Description
Please contact us if you are interested in the following Resell-Metrology Equipment and Parts. The Equipment and Parts are only for end users and are subject to prior sale without notice. Appreciate your time. Please include the P/N, Description, Quantity and photos if possible.
| OEM PART #: | MATERIAL: | System | DESCRIPTION: |
| 0010-30057 | Al 6061-T6 | Etcher | Cathode Liner MXP |
| 0015-09055 | Bellows Assy Susceptor Hollow | ||
| 0015-09056 | Bellows Assy Wafer Solid | ||
| 0020-01271 | Al 6061 | CVD | Pumping Plate WxZ+/CxZ |
| 0020-04267 | Al 6061 | Endura | Thin Ring |
| 0020-04319 | Al 6061 | Endura | Liner Throttle Valve |
| 0020-05326 | Al 6061 | CVD | Baffle Clean Port ULTIMA |
| 0020-07718 | Al 6061 | Endura | Cover Ring Preclean II |
| 0020-10117 | Al 6061 | CVD | Perf Plate TESO 200mm |
| 0020-10402 | Al 6061 | CVD | Pumping Plate |
| 0020-10519 | Al 6061-T6 | Etcher | Pedestal 6″ |
| 0020-18367 | Monel 400 | CVD | Screw Slotted |
| 0020-18513 | Al 6061 | CVD | Diffuser Clean Port ULTIMA |
| 0020-18715 | Al 6061 | CVD | Insert Chamber Slit Valve ULTIMA |
| 0020-19002 | Al 6061-T6 | Etcher | Slit Valve Plate MXP |
| 0020-19003 | Al 6061-T6 | Etcher MxP | Slit Door Liner MXP |
| 0020-20112 | SUS304 | Endura | Clamp Ring 8″ |
| 0020-20937 | SUS316 | Endura | Clamp Ring 8″ |
| 0020-20962 | Ti Grade II | Endura | Clamp Ring 8″ |
| 0020-21279 | SUS316 | Endura | Clamp Ring 8″ |
| 0020-21365 | Ti Grade II | Endura | Clamp Ring 8″ |
| 0020-21414 | Ti | Endura | Clamp Ring 8″ |
| 0020-21479 | Ti Grade II | Endura | Clamp Ring 8″ |
| 0020-27205 | Ti Grade II | Endura | Titanium Clamp Ring 200mm |
| 0020-21664 | Ceramic | Insulator Source 13″ | |
| 0020-21901 | SUS 304/316 | Endura | Bracket Shield TiN |
| 0020-22510 | SUS316 | Endura | Clamp Ring 8″ |
| 0020-22844 | Al 6061 | Endura | Pedestal Shield Preclean |
| 0020-22982 | SUS 304/316 | Endura | Adaptor TiN |
| 0020-23041 | 6061-T6 | Endura | Clamp Shield |
| 0020-23625 | Ti CPII | Endura | Clamp Ring 6″ |
| 0020-23811 | Al 6061 | Endura | Collimator .625 Thick |
| 0020-24018 | Poly Crystal Si | Endura | Pin Antenna PCII |
| 0020-24406 | Ti CP ll | Endura | Clamp Ring 8″ |
| 0020-24812 | Al 6061 | Endura | Collimator .750 Thick |
| 0020-24914 | SUS304 | Endura | Cover Ring 8″ |
| 0020-25279 | SUS316 | Endura | Clamp Ring 8″ |
| 0020-26112 | Ti CP II | Endura | Clamp Ring 8″ |
| 0020-26115 | Ti CP II | Endura | Clamp Ring 8″ |
| 0020-26547 | SUS316 | Endura | Clamp Ring 8″ |
| 0020-26802 | SUS316 | Endura | Clamp Ring 8″ |
| 0020-26967 | Al 6061 | Endura | Gas Trench Cover PC II |
| 0020-26973 | Ti CP II | Endura | Shutter Disk 8″ |
| 0020-27018 | SUS316 | Endura | Clamp Ring 8″ |
| 0020-27100 | SUS316 | Endura | Clamp Ring 6″ |
| 0020-27113 | Ti CP II | Endura | Clamp Ring 6″ 4 pads |
| 0020-21616 | Ti Grade II | Endura | Clamp Ring 8″ |
| 0020-27220 | SUS316 | Endura | Clamp Ring 8″ |
| 0020-27309 | Ti Grade II | Endura | Clamp Ring 8″ |
| 0020-27639 | Ti Grade II | Endura | Clamp Ring 8″ |
| 0020-27690 | SUS316 | Endura | Clamp Ring 8″ |
| 0020-27702 | Ti CP II | Endura | Clamp Ring 8″ |
| 0020-29240 | SUS316 | Endura | Clamp Ring 8″ |
| 0020-29343 | SUS 304/316 | Endura | Shield Clamp IMP |
| 0020-29457 | Ti CP II | Endura | Clamp Ring 8″ |
| 0020-30111 | Al 6061 | CVD | Blocker Plate 200mm |
| 0020-30170 | Al 6061-T6 | Etcher | Pedestal Poly 8″ |
| 0020-30223 | Al 6061-T6 | Etcher | GDP 133 Holes |
| 0020-30570 | Al 6061-T6 | Etcher | 64 Holes GDP 150 mm WEB |
| 0020-31488 | Al 6061-T6 | Etcher | 13 Hole GDP MXP |
| 0020-31492 | Al 6061-T6 | Etcher | 101 Hole GDP MXP |
| 0020-31503 | Al 6061-T6 | Etcher | Chuck ASP 8″ |
| 0020-31820 | Al 6061-T6 | Etcher | 133 Hole GDP MXP |
| 0020-32036 | Al 6061 | CVD | Blocker Plate |
| 0020-34090 | Al 6061-T6 | Etcher | 37 Hole GDP MXP |
| 0020-34694 | Al 6061-T6 | Etcher MxP | Chamber Wall Liner MXP |
| 0020-34696 | Al 6061-T6 | Etcher | Slit Door Liner MXP |
| 0020-34710 | Al 6061 | CVD | Face Plate |
| 0020-34775 | Al 6061 | CVD | Blocker Plate (new # 0021-54545) |
| 0020-70285 | AL 6061 | Endura | Blade Buffer Frog Leg |
| 0020-78548 | Silicon Rubber | CMP | Diaphragm Rolling Upper 8″ Titan Head |
| 0020-79091 | PPS | CMP | Retainer Ring |
| 0020-79222 | Rubber | CMP | Diaphragm Seal (new # 0020-29237) |
| 0020-81482 | Cathode | ||
| 0020-89990 | Chamber | ||
| 0021-00041 | Al 6061 | CVD | Face Plate SiN DXZ |
| 0021-00042 | Al 6061 | CVD | Face Plate TESO DXZ |
| 0021-01813 | Al 6061 | CVD | Face Plate TESO PRODUCER |
| 0021-02469 | Al 6061 | CVD | Insert Liner Exhaust TxZ |
| 0021-02983 | Al 6061 | CVD | Shield Inner TxZ |
| 0021-02983 | Al 6061-T6 | Endura | Shield Inner TxZ |
| 0021-03061 | Al 6061 | CVD | Shield Inner TxZ |
| 0021-03637 | Al 6061 | CVD | Face Plate SiN PRODUCER |
| 0021-04267 | Al 6061-T6 | Etcher | GDP 101 Holes |
| 0021-06092 | Al 6061-T6 | Etcher | Slit Liner Door Super E |
| 0021-06148 | SUS316 | Endura | Clamp Ring 8″ |
| 0021-09104 | Al 6061-T6 | Etcher MxP | Cathode Liner MXP (new) |
| 0021-09718 | Al 6061-T6 | Etcher MxP | Slit Valve Liner MXP (new) |
| 0021-10223 | Al 6061-T6 | Etcher | Chamber Wall Liner MXP |
| 0021-11863 | SUS 304/316 | Endura | Cover Ring 8″ |
| 0021-13246 | Al 6061-T6 | Etcher | Slit Valve Door 300mm E MAX |
| 0021-15555 | Ti Grade II | Endura | Deposition Ring 8″ |
| 0021-20047 | Ti Grade II | Endura | Clamp Ring 8″ |
| 0021-20399 | Ti Grade II | Endura | Clamp Ring 8″ |
| 0021-21234 | SUS304 | Endura | Shield Upper Long 12″ |
| 0021-21616 | Ti | Endura | Clamp Ring 8″ (Good as of 8/30/11) |
| 0021-21617 | SUS304 | Endura | Clamp Ring 8″ (Still good Jan 2011) |
| 0021-21689 | Al 6061 | Endura | 8″ Pedestal |
| 0021-21900 | Al 6061 | Endura | Deposition Ring 6″ |
| 0021-22164 | Ti Grade II | Endura | Clamp Ring 8″ |
| 0021-35869 | Al 6061 | CVD | Perf Plate TxZ |
| 0021-36191 | 6061-T6 | Endura | Plate |
| 0021-37371 | Al 6061-T6 | Etcher | Pedestal 8″ |
| 0021-38119 | Al 6061 | CVD | Face Plate DXZ |
| 0021-39385 | Metal | Lid Plate R2 Chamber | |
| 0021-77624 | CMP | Membrane (New P/N: 0020-75160) | |
| 0021-79274 | 440C SST | CMP | Shaft Gear, Pad Conditioner |
| 0021-90405 | Liner | ||
| 0040-02132 | Al 6061 | CVD | Lid Plate TxZ |
| 0040-06596 | Al 6061 | CVD | Plate Lid TxZ |
| 0040-21367 | Al 6061-T6 | Etcher | Pedestal Universal 8″ |
| 0040-21528 | Ti Grade IV | Endura | Collimator Ti Foil |
| 0040-31980 | Al 6061 | CVD | Gas Box WxZ |
| 0040-33998 | Al 6061-T6 | Etcher | Slit Door Liner MXP |
| 0040-47425 | Qudrant PPS | CMP | Retainer Ring |
| 0040-50879 | Al 6061-T6 | Etcher | 111 Holes GDP HART 300 mm |
| 0041-05327M | Quadrant PPS | CMP | CMP Retaining Ring 12 Grooves W/Rounded Edges. |
| 0040-77243 | QUADRANT PPS | CMP | AEP Composit Ring for Mirra & Messa |
| 0190-00958 | Bearing | VHP Robot | VHP Robot Hub Bearing |
| 0190-00958UG | Bearing | VHP Robot | VHP Robot Hub Bearing Up Grade |
| 0190-00960 | Bearing | HP Robot | HP Robot +Wrist Bearing |
| 0040-78263 | Quadrant PPS | AEP II | AEP II Retainer Ring |
| 0190-35019 | Bearing | HP Robot | HP Robot +Hub Bearing |
| 0190-70070 | Bearing | HP Robot | F5ZZ 20 to 30% fill of Braycote 1613 Elbow Bearing |
| 0190-70075 | Bearing | HP Robot | HP Robot Wrist Bearing |
| 0190-70075C | Ceramic | HP Robot | HP Robot Wrist Bearing Ceramic |
| 0021-09914 | DxZ Centura | Plate Blocker DxZ Centura | |
| 0020-10117 | PERF Plate | ||
| 0190-70076 | Bearing | HP Robot | Nylon Retainer Microcote 29 Hub Bearing |
| 0190-70076C | Ceramic | HP Robot | 6″ Ceramic Hub Bearing |
| 0190-75039 | Bearing | VHP Robot | VHP Robot Elbow Bearing |
| 0190-75080 | Bearing | VHP Robot | VHP Robot Hub Bearing |
| 0190-75080 | Bearing | VHP Robot | VHP Robot Hub Bearing Up Grade |
| 0200-00303 | Sapphire | Lift Pin Sapphire | |
| 0200-00337 | Sapphire | 0200-09954 | Window Sapphire |
| 0200-00639 | Single Crystal Si | eMAX | Insert Ring for E MAX |
| 0200-00872 | Sapphire | Window Sapphire W/Groove | |
| 0200-01195 | Sapphire | G-01-06-378 | Window Sapphire |
| 0200-01338 | Poly Crystal Si | Etcher | Top Ring 300mm E MAX |
| 0200-01797 | Single Crystal Si | Etcher | Insert Ring (NM) 300 mm E MAX |
| 0200-02160 | Sapphire | Window 300mm DPS 2 | |
| 0200-02385 | Single Crystal Si | Etcher | Collar Super E |
| 0200-02853 | Sapphire | Lift Pin Sapphire | |
| 0200-02968 | Sapphire | Lift Pin Sapphire | |
| 0200-09626 | Single Crystal Si | MXP/MXP+ | Collar 150 mm MXP |
| 0200-09664 | Sapphire | Window Sapphire | |
| 0200-09952 | Sapphire | Window Sapphire | |
| 0200-09969 | Sapphire | Window Sapphire UV Coated | |
| 0200-09970 | Sapphire | Window Sapphire | |
| 0200-10100 | Sapphire | Window Sapphire | |
| 0200-10176 | Quartz | MxP | Quartz Shadow Ring 200mm |
| 0200-10243 | Quartz | MXP/MXP+ | Shadow Ring 150mm Flat |
| 0200-10346 | Sapphire | Window Sapphire | |
| 0200-10416 | Single Crystal Si | Etcher | Collar Notch MXP |
| 0200-10446 | Single Crystal Si | Etcher | Insert Ring E MXP (New P/N: 0200-01239) |
| 0200-18073 | Sapphire | Centura HDP | Tube Sapphire |
| 0200-18074 | Quartz | Centura HDP | Sheath Remote Plasma Tube Quartz |
| 0200-35084 | Quartz/Opaque | Upper Dome | |
| 0200-35292 | Quartz | End point Window | |
| 0200-35596 | Sapphire | Window Sapphire Chamfered Corners | |
| 0200-35957 | Sapphire | Window Sapphire | |
| 0200-36393 | Sapphire | Lift Pin Sapphire | |
| 0200-36461 | Sapphire | Window Sapphire | |
| 0200-36697 | Single Crystal Si | Etcher | Top Ring Supper E |
| 0200-39134 | Sapphire | DPS Metal | Window Sapphire W/Groove |
| 0200-71238 | Quartz | AKT 3500 | Sheath Remote Plasma Tube Quartz |
| 0200-00039 | Quartz | Etch | Clamp Ring 150mm |
| 0740-71763 | Bearing | CMP | CMP Bearing for Speed Fam/Ipec 676/776 |
| 1140-01192 | Power Supply | Power Supply | |
