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AG Associates
Agilent, HP
Branson/IPC
BROOKS, EQUIPE, PRI
Canon
Cascade Microtech
CHA
Ekrubnano
Electroglas
F.E.I.
Gasonics
Glow Research
Hitachi
KLA-Tencor
Kurt J Lesker
Lam Research
Matrix
MRC
NANO-MASTER
Oxford
Perkin-Elmer
PlasmaTherm
Samco
STS, SPTS
Tegal
Temescal, TES
Tystar
USIC
Varian
Si Wafer Carriers
Wanted Equipment, Parts

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SemiStar Corp. Semiconductor Equipment Parts Service

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Equipment Inventory

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Branson IPC L3200

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Branson IPC L3200

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Gasonics L3510

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Branson IPC L3200

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Lam 590 AutoEtch

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Lam AutoEtch 590

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HP 4062UX – HP 4284A – HP 4142B – HP 4084B

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Agilent HP 4062UX Parametric Test System

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HP4062UX DC Parametric Tester

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Semiconductor Parametric Test System

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Semiconductor Process Control System

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Plasma Therm 700

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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Branson IPC L3200

Branson IPC L3200

Gasonics L3510

Branson IPC L3200

Lam 590 AutoEtch

Lam AutoEtch 590

HP 4062UX – HP 4284A – HP 4142B – HP 4084B

Agilent HP 4062UX Parametric Test System

HP4062UX DC Parametric Tester

Semiconductor Parametric Test System

Semiconductor Process Control System

Plasma Therm 700