Description
Refurbished CHA Mark 50 Electron Beam Evaporator System
SemiStar Corp. offers a refurbished CHA Industries Mark 50 Electron Beam Evaporator System for semiconductor, university, research institute, compound semiconductor, optical coating, and advanced materials thin film deposition applications.
This system was previously used for 6-inch GaAs processing before being moved to our warehouse in Morgan Hill, California, USA 95037.
The system is offered in refurbished condition with OEM specifications, warranty, and installation support if applicable.
Photos shown are for reference only. Actual configuration, installed accessories, options, and condition may vary. Final specifications are subject to formal quotation.
Availability
- CHA Industries Mark 50 Electron Beam Evaporator System
- Previously used for 6-inch GaAs processing
- Located in Morgan Hill, California, USA 95037
- Refurbished condition with OEM specifications
- Warranty available under formal quotation terms
- Installation and startup support available if applicable
- Subject to prior sale
System Information
- OEM: CHA Industries
- Model: Mark 50
- Serial Number: 1356-22069
- Internal Reference ID: SS380-000A-ED-20210722
- High Voltage Power Supply: CHA SR-10 Electron Beam High Voltage Power Supply
Refurbished Configuration
- 6-pocket crucible, 25cc pockets or equivalent
- GP-307 ion gauge controller
- CHA gun indexing controller
- SR-10 10kW e-beam power supply or equivalent
- CHA XY sweep module
- Shutter assembly
- Standard CHA controllers or equivalent
- Inficon IC5 deposition rate controller or equivalent
- Inficon sensor assembly located on top of chamber
- CHA HiVac valve
- CTI CT-400 cryopump or equivalent
- CTI 8500 compressor or equivalent
- System shielding and lift-off dome
System Description
The CHA Mark 50 is an electron beam evaporation platform designed for thin film deposition applications including compound semiconductor processing, metal deposition, optical coating, lift-off processes, and advanced materials research.
This available system was previously used for 6-inch GaAs applications and includes a CHA SR-10 10kW class e-beam power supply, gun indexing control, XY sweep capability, deposition rate control, cryopump high vacuum package, shielding, and lift-off dome configuration.
Refurbishment Process
E-Gun
- Rebuild e-gun if necessary
- Replace all O-rings and bearings with new parts
- Regauss magnet
Power Supply / SR-10
- Complete inspection and test
- Replace any bad or low-quality components if necessary
Process Chamber
- Chamber cleaning
- Clean and electropolish doors
- Shield cleaning
- Replace all O-rings and seals with new parts
- Replace front viewport and add new periscope assembly if necessary
- Replace air and water lines if necessary
- Rebuild CHA valves if necessary
- Clean the frame
- Replace water flow switches if necessary
High Vacuum Pump
- Full rebuild CTI CT-400 cryopump if necessary
- Full rebuild CTI 8500 compressor if necessary
Vacuum Gauge
- Test GP controller and replace ion tubes if necessary
- Verify all interconnects are working properly
System Checks
- Full test of all controls
- Leak test system and verify chamber pumps to < 5.0 × 10-7 torr
- Test system in manual and auto modes with evaporator metal, such as Al, for proper sequencing and operation if applicable
Electron Beam Evaporation Capability
- Electron beam thin film deposition
- 6-pocket crucible configuration
- 25cc pockets or equivalent
- XY beam sweep capability
- Gun indexing control
- Deposition rate control
- Shutter assembly
- Lift-off dome configuration
- High vacuum cryopump configuration
Typical Applications
- GaAs thin film deposition
- Compound semiconductor processing
- Metal evaporation
- Lift-off process applications
- Optical coating research
- Semiconductor material research
- University and institute R&D applications
- Advanced materials development
- Laboratory vacuum coating applications
Reference Specifications
| System Type | Electron beam evaporator thin film deposition system |
| OEM | CHA Industries |
| Model | Mark 50 |
| Serial Number | 1356-22069 |
| Previous Application | 6-inch GaAs processing |
| Crucible | 6-pocket, 25cc pockets or equivalent |
| E-Beam Power Supply | CHA SR-10 10kW or equivalent |
| Deposition Controller | Inficon IC5 or equivalent |
| Vacuum Gauge Controller | GP-307 ion gauge controller |
| High Vacuum Pump | CTI CT-400 cryopump or equivalent |
| Compressor | CTI 8500 compressor or equivalent |
| Location | Morgan Hill, California, USA 95037 |
| Condition | Refurbished with OEM specifications |
| Internal Reference ID | SS380-000A-ED-20210722 |
Facility Requirements
- Customer is responsible for facility preparation
- Electrical power required
- Cooling water required
- Vacuum pump exhaust connection required
- Compressed air may be required depending on valve configuration
- Rigging, utilities, exhaust, and local code compliance are customer responsibility unless otherwise specified
RFQ Information Requested
- Substrate size and material
- Deposition materials
- Film thickness requirements
- Required deposition rate and uniformity
- Vacuum level requirements
- Lift-off dome or fixture requirements
- Facility location and utilities
- Installation and training requirements
- Expected purchase timeline
Important Notes
- All configurations and specifications are subject to final inspection and formal quotation.
