Description
STS, SPTS ASE Multiplex ICP System, RIE Etch Advanced Silicon Etcher, complete
Location: CA USA.
Valid : It is only for end users and is subject to prior sale without notice. Appreciate your time!
Condition: We sell it at AS IS or complete, working, functional test at extra cost.
Photos: Download.
Info on the system from the owner for your reference.
- OEM = Surface Technology Systems Limited : STS, SPTS,
* Model = MESC Multiplex ICP ASE
* Type = ICP RIE (Inductively Coupled Plasma, Reactive Ion Etch)
* Description of Process = ASE (Advanced Silicon Etch, Bosch Process)
* Wafer Size = 150mm
* Loader capacity = 2 wafer Carousel
* Chuck Type = Mechanical Weighted Clamp
* Process Gases:
* C4F8 = 300 SCCMS
* SF6 = 600 SCCMS
* O2 = 100 SCCMS
* AR = 100 SCCMS
* MFC’s are Millipore FC2901 Series
* Turbo Pump = Leybold Mag 2000 CT
* RF Generator 1 = ENI ACG-3
* RF Generator 2 = AE RFG 3001 (Advanced Energy)
* Vacuum measurement = MKS Instruments
* Gate Valve = VAT throttling type gate valve
* Slit Valve = VAT Slit Valve
* Manuals = STS MESC Multiplex ICP Operator’s and Modular Parts Catalogue
* Vacuum Pump Loadlock = Edwards Pump E2M40
* Vacuum Pump Process Module = Edwards Pump IQDP80 w/IQMB250 Blower (Intelligent Quiet Interface)
* Chiller = Affinity, PWG-060K-BE33CBC2
* Support Module = STS Controller Cabinet / AC Breaker Panel
OEM-25-1-SS380EB-MSP-125000