Tystar Equipment: MINI SERIES | STANDARD SERIES | NANO SEREIS | SOLAR SERIES | Photo-Enhanced CVD | Tystar Instruments: GAS CONTROL| MASS FLOW TESTER | FLOW CALIBRATOR
In these processes, nitrogen carries the liquid source from a bubbler to the process tube where it reacts with oxygen to form a borosilicate or phosphosilicate glass. Dopant atoms then diffuse into the silicon to dope it.
- Sheet Resistance: 1-100 Ω/□
- Batch Size: 50
- Gases: Nitrogen, Oxygen, Hydrogen
- Uniformity: < 10%
