Description
ZYVEX Nanoprober I ZYV301 Zeiss Supra 55 nProber I system
• Manufacturer: ZYVEX Corp
• Model/Main system: Zeiss Supra 55 nProber I system
• The nProber I System is a testing tool for semiconductor failure analysis as well as micro- and nanoscale research and development applications. The nProber accommodates eight positioners, each with three aces of motion(X, Y and Z). Each positioner can make contact with either transistor contacts or features at the metal 1 layer.
The nProber I System combines the fine manipulation abilities of the Nanomanipulator/Probe, a Zeiss SUPRA 55 Scanning Electron Microscope (SEM), a Parametric Analyzer System, and the Optimizer anti-contamination system. The nProber System integrates these main components, which interface with the DCG software that controls the entire system.
• Electron Column – Zeiss Germini, Schottky field emitter
• Beam Voltage
o SEM: 0.5V – 30kV
• Image Resolution
o SEM: 3nm from 0.5kV – 20kV
• Stage
o X,Y, Z piezo motion
• Equipment associated with the system
o 1. Zeiss SUPRA 55 FESEM
o 2. DCG nProber I 8 probe head assembly
o 3. Keithley 4200 (SCS) Semiconductor Characterization System
o 4. Electron Beam Absorbed Current (EBAC) – operated through Gatan Digital Micrograph
o 5. DCG OptimizerTM
o 6. Picosecond Pulse Generator 12010 800MHz
o 7. LeCroy 4 channel digital Oscilloscope
o 8. Agilent LCR meter
NOTE: Tool configuration shown is accurate to the knowledge of the owner.
Condition: Used. Great condition. We sell it at AS IS WHERE IS condition.
Valid time: Please contact us if you have this available. 1-10 pieces.
SS2544-2-1