- Equivalent components may be used when original components are unavailable or when replacement is required during refurbishment.
- Refurbished systems include refurbishment scope based on final quotation and agreement.
- All OEM names and trademarks belong to their respective owners.
- Website information is for reference only and is not final purchase specification.
Contact SemiStar
SS6145-CHA-MARK50
1 CHA AUTOTECH II THERMAL EVAPORATOR / VACUUM DEPOSITION CHAMBER 2 CHA AUTOTECH II THERMAL EVAPORATOR / VACUUM DEPOSITION CHAMBER WITH E GUN 3 CHA GLOW DISCHARGE-Remove Oil, Epoxy and other Contaminations on the Surface 4 CHA Industries 5549-6 Adjustable Contamination Shield 5 CHA Industries 5549-9 Buss Bar 6 CHA Industries 7569-6 Heater Power Supply 7 CHA Industries Brass Vacuum Valve ST-12S 1-5/8″ Socket 8 CHA INDUSTRIES CP01010 PCB BOARD 9 CHA Industries Crucible Control Indicator EA-5 10 CHA Industries Deposition Current 2 V Full Scale C.H.A E.A. 3 11 CHA Industries E Beam Evaporator Chassis Stainless Steel Vacuum Chamber Parts 12 CHA Industries E-Beam Power Tube for Hi-Vac SE-600-RAP Deposition System 13 CHA Industries Fixture Control with Model SL15 MINARIK Shunt Wound Control Motor 14 CHA INDUSTRIES IG100N / IG100N 15 CHA Industries ION Tube Type IG100K Menlo Park 16 CHA Industries KEL-162 Vacuum Valve 17 CHA Industries Mark 50 E-Beam Eveporator 18 CHA Industries Mark 50 Vacuum Chamber, 32″ Dia 19 CHA Industries Model 02 Guage Controller 20 CHA INDUSTRIES MOTOR SPEED CONTROLLER 21 CHA Industries Motor Speed Controller 115V-3.4A-115W FOR PARTS 22 CHA Industries MPT-300-ST Sieve Trap 23 CHA Industries Panel With Cables / Wires For Thin Film Deposition Equipment 24 CHA Industries Planet Dome Hanger 25 CHA Industries Shutter Blade Set 26 CHA Industries Thermal Evaporation Source Vacuum Wafer System # SEC-600-RAP 27 CHA Industries Thermal Evaporation Source Vacuum Wafer System SEC-400-RAP 28 CHA Industries Type: IG100N ION Tube 29 CHA INDUSTRIES VACUUM KEL-162 VALVE 30 CHENBRO RM42200-1 1.2mm SGCC 4U Rackmount Feature-Advanced Industrial Server Cha 31 Granville Phillips gauge controller 260020, model 01, H4, CHA Industries 32 Granville Phillips/ CHA Industries Model 01 Gauge Controller (Cat. #: 260016) 33 Granville Phillips/ CHA Industries Model 01 Gauge Controller (Cat. #: 260020) 34 Granville Phillips/ CHA Industries Series 260 Model 01 Gauge Controller 260016 35 Granville Phillips/ CHA Industries Series 260 Model 01 Gauge Controller 260022 36 Hoffman A604CH/8PL CONTROL PANEL ENCLOSER 37 Key BA-75 Vacuum Shut Off Valve Manifold for CHA Industries Vacuum Pump 38 TELEMARK / CHA THERMAL EVAPORATOR / VACUUM DEPOSITION CHAMBER W/ E BEAM GUN 39 VARIAN CHA Industries LN2 Control Liquid Nitrogen 40 VARIAN THERMAL EVAPORATOR / VACUUM DEPOSITION CHAMBER