| 3750-01144 | Sapphire | Sapphire Assembly | |
| 3700-01243 | O-Ring | ||
| 3870-01494 | Sapphire | Clamp for P500 (replaces vespel) | |
| 0200-71207 | Sapphire | AKT 3500 | Sapphire Tube |
| 0200-09911 | Quartz | MxP | Cover Poly ESC Quartz |
| 0200-09785 | Quartz | Cap Poly ESC Quartz | |
| 0200-09782 | Quartz | Pipe Poly ESC Quartz | |
| 0200-09787 | Quartz | MxP | Ring Focus Poly ESC |
| 0200-09778 | Quartz | Poly ESC Focus Ring | |
| 0200-09657 | Quartz | MXP/MXP+ | Window Endpoint Low Stem |
| 0200-01216 | Quartz | For Maxim ONLY | Shadow Ring W/O Pins |
| 0200-36696 | Quartz | Etcher | Shadow Ring E MXP W/O Pins |
| Aluminum | TESO | (Clean Only) Gilbert Tech. | |
| 0200-00043 | Quartz | Etch | Quartz Cover 6″ Poly |
| 0200-00025 | Etch | Gas Ring 100-200mm MLR5 | |
| 0020-03379 | Etch ASP/Nitride | Gas Distribution Plate | |
| 0140-09083 | Harness Assembly Temp Swit | ||
| 1270-01416 | SW Thermostat 180 Deg.F | ||
| 0020-26288 | Lower Shield | ||
| 0100-09042 | Opto Switch | ||
| 0040-20614 | Collimator | ||
| 0020-00412 | Quartz/Sapphire | Lift & Lift Pin | |
| 0200-09216 | Quartz | Ring Pedistal 6″ MEC | |
| 0200-09744 | Quartz | Ring Focus Qtz Poly/WIS 150mm 170mm | |
| 0200-09474 | Quartz | Ring Cover 150mm Poly/XTAL Flat | |
| 0200-09074 | Quartz | ASP | Window Heater 200mm |
| 0200-09602 | Quartz | Etch | Insulating Pipe Quartz W/Flange |
| 0200-09366 | Graphite | Plug DC Graphite Poly 150mm | |
| 0200-36711 | Si Cristal Silicon | Silicon Insert Ring 125mm MXP+ | |
| 0020-31918 | Silicon Carbide | Plug DC ESC Recessed | |
| 0200-36696 | Quartz | Shadow Ring Quartz 200mm Notch W/4 Pins | |
| 0200-09636 | Silicon Carbide | Etch Metal | Plug SiC w/Head |
| 0200-35222 | Quartz | Quartz Window 13.68″ | |
| 0200-09898 | ESC | Plug Bias EXT Pedestal Graphite | |
| 0200-09158 | CVD | Window Heater CVD Chamber | |
| 0200-09429 | Quartz/Sapphire | BWCVD | Window Coated AL203 BWCVD 8 to 12 microns |
| 0200-09072 | Ceramic | Shield 200mm Ceramic | |
| 0200-09005 | Quartz | Quartz Window Narrow Gap | |
| 0200-09179 | Quartz | Quartz Pipe MxP | |
| 0200-09217 | Quartz | Ring Quartz 8″ EXT Cath Metal Notched | |
| 0200-09243 | Quartz | Cover Pedestal Quartz 8″ EXT Cath WF | |
| 0200-09603 | Quartz | Quartz Pipe Narrow Gap | |
| 0200-09605 | Quartz | Plug Bias Quartz EXT Narrow Gap | |
| 0200-09977 | Quartz | Cover Quartz Narrow Gap | |
| 0200-10073 | Quartz | eMAX | Quartz Pipe MXP+ |
| 0200-10133 | Quartz | Recessed Window Endpoint MXP+ | |
| 0200-10246 | Quartz | Etch Metal | Uni-Insert GDP 88 Hole Quartz |
| 0200-10392 | Quartz | MxP | Window RDCD HG Recessed Endpoint MXP |
| 0200-10445 | Quartz | MxP | Shadow Ring Quartz |
| 0200-00071 | Quartz | Insulating Pipe Quartz 200mm EXT | |
| 0200-09222 | Quartz | Ring External Quartz 8″ | |
| 0200-09741 | Quartz | Ring Focus Quartz 200mm POLY/WSI | |
| 0200-35801 | Quartz | MXP/MXP+ | Window Recessed Endpoint 4mm EA |
| 0200-09785 | Quartz | Cap 8″ ESC Quartz | |
| 0200-09201 | Quartz | GDP Lower Quartz, ground finish | |
| 0200-09432 | Quartz | 0200-05377 | New Style Tube Applicator |
| 0200-09444 | Quartz | ASP | Quartz Upper GDP |
| 0200-09478 | Quartz | GDP Middle 5 Hole Upper | |
| 0200-35599 | Quartz | 0200-05376 | Tube Applicator ASP |
| 0200-20426 | Quartz | PC II 8″ Quartz Insulator | |
| 0200-09062 | Quartz | Cover Ring Sputter 6″ | |
| 0200-09558 | Quartz | Etch | Collar Quartz 150mm Poly EXT Cath |
| 0200-09606 | Quartz | Quartz Cover Ring 200mm | |
| 0200-35084 | Quartz/Opaque | Upper Dome | |
| 0020-24100 | Quartz | Insulator Quartz 8″ Preclean | |
| 0200-09610 | Quartz | MXP+POLY | Outer Ring Quartz 150mm EXT |
| 0200-09035 | Ceramic | Pin Wafer Lift 6″ Ceramic | |
| 0200-09557 | Quartz | Ring Focus Qtz 150mm Poly Ext Cath | |
| 0200-35623 | Silicon | MXP/MXP+ | Insert Ring Silicon 150mm Flat (1S) |
| 0200-76068 | Quartz | MXP/MXP+ | Shadow Ring Quartz 150mm DIA 5.694 |
| 0020-20729 | Quartz | Viewport, Side Quartz | |
| 0200-20064 | Quartz | Insulator Qtz 8″ II Position ABC&D | |
| 0200-00410 | Quartz | MXP/MXP+ | Uni-Insert Gas Distribution Plate |
| 0021-09097 | Vespel | MxP | Plate Liner Alignment |
| 0040-21178 | Quartz | Preclean II Bell Jar | |
| 0020-48171 | Quartz | MXP/MXP+ | Insulating Pipe Quartz |
| 0200-00059 | Quartz | Cover Quartz 6″ DF | |
| 0020-24456 | Quartz | Insulator Quartz 6″ JMF PCII EXT | |
| 0200-09083 | Quartz | Shield 150mm Sputter Etch | |
| 0200-09242 | POCO Graphite | Plug DC Graphite CR Version Poly | |
| 0200-09087 | Quartz | Quartz Ring 150mm Sputter Etch | |
| 0200-09002 | Quartz | Window Slit CVD Chamber | |
| 0200-09024 | Quartz | Window Small | |
| 0200-09025 | Quartz | Tube Quartz 6mm x 6.38mm | |
| 0200-09450 | Quartz | Tube Gas Feed OD 6.35mm BWCVD | |
| 26-81396-00 | Quartz | Quartz View Port Dynasil | |
| 0020-03656 | Vespel | Vespel Screw | |
| 0020-31659 | Vespel | MXP/MXP+ | Vespel Cover |
| 0020-09963 | Vespel | Vespel Screw | |
| 0020-03697 | Vespel | Vespel Finger Screw | |
| 0020-22906 | Quartz | Preclean Pin | |
| 0200-01509 | Silicon | Silicon Insert Ring | |
| 0200-00177 | Silicon | Silicon Insert Ring | |
| 0020-20499 | Quartz | Window Quartz Protective | |
| 0020-26254 | Ceramic | Insulator Ceramic | |
| 0200-09772 | Quartz | Filter Slit Window Quartz | |
| 0200-35290 | Alumina/Ceramic | DPS Metal | Housing Gas Feed, DPS MEC |
| 0200-35291 | Alumina/Ceramic | DPS Metal | Plug Inner Gas Feed Assy DPS |
| 0200-35293 | Quartz | DPS Metal | Window Manometer Port DPS MEC |
| 0020-32049 | Vespel | Cap Vespel ESC 8″ | |
| 0020-32048 | Vespel | Lift post Vespel | |
| 0200-35149 | Quartz | Tube Lamp Spacer | |
| 0200-09742 | Quartz | Focus Ring Poly/WIS 150mm | |
| 0020-31656 | Vespel | Clamp Ring Vespel | |
| 0200-76004 | Quartz | Quartz Window | |
| 0020-31740 | Vespel | Vespel Screw | |
| 0200-09346 | Quartz | Cover Wraparound Qtz Oxide | |
| 0200-09347 | Silicon | Collar Si OX/MLR/NIT 150mm Flat | |
| 0200-09349 | Quartz | Clamp Qtz OX/MLR/NIT 150mm Flat | |
| 0200-18093 | Ceramic | Nozzle Side HDP DCVD | |
| 0200-00285 | Ceramic | Ceramic Ring | |
| 0200-09084 | Quartz | Quartz Ring | |
| 0200-35292 | Quartz | Window Baratron, DPS | |
| 0200-35294 | Quartz | DPS Quartz View Port Lower Chamber | |
| 0200-09441 | Quartz | ASP | Window Slit ASP |
| 0020-03636 | Vespel | Vespel Screw | |
| 0200-40156 | Ceramic | Ceramic Lift Pin HDP/CVD | |
| 0200-35222 | Quartz | Window Lamp Housing ATM | |
| 0200-09445 | Quartz | ASP | Liner Qtz Upper Gas Dist ASP |
| 0200-09446 | Quartz | ASP | Liner Qtz Lower Gas Dist ASP |
| 0200-09447 | Quartz | ASP | Plate Qtz Gas Dist Upper ASP |
| 0200-09448 | Quartz | ASP | Plate Qtz Gas Dist Lower ASP |
| 0020-31654 | Quartz | Clamp Ring Quartz | |
| 0010-38027 | Throttle Valve | 100, 125, 150mm W/Viton BWCVD Throttle Valve | |
| 0020-09975 | 100mm Lip Seal | ||
| 0200-35042 | Quartz | Lower Dome | |
| 0020-30678 | Vespel | Vespel Clamp Ring | |
| 0150-70017 | Cable | Cable Large | |
| 0150-70018 | Cable | Cable Small | |
| 0200-00152 | Quartz | Insulator 6″ | |
| 0040-31998 | Bellows | CVD | Upper Lift Bellows |
| 0040-35909 | Bellows | CVD | Weldment Bellows Assy Lower DXZ |
| 0020-23298 | Quartz | Quartz Insulator | |
| 0200-09758 | Quartz | Collar 150mm Pedestal, AL Finger | |
| 0200-00221 | Quartz | Insulator Pinless 8″ Preclean II | |
| 1341054 | Cable Assy | ||
| 0140-00334 | Cable Assy | ||
| 0140-00728 | Cable Assy | ||
| 0140-05891 | Cable Assy | ||
| 0140-06383 | Cable Assy | ||
| 0140-07702 | Cable Assy | ||
| 0140-08078 | Cable Assy | ||
| 0140-09996 | Cable Assy | ||
| 0140-10034 | Cable Assy | ||
| 0140-10035 | Cable Assy | ||
| 0140-10941 | Cable Assy | ||
| 0140-12525 | Cable Assy | ||
| 0140-12526 | Cable Assy | ||
| 0140-16103 | Cable Assy | ||
| 0140-16104 | Cable Assy | ||
| 0140-16105 | Cable Assy | ||
| 0140-16106 | Cable Assy | ||
| 0140-16110 | Cable Assy | ||
| 0140-16118 | Cable Assy | ||
| 0140-18082 | Cable Assy | ||
| 0140-18129 | Cable Assy | ||
| 0140-18135 | Cable Assy | ||
| 0140-18136 | Cable Assy | ||
| 0140-18137 | Cable Assy | ||
| 0140-18140 | Cable Assy | ||
| 0140-18144 | Cable Assy | ||
| 0140-20014 | Cable Assy | ||
| 0140-20118 | Cable Assy | ||
| 0140-20139 | Cable Assy | ||
| 0140-20244 | Cable Assy | ||
| 0140-20257 | Cable Assy | ||
| 0140-20283 | Cable Assy | ||
| 0140-20425 | Cable Assy | ||
| 0140-20494 | Cable Assy | ||
| 0140-20501 | Cable Assy | ||
| 0140-20502 | Phase Driver | ||
| 0140-20508 | Cable Assy | ||
| 0140-20537 | Cable Assy | ||
| 0140-20781 | Cable Assy | ||
| 0140-20825 | Cable Assy | ||
| 0140-20944 | Cable Assy | ||
| 0140-21104 | Cable Assy | ||
| 0140-21106 | Cable Assy | ||
| 0140-21109 | Cable Assy | ||
| 0140-21406 | Harness Assy High EFF Match W/INTLK | ||
| 0140-21407 | Cable Assy | ||
| 0140-21408 | Cable-B101 Chamber Harness Assy | ||
| 0140-21826 | Harness Assembly | ||
| 0140-35385 | Cable Assy | ||
| 0140-35733 | Cable Assy | ||
| 0140-35959 | Cable Assy | ||
| 0140-37846 | Cable Assy | ||
| 0140-70352 | Cable Assy | ||
| 0140-70353 | Cable Assy | ||
| 0140-70412 | Cable Assy | ||
| 0140-75229 | Cable Assy | ||
| 0140-76223 | Cable Assy | ||
| 0140-76224 | Cable Assy | ||
| 0140-76327 | Cable Assy | ||
| 0140-76362 | Degas E Cable W/TC | ||
| 0140-76979 | Cable Assy | ||
| 0150-00001 | Cable Assy | ||
| 0150-00523 | Cable Assy | ||
| 0150-00604 | Cable Assy | ||
| 0150-00987 | Cable Assy 75Ft. | ||
| 0150-03376 | Cable Assy | ||
| 0150-09027 | Cable Assy | ||
| 0150-09267 | Cable Assy | ||
| 0150-09708 | Cable Assy | ||
| 0150-09758 | Cable Assy | ||
| 0150-09996 | Cable Assy | ||
| 0150-10073 | Cable Assy | ||
| 0150-10074 | Cable Assy | ||
| 0150-10077 | Cable Assy | ||
| 0150-10234 | Cable Assy | ||
| 0150-10328 | Cable Assy | ||
| 0150-10491 | Cable Assy | ||
