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Glen Technologies R3A

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Glen Technologies R3A,Glen Technologies ,Yield Engineering, YES-R3A Plasma Asher

  • PLC controlled and offers real-time plain English readout of system operating parameters together with remedial action in the event of an abort.
  • Active Plasma for routine cleaning of sample surfaces
  • Electrodes: (2) 14 x 14-inch electrode sets; capable of up to 8 sample trays
  • 3 Plasma Modes: ACTIVE PLASMA for routine cleaning of sample surfaces;RIE PLASMA for aggressive cleaning of non-ESD sensitive samples; DOWNSTREAM ELECTRON-FREE PLASMA for cleaning sensitive electronic components
  • Gas Inputs: dual gas inputs with needle valves, PLC-controlled
  • Computer Interface: RS 232 interface
  • Power Requirements: 110Volt
  • Full Load Current Rating: 13 Amp
  • RIE Plasma for aggressive cleaning of non ESD sensitive samples
  • Downstream, Electron-Free Plasma for cleaning sensitive electronic components
  • The Glen R3A Plasma Cleaner can be operated in a single or dual plasma sequence
  • Advanced Energy PE-1000 AC Plasma Power Source; 500w@ 40khz

Location: CA, U.S.A.

Condition: We sell this item at complete, working, functional test with OEM specifications.

These are  subject to prior sale. These are only for end user. Appreciate your time.

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.

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SS7270-1-2-1-1 and SS7270W-Gasoncis 9104-SS380EB

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers