Description
LAM Research Spare Parts
| 1 | LAM Research | 713-018426-369 | Insert, Vespel Ring | |
| 2 | LAM Research | 713-028487-001 | Confindment Vespel Ring | |
| 3 | LAM Research | 715-011531-014 | Electrode 8″, | Rainbow 4400 |
| 4 | LAM Research | 715-011531-015 | Electrode 6″ | Rainbow 4400 |
| 5 | LAM Research | 715-011531-102 | Electrode 6″ | Rainbow 4400 |
| 6 | LAM Research | 715-011640-005 | Focus Ring 4″ | |
| 7 | LAM Research | 715-011640-006 | Focus Ring 6″, Rainbow | |
| 8 | LAM Research | 715-011673-105 | Lower Electrode 5″, | |
| 9 | LAM Research | 715-011746-141 | Plate Wafer Clamp 4″ | |
| 10 | LAM Research | 715-011746-151 | Plate Wafer Clamp 5″ | |
| 11 | LAM Research | 715-011746-161 | Plate Wafer Clamp 6″ | |
| 12 | LAM Research | 715-018991-206 | Electrode Upper 6″ | Rainbow 4400 |
| 13 | LAM Research | 715-018991-208 | Electrode Upper 8″ | Rainbow 4400 |
| 14 | LAM Research | 715-018991-006 | Electrode Upper 8″ | Rainbow 4400 |
| 15 | LAM Research | 715-028087-005 | Shroud 6″ 2 mil hard | |
| 16 | LAM Research | 715-028559-001 | Showerhead 6″ | |
| 17 | LAM Research | 715-028606-161 | Wafer Clamp 6″ | |
| 18 | LAM Research | 715-030320-001 | BSR Injection Ring | |
| 19 | LAM Research | 715-28608-161 | Non-Contact Wafer Clamp | |
| 20 | LAM Research | 715-31752-206 | Electrode Lower 6″ | |
| 21 | LAM Research | 715-31752-208 | Electrode Lower 8″ | |
| 22 | LAM Research | 715-330000-090 | Gas Injection Ring | 9600 |
| 23 | LAM Research | 715-007469-002 | Lower Electrode 6″, 4 pin | AUTO ETCH |
| 24 | LAM Research | 715-330135-001 | BSR Injection Ring | 9600 |
| 25 | LAM Research | 715-330984-001 | BSR Injection Ring | 9600 |
| 26 | LAM Research | 715-330987-001 | BSR Injection Ring | 9600 |
| 27 | LAM Research | 715-11986-108 | Lower Elctrode | |
| 28 | LAM Research | 715-008721-001 | Electrode 6″ | 490 |
| 29 | LAM Research | 715-011531-008 | Electrode 6″ | 4400 |
| 30 | LAM Research | 715-011531-009 | Electrode 8″ | 4400 |
| 31 | LAM Research | 715-011531-012 | Electrode | |
| 32 | LAM Research | 715-007469-001 | Lower Electrode 6″, 4 pin | AUTO ETCH |
| 33 | LAM Research | 715-007469-102 | Lower Electrode 6″, 4 pin | AUTO ETCH |
| 34 | LAM Research | 715-007025-001 | Electrode | AUTO ETCH |
Valid time: Subject to prior sale without notice.
Contact us (sales@semistarcorp.com) for the availability and more info pls. Appreciate your time.
ID-SS6689w