| 0150-10492 | Cable Assy | ||
| 0150-10493 | Cable Assy | ||
| 0150-10495 | Cable Assy | ||
| 0150-10496 | Cable Assy | ||
| 0150-10497 | Cable Assy | ||
| 0150-10500 | Cable Assy | ||
| 0150-10501 | Cable Assy | ||
| 0150-10504 | Cable Assy | ||
| 0150-10505 | Cable Assy | ||
| 0150-10613 | Cable Assy, 50ft. | ||
| 0150-10754 | Cable Assy | ||
| 0150-13079 | Cable Assy | ||
| 0150-13084 | Cable Assy | ||
| 0150-13086 | Cable Assy | ||
| 0150-13091 | Cable Assy | ||
| 0150-16101 | Cable Assy | ||
| 0150-16166 | Cable Assy | ||
| 0150-16167 | Cable Assy | ||
| 0150-18030 | Cable Assy | ||
| 0150-18035 | Cable Assy | ||
| 0150-18051 | Cable Assy | ||
| 0150-18053 | Cable Assy | ||
| 0150-18117 | Cable Assy | ||
| 0150-20002 | Cable Assy | ||
| 0150-20003 | Cable Assy | ||
| 0150-20024 | Cable Assy | ||
| 0150-20025 | Cable Assy | ||
| 0150-20026 | Cable Assy | ||
| 0150-20028 | Cable Assy | ||
| 0150-20029 | Cable Assy | ||
| 0150-20030 | Cable Assy | ||
| 0150-20031 | Cable Assy | ||
| 0150-20032 | Cable Assy | ||
| 0150-20061 | Cable Assy | ||
| 0150-20070 | Cable Assy | ||
| 0150-20074 | Cable Assy | ||
| 0150-20075 | Cable Assy | ||
| 0150-20076 | Cable Assy | ||
| 0150-20077 | Cable Assy | ||
| 0150-20080 | Cable Assy | ||
| 0150-20119 | Cable Assy 4 1/2 ft. | ||
| 0150-20160 | Cable Assy | ||
| 0150-20166 | Cable Assy | ||
| 0150-20178 | Cable Assy | ||
| 0150-20181 | Cable Assy | ||
| 0150-20192 | Cable Assy | ||
| 0150-20252 | Cable Assy | ||
| 0150-20470 | Cable Assy, 50ft. | ||
| 0150-20489 | Cable Assy | ||
| 0150-20497 | Cable Assy | ||
| 0150-20537 | Cable Assy | ||
| 0150-20556 | Cable Assy | ||
| 0150-20560 | Cable Assy | ||
| 0150-20574 | Cable Assy | ||
| 0150-20575 | Cable Assy | ||
| 0150-20580 | Cable Assy, 2-Phase Driver 50ft. | ||
| 0150-20583 | Cable Assy | ||
| 0150-20584 | Cable Assy | ||
| 0150-20585 | Cable Assy | ||
| 0150-20599 | Cable Assy | ||
| 0150-20600 | Cable Assy | ||
| 0150-20601 | Cable Assy Lid Lift MTR Control | ||
| 0150-20602 | Cable Assy | ||
| 0150-20628 | Cable Assy | ||
| 0150-20639 | Cable Assy | ||
| 0150-20640 | Cable Assy | ||
| 0150-20708 | Cable Assy | ||
| 0150-20825 | Cable Assy | ||
| 0150-20944 | Cable Assy | ||
| 0150-20960 | Cable Assy | ||
| 0150-20994 | Cable Assy | ||
| 0150-21011 | Remote System CRT 50′ | ||
| 0150-21093 | Remote/System CTR 50ft | ||
| 0150-21126 | Pneumatic Interconnect (J30) 50′ | ||
| 0150-21127 | Cable Assy | ||
| 0150-21139 | Cable Assy | ||
| 0150-21148 | Cable | EMO: Sys Ctir to Mainframe 35′ | |
| 0150-21171 | Cable Assy | ||
| 0150-21220 | Transfer Robot Interconnect (P3 of 5-Phase) 50′ | ||
| 0150-21221 | 24V Power Interconnect (P1 of 42V PS) 50′ | ||
| 0150-21222 | 15V Power Interconnect (P3 of 15V PS) 50′ | ||
| 0150-21223 | Buffer Robot Interconnect (P2 of 5 Phase) 50″ | ||
| 0150-21224 | Cassette Indexer Interconect 50 ft. | ||
| 0150-21225 | Cable | Operator Panel Interconect (P11) 50′ | |
| 0150-21227 | Cryo Temp Interconnect (P9) 50′ | ||
| 0150-21228 | Chamber D Interconect 50′ | ||
| 0150-21229 | Chamber C Interconect 50′ | ||
| 0150-21230 | Mainframe Interconect 50′ | ||
| 0150-21231 | Chamber 4 Interconect 50′ | ||
| 0150-21232 | Chamber 3 Interconect (P4) 50′ | ||
| 0150-21234 | Chamber 1 Interconect (P2) 50′ | ||
| 0150-21235 | Chamber A/B Interconect 50′ | ||
| 0150-21236 | Gas Interconect 50′ | ||
| 0150-21238 | Encoder Interconnect (P10) 50′ | ||
| 0150-21242 | Cable Assy | ||
| 0150-21243 | Cable Assy | ||
| 0150-21246 | Cable Assy, 65 ft. | ||
| 0150-21320 | Cable Assy | ||
| 0150-21333 | Chamber 2 Interconnect (P3) 50′ | ||
| 0150-21337 | Cable Assy | ||
| 0150-21338 | Cable Assy | ||
| 0150-21339 | Cable Assy | ||
| 0150-21340 | Cable Assy | ||
| 0150-21341 | Cable Assy | ||
| 0150-21342 | Cable Assy | ||
| 0150-21343 | Cable Assy | ||
| 0150-21344 | Cable Assy | ||
| 0150-21346 | Cable Assy 50 Ft. | ||
| 0150-21347 | Cable Assy | ||
| 0150-21348 | Cable Assy 50′ | ||
| 0150-21354 | Cable Assy | ||
| 0150-21357 | Cable Assy | ||
| 0150-21358 | Cable Assy | ||
| 0150-21359 | Cable Assy | ||
| 0150-21360 | Cable Assy | ||
| 0150-21361 | Cable Assy | ||
| 0150-21372 | Cable Assy | ||
| 0150-21421 | Cable Assy | ||
| 0150-21422 | Pump Frame Interconect 50′ | ||
| 0150-21431 | Cable Assy | ||
| 0150-21437 | Cable Assy | ||
| 0150-21446 | Cable Assy | ||
| 0150-21447 | Cable Assy | ||
| 0150-21556 | Cable Assy | ||
| 0150-21664 | Cable Assy, 75ft | ||
| 0150-21665 | Cable Assy, 50ft | ||
| 0150-21706 | Cable Assy 37ft | ||
| 0150-21772 | Cable Assy 15.5″ | ||
| 0150-21778 | Cable Assy | ||
| 0150-21936 | Cable Assy | ||
| 0150-22021 | Cable Assy | ||
| 0150-22288 | Cable Assy | ||
| 0150-22289 | Cable Assy | ||
| 0150-22552 | Cable Assy | ||
| 0150-22844 | Cable Assy | ||
| 0150-35002 | Cable Assy | ||
| 0150-35314 | Cable Assy | ||
| 0150-35346 | Cable Assy | ||
| 0150-35431 | Cable Assy | ||
| 0150-35432 | Cable Assy | ||
| 0150-35447 | Cable Assy | ||
| 0150-35487 | Cable Assy | ||
| 0150-35615 | Cable Assy | ||
| 0150-35740 | Cable Assy | ||
| 0150-35855 | Cable Assy 5Ft. | ||
| 0150-35880 | Cable Assy | ||
| 0150-35980 | Cable Assy | ||
| 0150-36035 | Cable Assy | ||
| 0150-36036 | Cable Assy | ||
| 0150-36037 | Cable Assy | ||
| 0150-36056 | Cable Assy | ||
| 0150-36190 | Cable Assy | ||
| 0150-36292 | Cable Assy, 50ft. | ||
| 0150-36489 | Cable Assy | ||
| 0150-36701 | Cable Assy | ||
| 0150-36818 | Cable Assy | ||
| 0150-36949 | Cable Assy | ||
| 0150-36950 | Cable Assy | ||
| 0150-37250 | Cable Assy | ||
| 0150-39002 | Cable Power I/O Distribution 40 FT. | ||
| 0150-39003 | Cable DI/O 37 Pin F/M 40 FT. | ||
| 0150-39004 | Cable AI/O 50 Pin F/M 40 FT. | ||
| 0150-70017 | Cable Assy | ||
| 0150-70018 | Cable Assy | ||
| 0150-75125 | Cable Assy | ||
| 0150-75194 | Cable Assy | ||
| 0150-75204 | Cable Assy | ||
| 0150-75212 | Cable Assy 3 1/2′ | ||
| 0150-75213 | Cable Assy | ||
| 0150-75214 | Cable Assy | ||
| 0150-76014 | Cable Assy | ||
| 0150-76045 | Cable Assy | ||
| 0150-76156 | Cable Assy | ||
| 0150-76165 | Cable Assy | ||
| 0150-76172 | Cable Assy | ||
| 0150-76173 | Cable Assy 75′ | ||
| 0150-76174 | RF Generator ZIF 75′ | ||
| 0150-76175 | Cable Assy | ||
| 0150-76176 | Cable Assy | ||
| 0150-76179 | Cable Assy | ||
| 0150-76180 | Cable Assy | ||
| 0150-76181 | Cable Assy | ||
| 0150-76182 | Cable Assy | ||
| 0150-76183 | Cable Assy | ||
| 0150-76184 | Cable Assy | ||
| 0150-76185 | Cable Assy | ||
| 0150-76186 | Cable Assy | ||
| 0150-76198 | EMC COMP., Assy Cable System Vidio 25ft | ||
| 0150-76199 | Cable Assy | ||
| 0150-76205 | Cable Assy | ||
| 0150-76206 | Cable Assy | ||
| 0150-76207 | Cable Assy | ||
| 0150-76208 | Cable Assy | ||
| 0150-76209 | Cable Assy | ||
| 0150-76210 | Cable Assy | ||
| 0150-76212 | Cable Assy | ||
| 0150-76217 | Cable Assy | ||
| 0150-76238 | Cable Assy | ||
| 0150-76288 | Cable Assy | ||
| 0150-76315 | Cable | 13.56 MHz RF Cable 50′ | |
| 0150-76419 | Cable Assy | ||
| 0150-76419 | Cable Assy | ||
| 0150-76500 | Cable Assy | ||
| 0150-76513 | Cable Assy | ||
| 0150-76682 | Cable Assy | ||
| 0150-76819 | Cable Assy | ||
| 0150-76962 | Cable Assy | ||
| 0150-76963 | Cable Assy | ||
| 0150-76992 | Cable Assy | ||
| 0150-76994 | Cable Assy | ||
| 0150-76995 | Cable Assy | ||
| 0190-05928 | Cable Assy | ||
| 0190-09267 | Cable Assy | ||
| 0190-70059 | Cable Assy | ||
| 0620-01043 | Cable Assy | ||
| 0620-01079 | Cable Assy | ||
| 0620-01218 | Cable Assy | ||
| 0620-02688 | Cable Assy | ||
| 146-23000-01 | Cable Assy | ||
| 146-23000-02 | Cable Assy | ||
| 146-23000-03 | Cable Assy | ||
| 146-23000-04 | Cable Assy | ||
| 147-20000-01 | Cable Assy | ||
| 147-20000-02 | Cable Assy | ||
| 148-21000-00 | Cable Assy | ||
| 148-21000-01 | Cable Assy | ||
| 148-21000-02 | Cable Assy | ||
| 148-21000-03 | Cable Assy | ||
| 150-21000-01 | Cable Assy | ||
| 150-21000-02 | Cable Assy | ||
| 150-21000-03 | Cable Assy | ||
| 150-21000-04 | Cable Assy | ||
| 181-21000-01 | Cable Assy | ||
| 182-20 | Cable Assy | ||
| 182-23000-01 | Cable Assy | ||
| 182-23000-01 | Cable Assy | ||
| 182-23000-02 | Cable Assy | ||
| 182-27000-01 | Cable Assy | ||
| 182-27000-02 | Cable Assy | ||
| 182-27001-00 | Cable Assy | ||
| 182-28000-01 | Cable Assy | ||
| 182-28000-02 | Cable Assy | ||
| 182-28000-03 | Cable Assy | ||
| 182-30000-01 | Cable Assy | ||
| 182-30000-02 | Cable Assy | ||
| 182-30000-03 | Cable Assy | ||
| 182-31000-00 | Cable Assy | ||
| 182-32000-00 | Cable Assy | ||
| 182-33000-00 | Cable Assy | ||
| 182-36000 | Cable Assy | ||
| 182-36000-01 | Cable Assy | ||
| 182-36000-02 | Cable Assy | ||
| 182-36000-03 | Cable Assy | ||
| 182-36000-04 | Cable Assy | ||
| 182-39000-01 | Cable Assy | ||
| 182-39000-01 | Cable Assy | ||
| 182-39000-02 | Cable Assy | ||
| 182-39000-02 | Cable Assy | ||
| 182-41000-01 | Cable Assy | ||
| 182-41000-02 | Cable Assy | ||
| 182-41000-03 | Cable Assy | ||
| 182-41000-04 | Cable Assy | ||
| 182-41000-05 | Cable Assy | ||
| 182-42000-01 | Cable Assy | ||
| 182-42000-05 | Cable Assy | ||
| 182-43000-00 | Cable Assy | ||
| 182-46 | Cable Assy | ||
| 182-47000-00 | Cable Assy | ||
| 182-48000-00 | Cable Assy | ||
| 182-49000-00 | Cable Assy | ||
| 182-50000-00 | Cable Assy | ||
| 182-51000-00 | Cable Assy | ||
| 182-52000-00 | Cable Assy | ||
| 182-53000-00 | Cable Assy | ||
| 182-54000-01 | Cable Assy | ||
| 182-58000-00 | Cable Assy | ||
| 182-59000-00 | Cable Assy | ||
| 182-63 | Cable Assy | ||
| 182-64000-00 | Cable Assy | ||
| 182-65000-01 | Cable Assy | ||
| 182-65000-02 | Cable Assy | ||
| 182-74000-00 | Cable Assy | ||
| 182-74000-01 | Cable Assy | ||
| 182-74000-02 | Cable Assy | ||
| 182-74000-03 | Cable Assy | ||
| 182-75000-00 | Cable Assy | ||
| 182-76 | Cable Assy | ||
| 182-77 | Cable Assy | ||
| 182-85 | Cable Assy | ||
| 182-87000-01 | Cable Assy | ||
| 182-87000-03 | Cable Assy | ||
| 182-87000-04 | Cable Assy | ||
| 182-87000-05 | Cable Assy | ||
| 182-88000-00 | Cable Assy | ||
| 263-00518-00 | Cable Assy | ||
| 263-00519-00 | Cable Assy | ||
| 263-00520-00 | Cable Assy | ||
| 263-00521-00 | Cable Assy | ||
| 263-00528-00 | Cable Assy | ||
| 263-00529-00 | Cable Assy | ||
| 263-00610-00 | Cable Assy | ||
| 263-00624-03 | Cable Assy | ||
| 263-00624-04 | Cable Assy | ||
| 263-01552-05 | Cable Assy | ||
| 263-01553-00 | Cable Assy | ||
| 263-01656-01 | Cable Assy | ||
| 263-02138-03 | Cable Assy | ||
| 263-03039-00 | Cable Assy | ||
| 263-03217 | Cable Assy | ||
| 263-03218-01 | Cable Assy | ||
| 263-03218-02 | Cable Assy | ||
| 263-03219 | Cable Assy | ||
| 263-06346-01 | Cable Assy | ||
| 263-08211-05 | Cable Assy | ||
| 263-14608-00 | Cable Assy | ||
| 263-21000-03 | Cable Assy | ||
| 282-73 | Cable Assy | ||
| 513-04853-OC | Cable Assy | ||
| 516-038-000-301 | Cable Assy | ||
| 7777-00001 | Cable Assy | ||
| 853-004055 | Cable Assy | ||
| 853-370797 | Cable Assy | ||
| 853-491132 | Cable Assy | ||
| 853-495486 | Cable Assy | ||
| 853-495580 | Cable Assy | ||
| 853-495596 | Cable Assy | ||
| 982-20 | Cable Assy | ||
| 982-21 | Cable Assy | ||
| 982-24 | Cable Assy | ||
| 982-24 | Cable Assy | ||
| ACX-03201-13 | Cable Assy | ||
| 0200-20054 | Quartz | Insulator Qtz 6″ SMF ATA Preclean | |
| 0200-35327 | Ceramic | Focus Ring, 195mm Notch SMPL Cath. | |
| 0200-00218 | Quartz | Cover Top Quartz 8″ PC II | |
| 0200-02200 | Lift Pin Dry Clean DPS | ||
| 0200-35264 | Quartz | Pipe Insulating Quartz Simple Cathode | |
| 0200-09892 | Quartz | Focus Ring 8″ 220mm ID Notch Lift 2 | |
| 0200-09638 | Quartz | Cylinder Quartz 200mm ExT Cath Ceramic | |
| 0200-00006 | Quartz | Insulator Ground Plate | |
| 0020-26254 | Ceramic | InsulatorTi/TIN Durasource-TTN | |
| 0200-00602 | Quartz | Quartz Ring DPS Poly | |
| 0150-20038 | Cable | Cable Assy Remote Al/O | |
| 0150-20187 | Cable | Cable Assy RBN Remote 50 Ft. | |
| 0200-10392 | Quartz | End Point Window Poly | |
| 0200-09086 | Quartz | Ring Quartz 200mm Sputter Etch | |
| 0020-25917 | Quartz | Isolator DC Bias Shuttercomp | |
| 0200-35224 | Quartz | Window Viewport for RTP | |
| 0010-20225 | Magnet | Magnet | |
| 0010-20768 | Magnet | Magnet | |
| 0200-35801 | Quartz | MxP | Window Recessed Endpoint 4mm EA |
| 0200-10324 | Ceramic | DPS Metal | Dome Ceramic DPS Chamber |
| 0200-36697 | Silicon | Top Ring Silicon 200mm Notch CH (2) Oxide | |
| 0200-00137 | Ceramic | Focus Ring 195mm Semi Notch DPS | |
| 0200-35323 | Ceramic | DPS Metal | Ring Capture ESC 195mm Notch |
| 0200-35294 | Quartz | Quartz Lower Chamber VPRT DPS | |
| 0200-02302 | Quartz | Shadow Ring Quartz (T) | |
| 0020-27123 | Quartz | Pedestal PCII 8″ SNNF | |
| 0200-04294 | Quartz | HDP Top Nozzle DCVD | |
| 0200-04146 | Quartz | Liner Top Y203 Bulk Etch | |
| 0200-03736 | Silicon | Silicon Collar 5mm W/Small OD ESC Etch | |
| 0200-03574 | Quartz | Ring Quartz Stepped Producer Etch | |
| 0200-02626 | Quartz | Top Ring Quartz 63RA 300mm EMAX Etch | |
| 0200-03576 | Top Collar 300mm 5.4mm Producer Etch | ||
| 0200-09759 | Ceramic | Etcher | Shield 150mm Pedestal Finger |
| 0200-09422 | Quartz | Ring Focus Quartz Alum 200mm | |
| 0200-00250 | Ceramic | Capture Ring Ceramic | |
| 0020-24236 | Copper | Clip Spring PC II Antenna Dowell (order 250 min.) | |
| 0200-00218 | Quartz | Cover Top Quartz 8″ PC II | |
| 3750-01144 | Sapphire/Copper | Sapphire Tube Replacement Kit | |
| 0200-00296 | Ceramic | Sleeve JCT DXZ-DCVD | |
| 0200-09757 | Ceramic | Etcher | Ring Clamp Flat AL 150mm .95HT Fingers |
| 0200-09735 | Ceramic | Etcher | Cover Clamping Ring 150mm Ceramic |
| 0150-03614 | Cable | Cable | |
| 0150-03615 | Cable | Cable | |
| 0150-03617 | Cable | Cable | |
| 0150-03625 | Cable | Cable | |
| 0150-03627 | Cable | Cable | |
| 0150-03628 | Cable | Cable | |
| 0150-03629 | Cable | Cable | |
| 0150-03631 | Cable | Cable | |
| 0150-03632 | Cable | Cable | |
| 0020-32047 | Annodized Alluminum | Post Lower 2-Piece, Annodized Aluminum | |
| 0200-09199 | Quartz | Tube Plasma Quartz | |
| 0020-04058 | Quartz | Ring Pedestal Si 200mm Oxidde | |
| 0021-10091 | Quartz | Cover Bolt Thin PED ESC | |
| 0200-00055 | Quartz | Ring Quartz Cover 200mm Oxide | |
| 0200-00068 | Quartz | Clamp Ring 200mm Oxide .187 Thk | |
| 0200-09865 | Si Carbide | Plug Bias Silicon Carbide ESC | |
| 0200-35013 | Quartz | Pin Cooldown Lifter Extended | |
| 0200-35145 | Quartz | Adapter Window 2mm RP Chamber RTP | |
| 0020-03426 | Vespel | Plug Vespel | |
| 0140-09173 | Harness | Harness Assy Extention | |
| 0140-09498 | Harness | Harness Assy RF Cover | |
| 0150-20238 | Cable | Cable Assy | |
| 0150-20509 | Cable | Cable Assy | |
| 0140-20693 | Cable | Cable Assy | |
| 0140-21413 | Cable | Cable Assy | |
| 0200-39346 | Quartz | MXP/MXP+ | Shadow Ring 200mm Notch |
| 0200-10087 | Ceramic | Ring Outer 1.50″ SSGD R2 Chamber Ceramic | |
| 0200-00289 | Quartz | Cylinder Wafer Support 200mm RTO | |
| 0200-00672 | Lift Pin Tip 2mm Radiance | ||
| 0200-35265 | Quartz | Window Lamp HSG 4mm RP Chamber RTP | |
| 0200-36638 | Quartz | Blade Quartz Reduced Contact 200mm RTP | |
| 0020-22975 | Ceramic | Ceramic Insulator Source Ring, 8″ | |
| 0020-30198 | MxP | Tube External Tapered EXT Cathode | |
| 0020-31493 | Aluminum | MxP | Gas Distribution Plate 133 Holes |
| 0200-09071 | Lift Pin 200mm | ||
| 0200-09916 | Quartz | Bias Plug Quartz | |
| 0200-09967 | Quartz | GDP Insert 101 Holes Quartz | |
| 0200-10074 | Lift Pin Delta MF Nitride XP 200mm | ||
| 0040-09004 | MxP | Bellows Weldment | |
| 0200-35362 | Silicon | Insert Silicon CH Reflector RTP Chamber | |
| 0200-35525 | Ceramic | Resistor Ceramic Near-Net Shape | |
| 0200-35779 | Quartz | Quartz Lift Cool Down | |
| 0040-01981 | Bellows .750 Dia Radiance Chamber RT | ||
| 0040-20194 | Bellows 101% TiN Coverage | ||
| 0200-09743 | Quartz | Ring Focus Quartz Poly/WIS 150mm (1S) | |
| 0020-24236 | Copper | Clip Antenna | |
| TBD | Quartz | Quartz Window 3.25 OD x .25Thk | |
| 3350-01008 | Quartz | Disk Quartz, Polished OD: 1.25”, thickness: 0.25” | |
| TBD | Quartz | Quartz Window 1.29 OD x .25 Thk | |
| 0200-01000 | Quartz | 6″ Quartz Plate | |
| 0200-35003 | Quartz | Robot Blade Quartz | |
| 0200-39347 | Quartz | Shadow Ring | |
| 0020-03413 | Polysulfone | Etch | Insert 150mm Oxide |
| 0020-31737 | Quartz | Insulating Flange Taper | |
| 0020-18899 | Nozzle Washers | ||
| 0020-32046 | Base Extension ESC | ||
| 0200-09830 | Ceramic | Ring Pedestal 150mm MxP ESC. | |
| 0200-10265 | Ceramic | Ring Focus ESC 150/151 SMF W.WEB | |
| 0200-09384 | Ceramic | Pin Wafer Lift 150mm | |
| 0200-09893 | Quartz | Focus Ring 6″ Flatted Lift 162mm ID | |
| 0200-09665 | Quartz | Collar Si OX/MLR/NIT | |
| 0200-00012 | Quartz | Ring Quartz 5″ | |
| 0200-09037 | Ceramic | Ceramic Lift Finger | |
| 0200-03447 | Ceramic | Capture Ring Ceramic | |
| 0200-00176 | Quartz | Shadow Ring Quartz 200mm Flat Super E | |
| 0200-76004 | Quartz | Window Quartz OTF | |
| 0200-00637 | Quartz | Shadow Ring Quartz 200mm EMAX | |
| 0200-00638 | Quartz | Cover Ring Quartz 200mm EMAX | |
| 0200-00400 | Quartz | Window Quick Release Endpoint | |
| 0200-00089 | Quartz | Cap Top (aprox .60 Thk 9″ OD Ground Finish) | |
| 0200-33899-003 | Quartz | Quartz Single Ring Deep Etch 300mm | |
| 0200-04660 | Ceramic | Inner Ring Ceramic, 200mm SNNF | |
| 0020-22910 | Bellows | Basic Bellows | |
| 0200-04863 | |||
| 0200-09319 | Outer Ring | ||
| 0200-35020 | Inject Baffle | ||
| 0200-09933 | Lift Pin | ||
| 0200-03486 | Quartz | Lower Liner Locking Pin | |
| 0200-40126 | Quartz | Blade 6 & 8″ Thin Robot w/o Pockets | |
| 3700-01578 | Kalrez | ASP | Applicator Top O-ring (Kalrez) |
| 3700-01619 | Kalrez | ASP | Applicator Base O-ring (Kalrez |
| 3700-02033 | Kalrez | ASP | Lid O-ring (Kalrez) |
| 3700-02180 | ASP | Slit Valve Door O-ring | |
| 0200-35688 | Quartz | Centura ATM Venter Lower Quartz Liner Chamber | |
| 0200-09570 | Quartz | Cover Ring | |
| 0200-00945 | Ceramic | Ceramic Ring | |
| 0020-20439 | Quartz | Viewport Window | |
| 3700-01261 | O-Ring | O-Ring ID 5.921 CSD .102 Nitrile N545-40 | |
| 0200-09270 | Quartz | Angle TC SPT Quartz | |
| 0200-35004 | Quartz | Blade Robot 8″ Quartz | |
| 0020-32987 | Vespel | Vespel Clamp Ring | |
| 0200-35018 | Quartz | Insert Quartz Exaust | |
| 0200-09572 | Quartz | Collar Si OX/MLR/NIT 200mm Notch | |
| 0020-01416 | TI Grade II | Endura | TI Clamp Ring |
| 0020-21589 | AL 6061 | Endura | AL Clamp Ring |
| 0020-28346 | TI Grade II | Endura | TI Clamp Ring |
| 0020-27207 | TI Grade II | Endura | Titanium Clamp Ring 150mm |
| 0021-21590 | TI Grade II | Endura | TI Clamp Ring |
| 0020-27139 | TI Grade II | Endura | TI Clamp Ring |
| 0021-01421 | DPS | Upper Chamber Referb | |
| 0040-49965 | CMP | 12″ Retainer Ring | |
| 0021-03568 | CVD | Face Plate | |
| 0040-78186 | Quadrant PPS | CMP | AEPIII Retainer Ring |
| 0200-20057 | Quartz | Insulator Quartz | |
| 0200-20285 | Ceramic | Cover Pedestal 8″ B101 Vectra-IMP Ceramic | |
| 0200-09474 | Quartz | Trench Etch | Collar Pedestal Quartz 6″ Trench Etch |
| 0020-10059 | Quartz | Ring Wafer Lift RP | |
| 0200-20060 | Quartz | Insulator, Quartz 6″ SMF PCII EXT Pass | |
| 0040-18078 | Bellows | HDP-CVD | Bellows Weldment HDP-CVD |
| 0040-20068 | Bellows | PVD | Bellows Lifter PVD |
| 0040-20418 | Bellows | Bellows Slit Valve Assy | |
| 0150-75152 | Cable | Orienter F Umbilical-50 FT | |
| 0200-20221 | Quartz | Insulator Pinless PCII | |
| 0200-00406 | Quartz | Endura | Quartz Bushing |
| 0200-10163 | Ceramic | Isolator Pumping Lid for DxZ Ceramic | |
| 0140-20215 | Cable | Cable Harness | |
| 0020-34118 | Vespel | Clamp Ring Vespel | |
