Description
CHA Industries Thermal Evaporator System Semiconductor Vacuum Deposition Equipment
SemiStar Corp. offers a CHA Industries Thermal Evaporator System for semiconductor, university, research institute, optical coating, and advanced materials thin film deposition applications.
This system is currently configured as a 2-source thermal evaporator. More detailed photos are available upon request.
Depending on customer budget and project requirements, we can sell this system in AS-IS condition or as a complete, working system with functional test. Please contact us for more information. We appreciate your time.
An optional e-beam evaporator function is also available under the complete, working, functional test option. The e-beam configuration includes 1 source. 2 to 4 e-beam sources may be available, but are generally not recommended unless specifically required by the customer application.
Photos shown are for reference only. Actual configuration, installed accessories, options, and condition may vary. Final specifications are subject to formal quotation.
Availability
- CHA Industries thermal evaporator system
- 2-source thermal evaporation configuration
- Available AS-IS condition
- Available complete, working, functional test condition
- Optional e-beam evaporator function available under functional test scope
- More photos and details available upon request
- Subject to prior sale
Current Configuration
- CHA Industries thermal evaporator system
- 2 thermal evaporation sources
- Heating function
- Up to 8-inch substrate capability
- Crystal thickness monitoring function
- Diffusion pump vacuum configuration
- Main unit without wheels
- Other modules with wheels
Optional E-Beam Evaporator Function
- E-beam evaporator option available under complete, working, functional test scope
- 1 e-beam source configuration available
- 2 to 4 e-beam sources may be available, but are not generally recommended unless required
- Optional DC power supply and control cabinet may be required for e-beam function
- Final e-beam configuration subject to inspection and quotation
Sales Conditions
AS-IS Condition
- System sold in current condition
- No refurbishment included unless separately quoted
- Recommended for customers with internal engineering, inspection, and refurbishment capability
- Final included components to be confirmed before purchase
Complete, Working, Functional Test Condition
- System inspected and functionally tested before shipment
- Basic operating functions verified based on agreed scope
- Thermal evaporation function test available
- E-beam function test available if included in final quotation
- Final acceptance criteria to be defined before purchase order
System Description
The CHA Industries thermal evaporator system is a vacuum thin film deposition platform suitable for semiconductor material research, optical coating, metal evaporation, lift-off process support, and advanced materials development.
The system includes thermal evaporation capability, substrate heating, crystal thickness monitoring, and diffusion pump vacuum configuration. The platform can support substrates up to 8 inches depending on final fixture and process configuration.
Typical Applications
- Thermal evaporation thin film deposition
- Metal evaporation
- Optical coating research
- Semiconductor material research
- Lift-off process applications
- University and institute R&D applications
- Advanced materials development
- Laboratory vacuum coating applications
- Optional e-beam evaporation applications
Reference Facility Requirements
The following facility requirements are provided for reference only. Final requirements must be confirmed based on actual system configuration and final quotation scope.
| Electrical Requirements | AC 208 V, 3 phase, 100 A, 50/60 Hz, 5-wire with active neutral and equipment ground; tolerable voltage ±5% |
| Cooling Water | Filtered 3.5 gpm at 50 psig inlet pressure, 60 to 80°F. Chiller or PCW plant cooling water may be used. |
| CDA | Approximately 25 cfm at 60 to 125 psig inlet pressure, filtered and dried |
| Nitrogen Purge | Approximately 10 cfm at 30 psi |
| LN Cooling | Approximately 1.5 gallons |
Reference Footprint
| Main Frame with Chamber | 50 in. W × 60 in. D × 125 in. H |
| DC Power for E-Beam Function | 30 in. W × 40 in. D × 28 in. H; approximately 5 ft to main frame and 2 ft to dry pump |
| Control Cabinet for E-Beam Function | 22 in. W × 27 in. D × 80 in. H; approximately 2 ft to main frame |
| Dry Pump Reference | 16 in. W × 38 in. D × 22 in. H; approximately 2 to 3 ft to main frame |
| Mobility | Main unit has no wheels. Other modules have wheels. |
Facility Notes
- CV8 power supply is 8 kW and may require approximately 50 A for full load.
- Diffusion pump is approximately 5 kW and may require approximately 30 A.
- Main unit may require approximately 20 A.
- A power distribution box may be used to split AC power to major units.
- If customer wants to split AC power, at least two 30 A circuits and one 20 A circuit may be required.
