Description
Used semiconductor equipment spare parts. These are only for end user. They are subject to prior sale without notice. Appreciate your time.The items are subject to prior sale without notice. These items are only for end users.
| Rudolph | MP300XCu | Cu Film thickness measurement | 300mm |
| Rudolph | MP300 | Metal Film thickness measurement | 300mm |
| Ebara | Frex 300( without HDD) | W CMP | 300mm |
| Ebara | Frex 300 | STI CMP( some missing part) | 300mm |
| Nitto Denko | MA 3000 II | wafer mounter and demounter | 300mm |
| EO Tech | CSM 3000 | laser mark | 300mm |
| Brooks | load port | Fixload 6M, Vision, Fixload 25 | 300mm |
| TDK | load port | E3, E4, E4A, F1 | 300mm |
| Asyst | Isoport | wafer load port | 300mm |
| Rorze | load port | RV201 | 300mm |
| August | 3Di-8000 | wafer bumping inspection | 300mm |
| KLA | EFEM module of 2835i | Yaskawa 9206 robot with 2 sets of Isoport | 300mm |
| KLA | EFEM module of 3Di | Yaskawa 9206 robot with 2 sets of Sinfonia loadport | 300mm |
| Nanometrics | EFEM module of Caliper Mosaic | Brooks Razor robot with Brooks load port | 300mm |
| Nanometrics | EFEM module of Lynx | Kawasaki robot with TDK load port | 300mm |
| HSEB Zeiss | Axiotron 300 | AOI microscope with 2 units of Brooks load port | 300mm |
| DNS | RF3S | coater and developer( 5C5D) | 300mm |
| Rorze | Wafer sorter with RR717L1521 robot | wafer sorter for 300mm wafer | 300mm |
| DNS | SK-2000 | coater and developer(4C4D) | 200mm |
| SUSS | ACS-200 | coater and developer(1C1D) | 200mm |
| Raytex | RXW-0826SFIX-SMIF | edge scanner | 200mm |
| Nanometrics | 8000Xse | Ox film thickness measurement | 200mm |
| Rudolph | MP200XCU | Cu Film thickness measurement | 200mm |
| Asyst | LPT 2200 | SMIF loader | 200mm |
| Asyst | Versaport 2200 | SMIF loader | 200mm |
| Asyst | Versaport pod opener 2200(VPO) | SMIF loader | 200mm |
| Asyst | e-charger | N2 charger | 200mm |
| EVG | 820 | mold carrier lamination | 200mm |
| LAM | Ontrak Synergy | Post CMP cleaner with HEPA mini-environment | 200mm |
| IPEC | 472 | CMP | 200mm |
| August | NSX-105 | wafer bomping inspection | 200mm |
| August | NSX-95 | 2D Auto inspection system | 200mm |
| Nikon | NWL860-TBM with Optophot 200 | wafer auto loader with Microscope | 200mm |
| Nanometrics | 8000X | film thickness measurement | 150mm |
| DNS | WS-820L | Bench type wafer cleaner( square solar wafer) | 150mm |
| IPEC | 472 | CMP( fully refurbished) | 150mm |
| ASM | MS896 | LED sorter | 100mm |
| ASM | WS896 | LED sorter | 100mm |
| Nikon | optiphot 150 | Microscope | 100/150mm |
| Nikon | ECLIPSE L150 | Microscope | 100/150mm |
| SAMCO | RIE-212 ICP | LED | 50/100mm |
| SAMCO | PD3800 PECVD | 1 for 4″ LED and 1 for 6″ Si wafer | 50/100/150mm |
| Maker | Model | Part description | wafer size |
| Brooks PRI | DBM 2406 | Dual arm Atmospheric wafer handling robot | 200/300mm |
| Brooks PRI | DBM 2407 | Dual arm Atmospheric wafer handling robot | 200/300mm |
| Brooks PRI | ABM/ATM 407B | single arm atmospheric wafer handling robot | 200/300mm |
| Brooks PRI | ABM/ATM 405 | single arm atmospheric wafer handling robot | 200/300mm |
| Brooks PRI | ABM 205 | single arm atmospheric wafer handling robot | 200/300mm |
| Brooks PRI | ATM 305/307 | single arm atmospheric wafer handling robot | 200/300mm |
| Brooks PRI | ATM 204/207 | single arm atmospheric wafer handling robot | 200/300mm |
| Brooks PRI | ESC-200/212/212B/222/218 | PRI robot controller( single arm robot) | 150/200/300 |
| Brooks PRI | EDC-2400/2800 | PRI robot controller(dual arm robot) | 150/200/300 |
| Brooks PRI | PRE 300/300B | wafer pre-aligner | 300mm |
| Brooks PRI | PRE 200/200B | wafer pre-aligner | 200mm |
| Brooks PRI | Mag 7 ( for LAM etching ) | vacuum robot 002-1600-07 | 200/300mm |
| Brooks PRI | Mag 8 | vacuum robot( AMAT Producer GT) | 300mm |
| Kawasaki | 3NX540B-A302 | atmospheric wafer robot( AMAT producer) | 300mm |
| Kawasaki | NS410B-A002 | atmospheric wafer robot( AMAT producer) | 300mm |
| Kawasaki | 3NS410B-A015 | atmospheric wafer robot( AMAT) | 300mm |
| Yaskawa | XU RSM53E0 | atmospheric wafer robot( Ebara Frex 300 CMP) | 300mm |
| Yaskawa | XU RCM9206 | atmospheric wafer robot( KLA 2835i and KLA 3Di) | 300mm |
| Yaskawa | XU RC350D-C61 | atmospheric wafer robot( DNS SU-3000) | 300mm |
| Yaskawa | XU RCM6841 | atmospheric wafer robot( AMAT Endura/Centura) | 300mm |
| MECS | UTC 800 | atmospheric wafer handling robot( WJ-999) | 150/200mm |
| MECS | UTC 801P | atmospheric wafer handling robot( WJ-1000, 1500) | 200mm |
| MECS | UTC 820Z | atmospheric wafer handling robot( Hitachi CD-SEM) | 200mm |
| MECS | UTX 1100 | atmospheric wafer handling robot(ASM eagle-10) | 200mm |
| MECS | UTX 1200 | atmospheric wafer handling robot(ASM eagle-10) | 200mm |
| MECS | OF 250 | wafer pre-aligner(Hitachi CDSEM 8820/8840) | 200mm |
| Genmark | GB4/3L | atmospheric wafer handling robot | 200mm |
| Genmark | GB8-MT-80050102 | Dual arm Atmospheric wafer handling robot | 200mm |
| Rorze | RR701L1521-3A3-111-2 | Dual arm Atmospheric wafer handling robot | 200mm |
| Rorze | RR701L90-Z20-616 | Dual arm Atmospheric wafer handling robot | 200mm |
| Rorze | RR717L1521 | Dual arm Atmospheric wafer handling robot | 200mm |
| Rorze | RR713L1521-3A3-E13(E11)-1 | Dual arm Atmospheric wafer handling robot | 200mm |