| 0020-26583 | Vespel | 6″ B101 Shutter Disc | |
| 0020-26289 | Vespal | 6″ B101 Lower Shield | |
| 0040-32052 | Bellows | Weldment Bellows Cathode DPSGECO | |
| 0040-32053 | Bellows | Weldment Bellows Wafer Lift | |
| 0040-39372 | Bellows | Weldment Bellows Throttle Valve DPS/Square | |
| 0040-32204 | Bellows | Weldment Bellows Throttle Valve 5 Phase DPS | |
| 0200-10027 | Ceramic | Ring Inner 1.50″ DBL Annulus SGD | |
| 0200-35388 | Quartz | Front Window Cooldown | |
| 0150-76873 | Cable | Cable | |
| 0150-76213 | Cable | Cable 40Ft. | |
| 0150-76735 | Cable | Cable | |
| 0200-09021 | Quartz | Shield, 150mm | |
| 0992-60253 | Quartz | Baffle 1/2 Hole Quartz New Type | |
| 0200-00087 | Quartz | Plate Gas Dist Quartz ASP PRSP | |
| 0200-09723 | Ceramic | Guide Pin Screw Ceramic | |
| 0200-35428 | Ceramic | Rib Insert 3.00 Cooldown | |
| 0200-09555 | Quartz | Ring Focus Qtz Poly 150mm EXT Cath. | |
| 7310-2842-03 | Quartz | Tube Isolation ERP Auto (Liner) RTP | |
| 0200-03389 | Quartz | MXP | Cover Ring Quartz 0.25 Height No Gap DPS |
| 7400-0100-06 | Quartz | RTA | Tube Isolation 8″ |
| 0200-00689 | HPTXZ | Lid Liner HPTXZ | |
| 0200-35611 | TXZ | Screw Lid Liner TXZ | |
| 0200-09147 | Finger | ||
| 0200-36685 | Ceramic | Ring Single Low Profile 200mm SNNF Ceramic | |
| 0200-35007 | Quartz | Dome Upper | |
| 0200-35042 | Quartz | Dome Lower NSG-OP1 | |
| 0200-35042 | Quartz | Dome Lower HDO material | |
| 0200-35017 | Quartz | Upper Liner | |
| 0200-35023 | Quartz | Lower Liner | |
| 0200-35019 | Quartz | Insert Quartz Injector | |
| 0200-35424 | Quartz | Wafer Lift Shaft | |
| 0200-00412 | Quartz | Shaft Non Centre Post | |
| 0200-35162 | Quartz | Upper Liner Poly | |
| 0200-35161 | Quartz | Lower Liner Poly | |
| 0200-35916 | Quartz | Insert Quartz Inject 3 Zone | |
| 0200-35159 | Quartz | Baffle Quartz Inject 3 zone | |
| 0190-01430 | Susceptor | Referbished | Nitride Susceptor T2 Weld |
| 0010-02863 | Susceptor | Referbished | Teos Susceptor |
| 0200-10549 | Insert SNNF | ||
| 0200-10295 | Base Cathode 150mm MEC DPS | ||
| 0200-09405 | |||
| 0200-09850 | |||
| 0200-09716 | Ceramic | Wafer Lift Pin Ceramic | |
| 0200-00847 | Ceramic | Ring Shadow NCSR 2.0 MM EE | |
| 0200-00624 | Ceramic | Ring Purge 200mm WXZ+NCSR | |
| 0200-00622 | Ceramic | Ring Outer 200mm WXZ+NCSR | |
| 0200-35956 | Ceramic | Dome Ceramic DPS Chamber | |
| 0200-35335 | Ceramic | Ring Capture 195mm Jeda | |
| 0040-62020 | CMP | Retainer Ring 300mm | |
| 0200-09320 | Ceramic | Ceramic Outer Ring | |
| 0200-02302 | 300mm Silicon Insert Ring | ||
| 0200-01233 | 300mm Insert Ring | ||
| 0010-13730 | 12″ A101 Heater (Referb) | ||
| 0020-P1205 | Bellows, Upper Dome Concure, 300mm ELK | ||
| 0020-P1215 | Bellows, Upper Dome Concure, 300mm ELK | ||
| 0021-07939 | CVD Producer | Faceplate,Silane NIT, 300mm producer | |
| 0040-03676 | Bellows B101 300mm IMP-TI-DTOR | ||
| 0040-05335 | Bellows Pin Lift WXZ 300MM | ||
| 0040-05336 | Bellows HTR Lift WXZ 300 MM | ||
| 0040-05797 | PVD Endura | Pin Bellows Wafer-Pin Lift TxZ 300MM | |
| 0040-05800 | Shielded Bellows, Heater Lift TXZ 300MM | ||
| 0040-06361 | Bellow Assy, ISM SWLL 300MM Endura | ||
| 0040-08232 | Bellows, Silt Valve Door, 300mm E-Max | ||
| 0040-09193 | Weldment Bellows, Silt Valve Door, DPS II, 300 | ||
| 0040-09649 | Bellow, Weldment, Lift Assy. 300mm HDP-CVD | ||
| 0040-13730 | Ay, Rev 3 Bellows/Yoke NCR Slit valve | ||
| 0040-21402 | Bellows, 300mm Wafer Lift | ||
| 0040-23891 | Bellows with Brackets ADV 300 MM | ||
| 0040-32885 | Bellows Assembly, SL SWLL 300mm Endura | ||
| 0040-39569 | Bellows, Alom Tube, Small Ear, Universal | ||
| 0040-42718 | CVD-HDP Ultima | Gas Ring, Sym 2 Port Gas Dist. 30 Holes 300 MM HDP | |
| 0040-48318 | Bellow, 300MM Preclean, Pedestal | ||
| 0040-48980 | Bellows Assy., Ceramic Sill Valve Door, HART 300mm | ||
| 0040-60460 | CVD Producer | Producer 300mm Shower Head | |
| 0040-61276 | Bellows, Wafer Lift, 300MM P2K, R3 | ||
| 0040-62688 | Weldment, Bellows Silt Valve Door, 300mm PK2 | ||
| 0040-62981 | Bellows, Wafer Lift Alignment Mark 300mm PVD | ||
| 0040-62987 | Bellows/Yoke NCR Slit Valve, 300mm (HLA 0010-22609) | ||
| 0040-70176 | Bellows with Brackets, 300MM, P18 A101 Heater | ||
| 0040-70181 | Weldment, Bellows, Chamber Door, 300MM Enabler | ||
| 0040-70291 | Common Indexer, LL (Single Wafer Load Lock) 300mm | ||
| 0040-70746 | CVD-HDP Ultima | GAS RING, 36 Holes 300MM | |
| 0040-75296 | Bellows, Wafer Lift 300MM RPG P5 | ||
| 0040-76498 | Bellows/Shaft Wafer Loft Cooldown | ||
| 0040-76514 | Bellow, 300MM Pedestal, Preclean | ||
| 0040-84650 | CVD-HDP Ultima | Bellows, Inconel Weldment, Lift Mech Assy, 300mm, HDPCVD | |
| 0040-88004 | Bellows, Pedestal Lift, 300mm C, Endura 2 | ||
| 0040-91678 | Bellows, Pin Lift, 300mm CVD | ||
| 0040-96829 | Shaft Bellows Assy- Throttle Valve, CPS 300 | ||
| 0200-02421 | Isolator, Lid Top Ceramic TxZ 300MM | ||
| 0200-02575 | Lift Ring, Pin, Fixed 200/300MM Producer | ||
| 0040-82895 | Wall Liner | ||
| 0040-83331 | Cathode Liner | ||
| 0020-52965 | Silt Door Liner | ||
| 0021-26628 | Insulator Internal | ||
| 0040-43978 | Upper Chamber Liner | ||
| 0040-43977 | Lower Chamber Liner | ||
| 0021-13430 | Cathode Liner | ||
| 0040-41703 | Silt Valve Door | ||
| 0021-13434 | Screen (Poly Only) | ||
| 0040-43978 | Upper Chamer Liner | ||
| 0040-43977 | Lower Chamber Liner | ||
| 0021-13612 | Cathode Liner | ||
| 0020-75118-001 | 300mm Membrane | ||
| 0200-10169 | Ceramic | Ceramic Edge Ring | |
| 0200-39324 | Ceramic | Ceramic Insert Ring | |
| 0040-88203 | PPS | Retainer Ring | |
| 0040-88203 | PEEK Virgin | Retainer Ring | |
| 0200-39133 | DPS Metal | Inner End Point Plug | |
| 0200-39135 | DPS Metal | Window, Manometer Port, Ceramic Ref. NM0003-2390 | |
| 0200-35267 | |||
| 0200-10415 | Quartz | Focus Ring 2 Piece, Straig | |
| 0200-00665 | Quartz | GDP Super E | |
| 0200-00308 | Ceramic | Long Ceramic Lift Pin | |
| 0200-00309 | Ceramic | Adjustable Short Ceramic Lift Pin | |
| 0200-00310 | Ceramic | Short Ceramic Lift Pin | |
| 0022-77252 | Qudrant PPS | CMP | Retainer Ring Quadrant PPS |
| 0040-51557 | Qudrant PPS | CMP | Retainer Ring 12″ Quadrant PPS |
| 0040-77858 | QUADRANT PPS | CMP | Retainer Ring Quadrant PPS |
| 0040-52358 | QUADRANT PPS | CMP | Retainer Ring Quadrant PPS |
| 0020-28206 | Endura | SS Upper Shield W/Arc Spray | |
| 0200-36665 | Quartz | Window Quartz 9.505 x .500″ | |
| 0140-18122 | Cable | Cable Assy | |
| 0020-33538 | Metal | BPTEOS Showerhead | |
| 0021-03094 | AL-6061-T6 | Edge Ring | |
| 0200-20437 | Deposition Ring 300mm ESC | ||
| 0200-05032 | Insert Ring | ||
| 0200-01284 | Shadow Ring | ||
| 0200-20460 | Quartz | PIK Insulator 6″ JMF | |
| 0200-00353 | Ceramic | Pins Ceramic WxZ | |
| 0200-00621 | Shadow Ring | ||
| 0200-01271 | Pumping Plate WxZ | ||
| 0020-30357 | Vespel | GDP Vespel Plugs | |
| 3690-01458 | 8-32 x 3/8″ Vented SHCS | ||
| 0200-39137 | Ceramic | DPS Poly/DT | Dome Ceramic Chamber DPSD |
| 0190-35254 | Bellows | Centura | Bellows Assy Upper R3 Rotation |
| 0200-00013 | Quartz | Etch | Ring Quartz 6″ |
| 0200-00020 | Quartz | Etch | Ring Quartz 150mm Oxide |
| 0200-00058 | Quartz | Etch | Gas Ring Small Holes and Channels |
| 0200-20459 | Quartz | Insulator Quartz 6″ | |
| 3500-01245 | Metal | Nut Hex Full 5/8 – 11 | |
| 3880-01036 | Metal | Washer Flat 5/8 SST | |
| 3880-01038 | Metal | Washer LKG Split 5/8 | |
| 3690-02697 | Metal | SCR MACH BTN HD 6-32 X 3/8 HEX SKT SST SLVR-PLT | |
| 0030-00220 | Metal | Pedestal Clip | |
| 0010-02170 | Metal | Left Pivot and Bearing | |
| 0010-02171 | Metal | Right Pivot and Bearing | |
| 0200-05207 | Lower Dome | ||
| 0200-01009 | Top Baffle | ||
| 0200-18081 | Ceramic | Ceramic Cover | |
| 0200-18109 | Ceramic | Ceramic Collar SNNF | |
| 0200-09244 | Quartz | Quartz Cover 8″ External Cathode WF | |
| 0200-05207 | Quartz | Lower Dome | |
| 0200-00829 | |||
| 0200-00828 | |||
| 0200-01610 | |||
| 0200-01611 | |||
| 0200-00811 | |||
| 0200-00831 | Quartz | Quartz Single Ring | |
| 0200-00020 | Quartz | Ring Quartz 150mm Oxide | |
| 0200-09614 | Ceramic | Pin Wafer Lift WSIX DCS | |
| 0020-10887 | Ceramic | Clamp Ceramic Screws | |
| 0021-17875 | Valve Seal | Valve Throttle Seal Sigma | |
| 0200-01798 | Pin Lift TXZ Heater | ||
| 0020-31064 | Lift Pin Holder | ||
| 0200-10377 | DPS Poly/DT | Ring, Focus Ceramic (DPS Chmbr) | |
| 0200-10160 | Liner, Ceramic Lid DxZ | ||
| 0200-35207 | Pin Wafer Lift Ply Qtz | ||
| 0200-00602 rev001 | Ring Focus Qtz CPS2A | ||
| 0200-35295 | Housing Gas Stem Ceramic | ||
| 0200-35296 | Plug Gas Stem Ceramic | ||
| 0200-18053 | Ceramic Lift Pin Guide | ||
| 0200-39296 | Insert, Ceramic Aperture | ||
| 0200-39135 rev002 | DPS Metal | Window, Manometer DPS | |
| 0200-09616 | Cover, BTM Slide DCS/WSIX | ||
| 0200-09613 | Cover, Top Lift FGR DCS/WSIX | ||
| 3700-01056 | ORING ID 7.734 CSD .139 VITON 75DURO BLK | ||
| 3700-01095 | ORING ID .674 CSD .103 VITON 75DURO BLK | ||
| 3700-01174 | ORING ID 1.174 CSD .103 VITON 75DURO BLK | ||
| 3700-01852 | ORING ID .549 CSD .103 VITON 75DURO BLK | ||
| 3690-01195 | SCR CAP SKT HD 10-32 X 5/8L HEX SKT SST | ||
| 0200-09046 | Ceramic | 100 + pieces | Arm W/Pin and Plug |
| 0020-30406 | Plate, Perforated, 150mm | ||
| 0200-39140 | DPS Metal | Ring, Focus Ceramic Metal DPS | |
| 0200-09413 | Quartz | Window Heater Quartz 200mm | |
| 0200-00018 | Quartz | Collar Pedestal 4″ OX/MLR (Reg) | |
| 0200-00036 | Quartz | Ring Cover Rim 4,5,6 Oxide | |
| 3300-01963 | Metal | FTG Pipe QDISC Body 3/8MNPT2 | |
| 3300-02005 | Metal | FTG ADISC 3/8 x 1/4 T SST316 | |
| 0020-03589 | Vespel | Clamp Ring Poly 125mm Vespel | |
| 0200-40211 | Quartz | Centura 5300 | Collar Wider 200mm SNNF Tight Fit |
| 0200-00151 | Quartz | Insulator Quartz Pedestal PCII | |
