-6 switching power supply available depending on configuration
Vacuum and Pumping System
- Loadlock deposition chamber with fast pumpdown capability
- High-vacuum source chamber maintained under vacuum
- CTI Cryopump 8 configuration available
- CTI-Cryogenics compressor system
- Varian mechanical vacuum pump
- High-vacuum gate valve
- Roughing valve, vent valve, foreline valve, and high-vacuum gate valve sequence
- Gate valve also functions as a shutter before substrate heating and deposition
Typical Process Capability
- Metal thin film deposition
- Dielectric evaporation depending on source and process configuration
- Optical coating research
- Semiconductor thin film deposition
- Lift-off process applications
- Compound semiconductor research
- University and R&D laboratory deposition
- Sequential or multi-material deposition depending on configuration
Reference Specifications
| Cycle Time | 10 to 15 minutes for 1 µm aluminum |
| Coating Uniformity | ±7% with high-speed planetary substrate fixture |
| Deposition Chamber | 20 in. diameter x 11 in. high |
| Source Chamber | 18 in. diameter |
| Source Tray | 19 in. diameter blank flat plate |
| Construction | Polished 304 stainless steel internal surfaces |
| Loadlock Pumpdown | Less than 2 minutes |
| Typical Operating Vacuum | Mid 10-6 to mid 10-7 torr range with standard pumping system |
| Ultimate Operating Vacuum | 10-8 torr with standard pumping system |
| Instrument Weight | Less than 1800 lb. / 818 kg |
Facility Requirements
- Electrical power: 208 V, 3-phase, 70 A, 50/60 Hz, 5-wire with active neutral and equipment ground, unless otherwise configured
- Cooling water required
- Filtered compressed air required
- Vacuum pump exhaust connection required
- Ambient temperature and humidity control recommended
- Customer is responsible for facility preparation, utilities, exhaust, rigging, and local code compliance unless otherwise specified in quotation
Refurbishment and Service
- System inspection and refurbishment
- Vacuum chamber cleaning and leak check
- Pump and cryopump inspection/refurbishment as required
- Power supply inspection and test
- Electron beam source inspection and refurbishment
- Safety interlock verification
- Final functional test before shipment
- Installation and startup support if applicable
- Warranty provided under formal quotation terms
RFQ Information Requested
To recommend the correct configuration and refurbishment scope, please provide:
- Substrate size and material
- Deposition materials
- Film thickness and uniformity requirements
- Required process temperature or substrate heating needs
- Preferred power supply configuration
- Required vacuum level
- Facility location and available utilities
- Installation and training requirements
- Expected purchase timeline
Important Notes
- All configurations and specifications are subject to final inspection and formal quotation.
- Actual available system configuration may vary by inventory unit.
- Some options may require additional refurbishment, upgrade, or replacement cost.
- All OEM names and trademarks belong to their respective owners.
- Website information is for reference only and is not final purchase specification.
Contact SemiStar
SS380-MSP145