- E-beam power may only run approximately 50–60% of full load depending on available facility power and configuration.
- A chiller may be used as the cooling water supply. The 3.5 gpm cooling water flow can be used for chiller selection.
RFQ Information Requested
- Preferred purchase condition: AS-IS or complete working functional test
- Thermal evaporation only or thermal + optional e-beam function
- Substrate size and material
- Deposition materials
- Film thickness requirements
- Required deposition rate and uniformity
- Vacuum level requirements
- Heating requirements
- Facility location and available utilities
- Installation or training requirements
- Expected purchase timeline
Important Notes
- All configurations and specifications are subject to final inspection and formal quotation.
- AS-IS systems are sold in current condition without refurbishment unless otherwise specified.
- Complete, working, functional test scope must be defined in the final quotation before purchase order.
- Optional e-beam function availability and performance must be confirmed before quotation.
- Facility requirements are provided for reference only and may change depending on final system configuration.
- All OEM names and trademarks belong to their respective owners.
- Website information is for reference only and is not final purchase specification.
Contact SemiStar
SS380-MSP-15-95
1 CHA AUTOTECH II THERMAL EVAPORATOR / VACUUM DEPOSITION CHAMBER 2 CHA AUTOTECH II THERMAL EVAPORATOR / VACUUM DEPOSITION CHAMBER WITH E GUN 3 CHA GLOW DISCHARGE-Remove Oil, Epoxy and other Contaminations on the Surface 4 CHA Industries 5549-6 Adjustable Contamination Shield 5 CHA Industries 5549-9 Buss Bar 6 CHA Industries 7569-6 Heater Power Supply 7 CHA Industries Brass Vacuum Valve ST-12S 1-5/8″ Socket 8 CHA INDUSTRIES CP01010 PCB BOARD 9 CHA Industries Crucible Control Indicator EA-5 10 CHA Industries Deposition Current 2 V Full Scale C.H.A E.A. 3 11 CHA Industries E Beam Evaporator Chassis Stainless Steel Vacuum Chamber Parts 12 CHA Industries E-Beam Power Tube for Hi-Vac SE-600-RAP Deposition System 13 CHA Industries Fixture Control with Model SL15 MINARIK Shunt Wound Control Motor 14 CHA INDUSTRIES IG100N / IG100N 15 CHA Industries ION Tube Type IG100K Menlo Park 16 CHA Industries KEL-162 Vacuum Valve 17 CHA Industries Mark 50 E-Beam Eveporator 18 CHA Industries Mark 50 Vacuum Chamber, 32″ Dia 19 CHA Industries Model 02 Guage Controller 20 CHA INDUSTRIES MOTOR SPEED CONTROLLER 21 CHA Industries Motor Speed Controller 115V-3.4A-115W FOR PARTS 22 CHA Industries MPT-300-ST Sieve Trap 23 CHA Industries Panel With Cables / Wires For Thin Film Deposition Equipment 24 CHA Industries Planet Dome Hanger 25 CHA Industries Shutter Blade Set 26 CHA Industries Thermal Evaporation Source Vacuum Wafer System # SEC-600-RAP 27 CHA Industries Thermal Evaporation Source Vacuum Wafer System SEC-400-RAP 28 CHA Industries Type: IG100N ION Tube 29 CHA INDUSTRIES VACUUM KEL-162 VALVE 30 CHENBRO RM42200-1 1.2mm SGCC 4U Rackmount Feature-Advanced Industrial Server Cha 31 Granville Phillips gauge controller 260020, model 01, H4, CHA Industries 32 Granville Phillips/ CHA Industries Model 01 Gauge Controller (Cat. #: 260016) 33 Granville Phillips/ CHA Industries Model 01 Gauge Controller (Cat. #: 260020) 34 Granville Phillips/ CHA Industries Series 260 Model 01 Gauge Controller 260016 35 Granville Phillips/ CHA Industries Series 260 Model 01 Gauge Controller 260022 36 Hoffman A604CH/8PL CONTROL PANEL ENCLOSER 37 Key BA-75 Vacuum Shut Off Valve Manifold for CHA Industries Vacuum Pump 38 TELEMARK / CHA THERMAL EVAPORATOR / VACUUM DEPOSITION CHAMBER W/ E BEAM GUN 39 VARIAN CHA Industries LN2 Control Liquid Nitrogen 40 VARIAN THERMAL EVAPORATOR / VACUUM DEPOSITION CHAMBER