| 0020-30086 | Metal | Showerhead GGN 6″ AMT 5000 | |
| 0200-10266 | Ceramic | Ceramic Ring (2 pcs Rack 6 Wall) | |
| 0020-09363 | SiC | Silicon Carbide (SiC) DC Plug | |
| 0020-21462 | Insulator Source 11.3″ | ||
| 0020-23093 | Ceramic | Washer Insulator Spacer Ceramic | |
| 0040-01784 | Ceramic | Isolator, RF, DxZ Fluorine Generator. | |
| 0200-00247 | Capture Ring | ||
| 0200-00307 | Capture Ring, CESC, JMF, 200mm | ||
| 0200-00329 | Single Ring, Focus. DPS+ Poly. | ||
| 0200-00382 | Capture Ring | ||
| 0200-02145 | Rigid Coil Support CapCPN : MA-41243 | ||
| 0200-03442 | 9ATR0107, Ceramic Purge Ring | ||
| 0200-09149 | Lift Finger, 100mm, WCVD. | ||
| 0200-09183 | Shield Ceramic 150 mm | ||
| 0200-09224 | Ceramic Adaptor, CPN : 0200-09224 | ||
| 0200-09251 | Outer Ring, 100mm, WCVD. | ||
| 0200-09950 | Isolator EC Lid WxZ, CPN : MP-453, OPN : 0200-09950 | ||
| 0200-09999 | 9ATR0195, Ceramic Lift Ring | ||
| 0200-20175 | Labyrinth, Coil Support, Ceramic | ||
| 0200-20217 | Labyrinth, Feedthru Coil, Ceramic | ||
| 0200-20315 | Rest Buttons, Ceramic | ||
| 0200-20494 | Rigid Coil Support CapCPN : MA-31230 | ||
| 0200-35427 | Multi-Slot Cooldown Rib, 5″ | ||
| 0200-35428 | Multi-Slot Cooldown Rib, 3″ | ||
| 0200-35883 | ECM Focus Ring | ||
| 0200-36118 | SiC High Purity Batch Edge Ring Si Coating. | ||
| 0200-36631 | Cover Plate Dimpled | ||
| 0200-36710 | Etch, Shadow Ring, Quartz. | ||
| 0992-60094 | Ceramic Insulator Chuck Ring | ||
| 0992-60126 | Ceramic Insulator Ring, Bell Jar | ||
| 0992-60149 | Macor Insulator Bellows | ||
| 0200-00057 | Quartz | Window Small | |
| 0200-02916 | Ceramic | Deposition Ring 300mm BESC Ceramic | |
| 0140-09025 | Harness | HARNESS ETCH COVER INTERLOCK | |
| 0200-09598 | Quartz | Vessel Single H2O VDSII | |
| 0040-49965 | Metal | Retainer Ring 12″ | |
| 0200-00135 | Quartz | Blade Quartz 200mm HP/HP+Wrist, Anti-S | |
| 0200-35081 | Graphite W/ SiC Coating | Ring Pre-Heat Graphite Beta Coating | |
| 0200-35024 | Quartz | Chamber Liner Quartz Upper | |
| 0200-09575 | Ceramic | Lift Pin Rev 1 Ceramic Hoop 200mm | |
| 0200-10411 | Quartz | Cover Quartz Planarization 200mm | |
| 0200-35334 | Quartz | Window View Poly DPS | |
| 0200-35486 | Quartz | Pin Lift Quartz MOD II | |
| 0200-00983 | Quartz | Quartz Single Ring | |
| 0040-55456 | Quartz | Technoquartz Bell Jar | |
| 0200-01903 | Quartz | Insulator Pedestal Quartz 300mm PCII | |
| 3700-01208 | O-Ring | O-Ring Quartz W/Chamber | |
| 3700-01441 | O-Ring | Quartz Gas Feedthrough O-Ring (Kal) | |
| 0200-09187 | Quartz | Cover Quartz 8 EXT Poly 4.4mm | |
| 0200-01119 | Quartz | Shadow Ring Quartz 200mm Notch | |
| 0200-03425 | Quartz | Cylinder 80SR Wafer Support 200mm RTP | |
| 0200-09974 | Quartz | Shield L-Support Pumping Insert | |
| 0200-10111 | Pin Wafer Lift Metal Hoop 200mm Plasma | ||
| 0200-10194 | Shield Tapered 200mm | ||
| 0200-10284 | Pin Lift Heater DXZ | ||
| 0200-00155 | Quartz | Insulator Quartz 200mm | |
| 0200-39297 | Quartz | Cover Quartz 8″ Hi-temp | |
| 0020-23549 | Shield, Upper, AL ARC-Spray, SST, 300mm | ||
| 0021-17770 | Cover Ring, 300mm SST | ||
| 0040-07291 | Depositon Ring ADV 101 300MM | ||
| 0200-26374 | Clamp, Middle Shield, 300MM SIP CU Encore | ||
| 0021-18068 | Shield, Dark Space, 0.050″ Gap, 300MM ALPS | ||
| 0021-18960 | Deposition Ring, A101 Self Align Shadow | ||
| 0200-36399 | Ceramic | Shield, Top Ceramic, TXZ 300MM | |
| 0200-76050 | Cover, 300MM Pedestal, B101 HTR IMP | ||
| 0200-76057 | Ceramic | Ring, Cover 300MM B101 (Ceramic)Tin, Heater | |
| 0020-20437 | Deposition Ring 300MM ESC | ||
| 0200-09121 | Ceramic | Ceramic Shield WxZ 150mm FC | |
| 0200-20437 | Ring, Deposition, 300mm ESC | ||
| 0200-03736 | Collar 300mm, 5.4mm Producer Etch | ||
| 0200-03170 | Ring, Barrier, Quartz, 300mm, IA | ||
| 0200-03576 | Collar, Top, 300mm, 5.4mm Producer | ||
| 0200-04826 | Bottom Ring,Quartz,Flame Polished 300mm | ||
| 0200-03233 | L-Collar, Columnar SI, 1.5MM Step, 300MM | ||
| 0200-09747 | Ceramic | Cover Clamping Ring AL 200mm Ceramic | |
| 0200-09672 | Ceramic | Clamping A. 200mm 1.38H Notch Ceramic | |
| 0200-09746 | Ceramic | Collar AL 200mm Ceramic | |
| 0200-00034 | Quartz | Cover Quartz 5 Poly .40 Thk | |
| 0200-36689 | RING FOCUS QUARTZ DPS POLY | ||
| 0200-10486 | Quartz | Rod Spacer DPA-Shrink | |
| 0200-10491 | Quartz | Insulator Non-PWR Side Alumina DPA | |
| 0200-00019 | Quartz | Ring Quartz | |
| 0200-09472 | Quartz | Clamp Ring 125mm | |
| 0200-09556 | Quartz | Focus Ring Poly Chamber | |
| 0200-10522 | Quartz | INSULATOR, NON-PWR SIDE, ALUMINA, DPA | |
| 0200-18090 | Ceramic | ESC 8″ Ceramic Insulator | |
| 0200-18062 | Ceramic | Ceramic Dome Plus | |
| 0200-01006 | Ceramic | Ceramic Dome Standard | |
| 0200-00196 | Pin Wafer Lift 150mm Thin Wall Silicon C | ||
| 0200-04703 | Rest Buttons, Ceramic | ||
| 0200-05306 | |||
| 0200-00925 | Quartz | 3B001.C.2 Cover Ring Quartz 32RA | |
| 0200-09027 | Ceramic | Adapter Pumping Plate #6 | |
| 0200-01321 | Insert Shadow Ring | ||
| 0200-10195 | Shield Tapered 150mm GECO | ||
| 0200-09322 | Quartz | Shield 150mm Pedestal Finger | |
| 0200-36034 | Quartz | Insulator Quartz 300mm Simple Cathode | |
| 0140-09505 | Harness | Harness GV PCB to CH | |
| 0020-30708 | Vespel | Ring Clamp Vespel | |
| 0200-09215 | Quartz | Ring Pedestal Quartz 125mm Metal Etch Chamber | |
| 0200-03921 | Quartz | Pump Port Insert | |
| 0200-04022 | Quartz | Cover Insert, Roughing Port | |
| 0200-09696 | Ceramic | Finger Ceramic 125/150mm | |
| 0200-40218 | Quartz | Dome Quartz Tappered | |
| 0200-00079 | Quartz | Cover Focus Qtz 6. W. W/F | |
| 0200-01239 | Silicon | Insert Ring Silicon 200mm Notch | |
| 0200-20061 | Quartz | PC II Plate 6″ | |
| 0200-09412 | Quartz | Window Heater Steped | |
| 0200-00062 | Quartz | Ring Rapawround Quartz 4″ 5″ & 6″ | |
| 0040-87019 | Bellows | Bellows Assy Upper R3 Rotation | |
| 0040-87020 | Bellows | Bellows Assy Lower Mag. Coupled Rotation | |
| 0030-00195 | Lip Seal | 150mm Lip Seal Viton | |
| 0200-10204 | Pin Wafer Lift Univ Chb Metal Hoop 150mm | ||
| 0200-01173 | Quartz | Insulator Quartz 6″ | |
| 0200-01176 | Quartz | Cover Top 6″ | |
| 0200-01172 | Quartz | Insulator Quartz 6″ | |
| 0200-00047 | Quartz | Ring Clamping MLR 150mm | |
| 0020-09373 | O-Ring | Small Face Seal | |
| 0030-09050 | O-Ring | Large Face Seal | |
| 0200-36666 | Ceramic | Isolator Ceramic Producer 200mm | |
| 0200-39361 | Insolator Silane Pumping Ring | ||
| 0200-36373 | Lift Pin .149 Triangular | ||
| 0200-00404 | Isolator Pumping Ring Bottom | ||
| 0200-00403 | Isolator Pumping Ring Middle | ||
| 0030-09036 | Chemraz Lip Seal Finger Hole Pedestal Seal | ||
| 0200-01118 | WINDOW QUICK RELEASE ENDPOINT WINDOW | ||
| 0200-02124 | COVER RING,QUARTZ,200MM | ||
| 0200-02385 | INSERT RING, SILICON, 200MM NOTCH | ||
| 0200-35843 | Ceramic | Pumping Ring Ceramic Top Giga-Fill SACVD | |
| 0200-10650 | Ceramic | Cover Ceramic Pumping Channel Giga-Fill SACVD | |
| 0200-35842 | Ceramic | Pumping Ring Ceramic C-Shape Giga-Fill SACVD | |
| 0200-39274 | Ceramic | Pumping Ring Ceramic Giga-Fill SACVD | |
| 0200-09933 | Ceramic | Pin Wafer Lift Heater | |
| 0200-02468 | Upper Chamber Liner | ||
| 0200-02477 | Liner Chamber Lower 8 Tab Centering | ||
| 0200-03166 | Upper Dome | ||
| 0200-89004 | Dome Lower Epi/HTF 300mm | ||
| 0200-89005 | Insert Chamber Inlet 5 Zone | ||
| 0200-89015 | Shaft Wafer Lift 9.0 BC | ||
| 0200-89033 | Shaft Susceptor Support W/Pins | ||
| 0200-20331 | Cover Ring Ceramic IMPTi | ||
| 0200-20216 | |||
| 0200-07372 | Si Crystal Silicon | Source, Si-15 Hole Serialised | |
| 0200-09789 | Quartz | Cover Quartz 6″ Stepped Lift 2 Flatted ESC | |
| 0200-18082 | Ceramic | Nozzle Ceramic 1.76L Center HDPCVD | |
| 0020-35857 | O-Ring | O-Ring 400mm x 7mm Non-Stick Viton | |
| 7310-2841-02 | Quartz | Isolation Tube Liner | |
| 3440-01037 | Sapphire | Window Sapphire Lens 25mm Dia x 2mm Thk | |
| 0040-79925 | Door Slit Valve Waffle-less 200 EMAX | ||
| 0200-02818 | Insert Ring NM L-Shap Notch 200mm E | ||
| 0200-01463 | Quartz | eMAX | Shadow Ring Quartz 63RA 200 EMAX Inner |
| 0200-01612 | Quartz | Injector Gas 200mm EMAX | |
| 0200-01369 | Injector Gas Seal Blank-Off W/Oring E | ||
| 0200-03300 | Quartz | Shadow Ring Quartz 63RA 200 EMAX Outer | |
| 0200-09075 | Quartz | Adaptor Pump Plate 200mm Narrow Gap Nitride W/B | |
| 0190-15375 | Sapphire | ||
| 0200-35692 | Quartz | Robot Blade Quartz | |
| 0200-05697 | Sapphire | Sapphire Rod | |
| 0020-00846 | Quartz | Window Viewport 4″ Glass | |
| 0200-35780 | Quartz | Quartz Pin Standoff Cooldown | |
| 0200-36114 | Quartz/Si Coat | Cylinder Wafer Support Si Coated 200mm RTP | |
| 0200-35475 | Quartz | Pad Kapton Robot Blade Quartz 2 | |
| 0200-01041 | Ceramic | Ceramic Cover Ring | |
| 0200-40091 | Quartz | Centura 5300HDP | Insert Quartz Mark IV Slit Valve |
| 0200-40158 | Quartz | Centura 5300HDP | Wall Cover Mark IV CBR Pinned fp |
| 0200-40221 | Quartz | Centura 5300HDP | Shaft Cover Ring Hat Top |
| 0200-20138 | Quartz | Insulator Quartz 150mm | |
| 0200-02576 | Lift Ring Fixed Lift Pin 200mm Producer | ||
| 0200-20137 | Quartz | Pin PCII Insulator | |
| 0200-01326 | Ceramic | Insulator Ceramic 300mm Source Adaptor | |
| 0040-36095 | Bellows | CVD Producer | Heater Lift Bellows 300mm |
| 0040-39946 | Bellows | Wafer Lift Bellows | |
| 0040-01618 | Manifold | Input Manifold | |
| 0200-35706 | Ceramic | Liner Ceramic SiN DXZ | |
| 0200-35702 | Ring Edge DXZ+ | ||
| 0200-10157 | Liner Junction SiN DXZ | ||
| 0021-17409 | Metal | Face Plate | |
| 0200-36692 | Quartz | Single Low Profile Ring | |
| 0200-00968 | Ceramic | Isolator FSG-TEOS Producer 200mm | |
| 0200-00969 | Ceramic | Pumping Liner | |
| 0200-00332 | Quartz | Single Ring Quartz | |
