Description
CHA Mark 40 CV RH-PC/PLC Vacuum Evaporator
Condition: Used.
Location: USA
Lead time: TBD
Valid Time: Subject to prior sale. This item is only for end user.
System info from the owner for your reference.
– System Wiring: 120/280 V
– 3 Phase, 5 Wire, 60 cycle
– 26″ Diameter by 26″ Long Process Chamber
– Water Cooled Chamber Front Door
– Hinged Rear Chamber Door
– Complete Sets of Chamber Shields
– VAT High-Vac Valve
– Brooks CTI On-Board Water Pump Package and Compress
– Brooks CTI On-Board 400 Cryopump
– CTI On-Board Auto Regeneration Control
– Ebara Model EV-A10-2U Dry Pump
– Vacuum Main Folding
– Granville-Phillips Model 307 Digital Ionization Gauge Controller
– Modern Metal Cabinet
– Single Service Electrical Drop Box
– Soft Vent
– Soft Roughing
– Lift-Off Fixturing
– Source Viewing Mirror Array
– Flag Shutter Assembly
– CHA SmartSource Electron Beam Gun with Motor Driven Crucible Rotation and Lid Lift
– RGA Isolation Valve and Interlock with Hi-VAc Valve
– System Indication Light Tower
OEM-3-2-1-1 and SS5816-2024-3
