Description
Jipelec RTA
Condition: Used
Description for your reference:
The Jipelec RTA is a very powerful rapid thermal processing machine. The stainless steel cold wall chamber provides a very clean process environment. Small samples are placed on a 6″ wafer holder. Temperature control depends upon your final steady state temperature. For temperature below 500°C, a thermocouple is used to control the temperature. For temperatures above 500C, and pyrometer is used.
Capabilities
- Capable of handling small chip samples as well as whole wafers up to 8 inch
- Temperature ramping rates can be as high as 300°C per second, although not recommended for process reproducibility
- Process gases include N2, O2, Ar, and Forming Gas
- Vacuum annealing capability down to 50 mTorr
- 1000°C maximum steady state temperature
- 5 minute maximum steady state time
This is only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!
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