| 0200-20085 | Quartz | Insulartor Quartz 5″ SMF PCII EXT | |
| 0040-03485 | Plastic | Block Insulation Water Manifold Ultima | |
| 0200-04593 | Sapphire | Sapphire Window | |
| 0200-03494 | Quartz | Quartz Ring | |
| 0200-09089 | Quartz | Ring Quartz 100mm | |
| 0200-01612 | Injector Gas 200mm EMAX | ||
| 0200-00981 | Quartz | Quartz Ring | |
| 0200-01461 | Ceramic | Gas Insert Ceramic | |
| 0200-04862 | Quartz | Quartz Single Ring Notch | |
| 0200-09212 | |||
| 0200-00340 | Ceramic | Ceramic Bushing | |
| 0200-00320 | Ring Focus 195mm SNNF 1.38″ 85 Deg DPS | ||
| 0200-01393 | Liner Common BD/BLOK LOWK 200mm Producer | ||
| 3700-01035 | O-Ring | O-Ring ID .424 CSD .103 Viton 75DURO Black | |
| 0200-09085 | Quartz | Shield Quartz 100mm Sputter Etch | |
| 0140-36165 | Chamber Exhaust Interlock | ||
| 0140-36405 | Interlock Harness | ||
| 0200-00436 | Quartz | Shadow Ring Qtz 150mm Flat Dove Tail | |
| 0010-75221 | Kit 12,9 PVD | ||
| 0010-75218 | G12 Source Assy | ||
| 0020-09069 | Pin Lifting Viton | ||
| 0020-04099 | Dinasil | Insert 150mm Lexan MLR | |
| 0010-13625 | Heater | 6″ B101 Heater | |
| 0010-00706 | Vespel | 150mm Vespel Clamp Ring Assy. | |
| 0200-02116 | Ceramic | Injector Ceramic Gas 24 holes EMAX | |
| 0200-02117 | Ceramic | Injector Ceramic Gas Seal EMAX | |
| 0200-04298 | Sapphire | Lift Pin Sapphire | |
| 0200-03946 | Sapphire | Sapphire Window | |
| 0200-36700 | MXP Oxide Chamber | Lift Pin Adjust | |
| 0200-36699 | MXP Oxide Chamber | Lift Pin Fast | |
| 3700-01690 | O-Ring | O-Ring | |
| 3700-02395 | O-Ring | O-Ring | |
| 3700-02721 | O-Ring | O-Ring | |
| 3700-01442 | O-Ring | O-Ring | |
| 3700-01796 | O-Ring | ORING KALREZ 111K4079 424ID X .103CSD | |
| 3700-01756 | O-Ring | ORING CHEMRAZ 202C513-80 234ID X .139CSD GRADIENT | |
| 0150-21125 | Cable | Xfer Robot Interconnect 35′ | |
| 0150-21128 | Cable | Buffer Robot Interconect 35′ | |
| 0150-21129 | Cable | Cassette Indexer 35′ | |
| 0150-21134 | Cable | Chamber C Interconect 35′ | |
| 0150-21135 | Cable | Mainframe Interconect 35′ | |
| 0150-21140 | Cable | Chamber A/B Interconect 35′ | |
| 0150-21141 | Cable | Gas Interconect 35′ | |
| 0150-21142 | Cable | Loader/Pneu Interconect 35′ | |
| 0150-21143 | Cable | Pneumatic Interconect 35′ | |
| 0150-21145 | Cable | Convectron Interconect 35′ | |
| 0150-21147 | Cable | Orientor Ubilical 35′ | |
| 0150-21362 | Cable | Pump Frame Interconect 50′ | |
| 0200-00166 | Quartz | Window Quartz LCF Slit VLV Actuator | |
| 0020-33739 | Vespal | Clamp Ring 5″ Vespal | |
| 0150-19197 | Cable | Cable Assy 15DSUB M/F Adaptor | |
| 0150-75041 | Cable | Pump Cable Chamber 50′ | |
| 0140-09981 | Cable | HRNS Assy Power Dual Disk Drive | |
| 0150-10176 | Cable | Cable Assy Flat 486 PC to RS232 | |
| 0150-10177 | Cable | Cable Assy Flat 486 PC to HDD | |
| 0150-10178 | Cable | Cable Assy Flat 486 PC to FDD | |
| 0200-35430 | Ceramic | Ring Single Ceramic 145mm Jeida Major Flat | |
| 0200-00167 | Quartz | Window Quartz LFC Buffer/Transfer CH Lid | |
| 0200-36649 | Lift Hoop | ||
| 0200-10158 | Sleeve Junction SIN DXZ | ||
| 0200-10162 | Pin Wafer Lift Centura DXZ | ||
| 0200-10286 | Ring Finger Lift Plate 6″ & 8″ | ||
| 0150-21237 | Cable | Loader/Pneumatic Interconect (J31) 50′ | |
| 0150-21226 | Cable | PNUE ZIF 50′ | |
| 0010-21810 | Magnet | G-12 Durasource Magnet | |
| 0020-20123 | Ceramic | Heater Isolator Ceramic | |
| 0200-04017 | |||
| 0200-10144 | Insulator Pumping Plate DxZ | ||
| 0200-36415 | Ceramic | Ring Pumping Ceramic C-Shape DxZ SACVD | |
| 0200-36417 | Ceramic | Ring Pumping Ceramic Top DxZ SACVD | |
| 0200-20163 | Insulator Lamp Cover Left | ||
| 0200-20164 | Insulator Lamp Cover Right | ||
| 0200-20161 | Insulator Lamp Cover Left | ||
| 0200-20162 | Insulator Lamp Cover Right | ||
| 0200-02272 | Lower GDP Quartz | ||
| 0200-02980 | Window | ||
| 0200-02981 | Side Liner Quartz | ||
| 0200-04030 | Viewport / Endpoint Bottom | ||
| 0200-04864 | Plug Chamber Liner | ||
| 0200-09894 | Focus Ring 155mm Flat Poly | ||
| 0200-09895 | Focus Ring 170mm Flat Poly | ||
| 0020-23043 | Upper Shield | ||
| 0200-35423 | Shaft Wafer Lift 150mm MAG Coupled Rotation | ||
| 3700-01425 | O-Ring | O-Ring Kalrez 281 Lid P5000 | |
| 3700-02329 | O-Ring | O-Ring Chemraz 2-109 HDP | |
| 0040-09997 | Ceramic replacement | Shell ESC Poly 200mm | |
| 0200-35065 | Quartz | Quartz Lower Liner ATM | |
| 0200-00690 | Ceramic | Lid Liner Ceramic Std CVD TiN | |
| 0020-03690 | Vespel | Finger Flange | |
| 0020-03696 | Vespel | Clamp Ring 6 DF | |
| 0200-09054 | Quartz | Plate Gas XTAL | |
| 0200-00207 | Tip Susceptor Shaft Outside | ||
| 0200-09082 | Shield 200mm Sputter Etch | ||
| 0200-09608 | Quartz | Shield Quartz 200mm Sputter Etch | |
| 0200-01155 | Deposition Ring Deeper Groove 200mm | ||
| 0200-01196 | Ceramic | Lift Pin Fast Lift Alumina Non Conductive | |
| 0200-36635 | Quartz | Shadow Ring Quartz 200mm Notch (2) LC | |
| 0200-35146 | RTP Lift Pin | ||
| 0200-76069 | Quartz | Window Quartz Centerfinder VHP Centura | |
| 0200-20492 | Insulator Coil Support | ||
| 3700-02214 | O-Ring | O-Ring Kalrez White K17058-KA2037 80 Duro 12.00 ID x .103 CSD | |
| 0020-34445 | Blocker Plate | ||
| 0200-10164 | Pumping Insert | ||
| 0200-10143 | Ceramic | Ceramic Insert Ring | |
| 3700-03049 | O-Ring | O-Ring K3652K8085 | |
| 3700-02063 | O-Ring | O-Ring -233 C513 | |
| 3700-02329 | O-Ring | O-Ring -109 C520 | |
| 0200-01347 | Ceramic | Dome Top Feed 300mm HDPCVD Ultima Plus | |
| 0200-10543 | |||
| 0200-00850 | Quartz | Wide Quartz Cover | |
| 0150-35215 | Cable | MFC Cable 7 Ft 15 pin | |
| 0140-21826 | Cable | Harness | |
| 0020-26577 | Ceramic | Ceramic Tube | |
| 0200-09750 | SiC-Si | Plug DC DIA .172 Shaft SiC-Si Doped 100-150mm | |
| 0200-09687 | Quartz | Ring Focus .75 Quartz Alum 150mm Flat | |
| 0140-20866 | Cable | 24V Power Supply Harness | |
| 0150-13068 | Cable | Motor Phase Cable 50′ | |
| 0150-13088 | Cable | Resolver Cable 50′ | |
| 0010-60004 | Susceptor | 6″ Nitride Susceptor (W/O Exchange) | |
| 0010-60004 | Susceptor | 6″ Nitride Susceptor (With Exchange) | |
| 0200-20134 | Quartz | Insulator 8″ Quartz Preclean II POS A,B | |
| 0020-27117 | Quartz | Insulator Quartz 8″ Preclean II | |
| 0200-02395 | Ceramic | Liner Ceramic Top Producer SE | |
| 0200-02972 | Ceramic | Liner Ceramic Top, Low K Producer SE | |
| 0200-02408 | Ceramic | Pumping Ring Ceramic C-Chanel Side 2 300mm Producer SE | |
| 0200-00668 | Ceramic | LINER, CERAMIC BOTTOM, SACVD 300MM PRODUCER (3 OF 3) | |
| 0200-02974 | Ceramic | Liner Ceramic Bottom Low K Producer SE | |
| 0200-02397 | Ceramic | Liner Ceramic Bottom Producer SE | |
| 0200-02414 | Ceramic | Liner Ceramic Top Eterna | |
| 0200-02396 | Ceramic | Liner Ceramic Middle Producer SE | |
| 0200-02973 | Ceramic | Liner Ceramic Middle Low K Producer SE | |
| 0200-00032 | |||
| 0200-36630 | ALN-SC1 | Cover Plate 8″ Heater DXZ | |
| 0200-10412 | Focus Ring 2pc 195 x 209mm ID Notch | ||
| 0040-38825 | Bellows | Weldment Bellows Assy Upper DxZ | |
| 0040-38826 | Bellows | Weldment Bellows Assy Lower DxZ | |
| 0200-35168 | Quartz | Ring TEMP Calibration | |
| 0020-03459 | Glass | Glass View Port | |
| 0020-20521 | Ceramic | Lift Insulator Spacer | |
| 0020-23093 | Ceramic | Washer Insulator | |
| 0200-00015 | Quartz | Cover Quartz 125mm | |
| 0200-36629 | ALN-SC1 | Cover Plate 6″ Heater DXZ | |
| 0200-09822 | Ring Clamping Flat AL 125mm | ||
| 0200-09596 | Quartz | Collar 125mm Quartz ASP | |
| 0040-87018 | Bellows | Bellows Assy Upper MAG Coupled Rotation | |
| 0200-09597 | Lift Pin 125mm Chuck ASP | ||
| 0200-77008 | Quartz | Shield Quartz Rear | |
| 0200-00719 | Quartz | Zero Position Quartz Blade | |
| 0190-70070C | Ceramic | F5ZZ BRG W/15 to 20% Fill of NYE Grease Elbow Bearing | |
| 3780-01106 | .750LX .120OD x .020 Wire DIA SS 378 Compression Springs | ||
| 0150-21418 | Cable | Remote DC Power to Main AC 75ft. | |
| 0200-00216 | Chamber Insert 200mm TxZ CIP | ||
| 0040-77243-MOD | QUADRANT PPS | CMP | AEP Composit Ring for Mirra & Messa |
| 0200-00261 | Chamber Insert 200mm TxZ CIP | ||
| 0200-02469 | Insert Liner Exhaust TXZ 200mm | ||
| 0200-00509 | Quartz | Filter Infra-Red Viewport Quartz | |
| 0040-20242 | 6″ Wafer Support Assy. | ||
| 0200-10020 | P-Chuck WCVD | ||
| 0040-87358 | Bellows | Bellows SV-Door W/ Ball Bearing | |
| 0040-49386 | Bellows | Producer Aluminum Bellows Finger Lift | |
| 0040-76767 | Bellows | Weldment Bellows | |
| 3700-01715 | O-Ring | O-Ring Chemraz ID 7.484 CSD .139 SC513 | |
| 3700-01682 | O-Ring | O-Ring View Port AS568A-229 | |
| 3700-03175 | O-Ring | O-Ring Kalrez ID 3.25 CSD .125 2037 80DU | |
| 3700-01357 | O-Ring | Seal Lip | |
| 3700-02105 | O-Ring | O-Ring Chemraz ID 10.484 CSD .139 SC513 | |
| 0200-18088 | Collar Low Profile 150mm JMF HDPCVD Ultima | ||
| 0040-20283 | Bellows | Preclean Pedestal Bellows | |
| 0040-20155 | Bellows | Preclean Lift Bellows | |
| 0040-75904 | Bellows | Bellows Wafer Orienter | |
| 0040-22910 | Bellows | Basic Bellows-Orienter | |
| 0200-05959 | Quartz | Single Ring Quartz .09 Height | |
| 0040-00103 | Bellows | Bellows Actuator | |
| 0200-03445 | Quartz | Quartz Bottom Insulator Ring | |
| 0200-03471 | Single Crystal Si | Single Crystal Silicon Top Ring 200mm VHF EMAX | |
| 0200-03472 | Single Crystal Si | Single Crystal L-Collar1.5 Step 3.6mm HT 200mm VHF EMAX | |
| 0200-03474 | Quartz | Quartz Outer Bottom Ring 200mm VHF EMAX | |
| 0200-03462 | Quartz | Quartz Insulator Ring 3.6mm HT 200mm VHF EMAX | |
| 0040-09697 | Bellows | Weldment Bellows Assy Upper WXZ | |
| 0040-09700 | Bellows | Assy Bellows Lower | |
| 0200-02577 | Lift Plate Fixed Lift Pin 200mm Producer | ||
| 0200-00316 | Isolator Pumping Ring Middle | ||
| 0200-20002 | Quartz | Quartz Insulator Preclean | |
| 0200-00950 | Collar 150mm SMF HDP-CVD Ultima | ||
| 0200-10170 | Quartz | Window Quartz | |
| 0040-31844 | Bellows | Assy Bellows Lift Pin | |
| 0200-39289 | Isolator TEOS Pumping Ring Producer 200 | ||
| 0200-00402 | Isolator Pumping Ring Top 200mm Producer | ||
| 0200-00317 | Pumping Ring Bottom | ||
| 0200-18095 | Collar MIN Contact 200mm SNNT HDPCVD Ultima | ||
| 0200-03026 | Ceramic | Isolator Extended Ceramic Producer 200mm APF | |
| 0200-04085 | Ceramic | Ceramic Liner Middle APF 200mm Producer | |
| 0200-04084 | Ceramic | Ceramic Liner Bottom APF 200mm Producer | |
| 0200-04092 | Ceramic | Ceramic Liner Top APF 200mm Producer | |
| 3870-01306 | Valve | Valve Pneu Diaph 125PSI N/C 1/4VCR-F/F SST | |
| 0200-20215 | Housing Double RF Connector Vectra IMP | ||
| 0200-10363 | Quartz | Focus Ring Poly 150mm Quartz | |
| 0021-20381 | Cup Inner Coil Support Knurled Vectra-IMP | ||
| 0020-29974 | Not avalible any more | Clamp Feedthru Coil Support 1.365″ L Vectra-IMP | |
| 0020-29348 | Not avalible any more | Cup Outer Feedthru Support SST Recessed Vectra | |
| 0015-20213 | Not avalible any more | Screw Captive Modified Feedthru Vectra-IMP | |
| 0200-20169 | Insulator Coil Support Rigid | ||
| 0200-20170 | Cap Coil Support Rigid | ||
| 0200-20316 | Ceramic | Pedestal Cover Upper 8″ B101 Vectra-IMP | |
| 0020-04039 | Cover Plate RF P5000 | ||
| 0200-10193 | Shield Common Silane 150mm | ||
| 0200-09491 | Shield 100mm 96mm, 2 Flats 90 Deg | ||
| 0200-02527 | Blade Quartz SBR Robot | ||
| 0200-02619 | Top Ring Quartz eMax | ||
| 0200-10325 | Dome DPS Metal R0 | ||
| 0200-09692 | Pipe Insulating Quartz MxP | ||
| 0200-05335 | Single Ring DPS Poly 200mm Wide | ||
| 0200-07530 | Ceramic | AD 995 | Shadow Ring Ceramic DT |
| 0200-07528 | Ceramic | AD 995 | Capture Ring Ceramic DT |
| 0200-00038 | Clamp Ring 100mm Ridgid MLR/Oxide | ||
| 0200-00640 | Insert Ring Silicon 200mm Flat | ||
| 0200-35597 | Focus Ring Jeida 145mm | ||
| 0200-35824 | Ring Single 195mm Semi Notch No Flat | ||
| 0200-05996 | Quartz | Ring Single ESC 195mm Nitch Quartz | |
| 0200-35283 | Shaft Susceptor Support | ||
| 0200-04470 | Ceramic | Isolator Ceramic LOWK 300mm Producer | |
| 0200-03406 | C-Channel Side 1 Producer SE APF | ||
| 0200-03405 | Pumping Liner Top Producer SE APF | ||
| 0200-00822 | Quartz | Quartz Bell Jar | |
| 0200-10448 | Si | Si Insert Ring | |
| 0150-20660 | Cable | Cable Assembly | |
| 0150-22735 | Cable | Cable Assembly | |
| 0200-00852 | Ring Shadow JMF NCSR 1.5mm EE WxZ 200mm | ||
| 0200-02407 | Ceramic | Pumping Ring Ceramic C-Channel Side 1 | |
| 0200-09734 | Cover Pedestal 150mm | ||
| 0200-36688 | Ceramic | Ring Single LP 145mm JMF Ceramic DPS | |
| 0140-38233 | Cable | Cable | |
| 0041-05383 | Retaining Ring 100mm 5 Zone Profiler | ||
| 0020-09545 | UV Filter Slit Window | ||
| 0150-75068 | Cable | Cable Encoder Flat | |
| 0200-09129 | Ceramic | Isolator Ring 200mm | |
| 3700-01654 | O-Ring | O-Ring White Chemraz C513 5.484 x .139 | |
| 3700-02060 | O-Ring | O-Ring White Chemraz C513 1.237 x .103 | |
| 3700-01716 | O-Ring | O-Ring White Chemraz C513 | |
| 0020-04074 | Dynasil | Window Dynasil | |
| 0200-00933 | Screw Cover Ring, DPS2 | ||
| 0010-05197 | Susceptor | Nitride Susceptor 6″ Shieled; Referbishment | |
| 0010-09616 | Susceptor | Universal TEOS Susceptor 6″ Referbishment | |
| 0020-84596 | Face Plate Silane NIT 300mm Producer | ||
| 0021-12790 | Blocker Silane 300mm Twin Producer | ||
| 0200-00518 | PUMPING RING, PRODUCER 300MM | ||
| 0200-00482 | ISOLATOR, CERAMIC, PRODUCER 300MM | ||
| 0200-00666 | LINER, CERAMIC TOP, SACVD 300MM PRODUCER (1 OF 3) | ||
| 0200-00667 | LINER, CERAMIC MIDDLE, SACVD 300MM PRODUCER (2 OF 3) | ||
| 0150-10454 | Cable | Cable, Lid/Cover Interlock SW, DXZ | |
| 0020-14590 | 300mm Face Plate | ||
| 0020-17989 | 300mm Face Plate | ||
| 0020-48972 | 300mm Face Plate | ||
| 0020-49785 | 300mm Face Plate | ||
| 0020-51923 | 300mm Face Plate | ||
| 0020-53698 | Not avalible any more | 300mm Face Plate | |
| 0020-62625 | 300mm Face Plate | ||
| 0020-70275 | 300mm Face Plate | ||
| 0021-42629 | CVD Producer | 300mm Sloped Face Plate | |
| 0040-08492 | PVD Endura | 300mm Face Plate | |
| 0040-87765 | 300mm Face Plate | ||
| 0040-95475 | ELK 300mm Face Plate | ||
| 0041-13891 | 300mm HARP Face Plate | ||
| 0041-25016 | 300mm HARP Face Plate | ||
| 0020-14589 | 300mm Blocker Plate | ||
| 0020-18725 | 300mm Blocker Plate | ||
| 0020-47008 | CVD Producer | 300mm Blocker Plate | |
| 0020-48891 | 300mm Blocker Plate | ||
| 0020-52120 | 300mm Blocker Plate | ||
| 0020-61385 | ELK 300mm Blocker Plate | ||
| 0020-70842 | 300mm Blocker Plate | ||
| 0020-94081 | 300mm Blocker Plate | ||
| 0021-61344 | ELK 300mm Blocker Plate | ||
| 0020-00991 | Hex Cover 150mm Coated | ||
| 0020-06231 | Hex Cover 125mm | ||
| 0020-06447 | Insulator Cap | ||
| 0020-06754 | Hex Cover 100mm | ||
| 0020-09933 | Gas Plate | ||
| 0020-10119 | Perf Plate 150mm | ||
| 0020-10120 | TEOS Perf Plate 150mm | ||
| 0020-10122 | Perf Plate 125mm | ||
| 0020-10204 | Susceptor Plate 200mm | ||
| 0020-10936 | Blocker Plate 200mm | ||
| 0020-10771 | TEOS Perf Plate 150mm | ||
| 0020-30195 | Cover | ||
| 0020-30407 | Perf Plate 200mm | ||
| 0020-30446 | Blocker Plate 125mm | ||
| 0020-30580 | Blocker Plate 150mm | ||
| 0020-30797 | Perf Plate 200mm | ||
| 0020-30816 | Gas Distribution Plate 13 hole | ||
| 0020-30919 | Susceptor Plate 200mm | ||
| 0020-31088 | Susceptor Plate 200mm | ||
| 0020-31490 | Gas Distribution Plate 37 hole | ||
| 0020-31547 | Gas Distribution Plate 101 hole | ||
| 0020-31548 | Gas Distribution Plate 133 hole | ||
| 0020-31620 | Susceptor Plate 200mm | ||
| 0020-31789 | Cover | ||
| 0020-31804 | Gas Distribution Plate 80 hole | ||
| 0020-31831 | Chamber Lid | ||
| 0020-32318 | Gas Distribution Plate 37 hole | ||
| 0020-32259 | Gas Distribution Plate 119 hole | ||
| 0020-32260 | Gas Distribution Plate 37 hole | ||
| 0020-32262 | Gas Distribution Plate 133 hole | ||
| 0020-32263 | Gas Distribution Plate 145 hole | ||
| 0020-33366 | Blocker Plate 200mm | ||
| 0020-32952 | Susceptor Plate 200mm | ||
| 0020-33998 | Chamber Liner | ||
| 0020-34293 | Chamber Lid | ||
| 0020-34297 | Chamber Lid | ||
| 0020-34444 | Face Plate 200mm | ||
| 0020-34606 | Blocker Plate 200mm | ||
| 0020-42285 | Blocker Plate 200mm | ||
| 0020-42287 | Perf Plate 200mm | ||
| 0020-44453 | Blocker Plate 300mm | ||
| 0020-60007 | Susceptor Plate 125mm | ||
| 0020-60033 | Susceptor Plate 150mm | ||
| 0021-01273 | Chamber Liner | ||
| 0021-01569 | Blocker Plate 200mm | ||
| 0021-01572 | Face Plate 200mm | ||
| 0021-02306 | Face Plate 200mm | ||
| 0021-09007 | Chamber Lid | ||
| 0021-09008 | Chamber Lid | ||
| 0021-09909 | Face Plate 200mm | ||
| 0021-14590 | 300mm Face Plate | ||
| 0021-15200 | Face Plate 200mm | ||
| 0021-17989 | Face Plate 300mm | ||
| 0021-53284 | Titanium Ring | ||
| 0040-95463 | 300mm Face Plate | ||
| 0200-10542 | Quartz | Window Boomerang | |
| 0020-00022 | PLATE PERF 8″ EC WXZ | ||
| 0020-01371 | PLATE, 8″ BLOCKER, EC WXZ | ||
| 0020-01841 | PLATE, PERF 8″, WXZ RCSH VER B | ||
| 0020-10191 | PLATE BLOCKER NITRIDE/TEOS USG 200MM | ||
| 0020-16215 | PLATE BLOCKER 200MM,BW FOR WSIX LID | ||
| 0020-30286 | PLATE, PERF CONFORMAL SILANE NITRIDE 200MM | ||
| 0020-31205 | PLATE BLOCKER 4,5&6″ BWCVD 185 THK | ||
| 0020-39369 | PLATE, PERF OX 200MM TEOS, 18 HOLES | ||
| 0020-42284 | PLATE,BLOCKER 6″ EC WXZ | ||
| 0020-42286 | PLATE PERF 6 INCH EC WXZ | ||
| 0020-52785 | PLATE, BLOCKER, 144 SIDE HOLES, 200MM BYPASS | ||
| 0020-90213 | BLOCKER PLATE,SILANE 200MM | ||
| 0021-01571 | FACEPLATE, GIGA-FILL SACVD, USG CENT 26 | ||
| 0021-03489 | FACEPLATE, GIGA-FILL SACVD, USG NO CENT | ||
| 0021-07327 | PLATE, BLOCKER, N2 CARRIER, 200MM SACVD | ||
| 0021-09982 | PLATE, GAS DIST. HEWEB 150MM | ||
| 0021-13306 | BLOCKER TEOS 300TWIN | ||
| 0021-24013 | FACEPLATE HOT BD 200MM PRODUCER TSMC ONLY | ||
| 0021-27072 | FACEPLATE ADVANCED PATTERNING FILM 200MM PRODUCER | ||
| 0021-35087 | PLATE,BLOCKER,N2/HE CARRIER GAS,DXZ/UNIVERSAL CH | ||
| 0021-35744 | PLATE,BLOCKER,TXZ 200MM | ||
| 0021-39792 | PERF. PLATE OX. 200 MM TEOS., LC | ||
| 0021-41125 | GAS DISTRIBUTION PLATE, 133 HOLES | ||
| 0021-41126 | GAS DISTRIBUTION PLATE, 37 HOLES | ||
| 0040-47677 | Not avalible any more | FACEPLATE, SIN, XG, DXZ DCVD | |
| 0040-52451 | FACE PLATE, HP+ TXZ 200MM | ||
| 0041-12121 | FACEPLATE, SILANE, 300MM PRODUCER | ||
| 0041-12153 | FACEPLATE, 300MM SILANE, PRODUCER SE, FLOW TESTED | ||
| 0020-30058 | Blocker, perf, TEOS Oxide 8″ | ||
| 0040-52451 | Face Plate 8″ | ||
| 0200-00011 | Ring Quartz 4″ | ||
| 0200-00014 | Cover Quartz 4″ | ||
| 0200-00042 | Cover Quartz Poly 100mm | ||
| 0200-07492 | Deposition Ring Ceramic | ||
| 0010-60018 | Susceptor 6″ | ||
| 0200-01197 | Ceramic Lift Pin | ||
| 0200-03388 | Single Ring Ceramic 200mm Notch | ||
| 0200-00907 | |||
| 0200-35351 | Ceramic | Focus Ring 1″ Ceramic 145mm Semi Major Flat | |
| 0020-27114 | Isolator MOD DC Bias Dura TTN Shut | ||
| 0020-03715 | Pin Lift Heater DXZ | ||
| 0200-01473 | Pumping Ring | ||
| 0140-09174 | Cable | Cable Assy. | |
| 0200-09091 | Graphite | Graphite Ring 150mm Sputter Etch | |
| 0200-35287 | Ceramic AD 998 | Base Cathode Insulator DPS | |
| 0200-35326 | Ceramic | Ring Focus 1″ Ceramic 195mm Semi Notch No Flat | |
| 0200-09955 | Quartz | Window Front ALN 360THK | |
| 0021-00571 | Insert Chamber Exhaust EPI 200mm SST | ||
| 0200-06869 | DEP RING AL203 ADV TI ENDURA 2 300MM | ||
| 0020-27804 | Pedestal A101 HI-PWR POIS COH-TITIN | ||
| 0200-71856 | Ceramic | Cap Ceramic Suspending Diffuser EXT 15K | |
| 0200-10418 | Quartz | Quartz Pipe | |
| 0200-04454 | VHP Robot Blade | ||
| 0200-10173 | ALN Cover Plate | ||
| 0200-08301 | Deposition Ring | ||
| 0200-07118 | Endura HOT-AL Deposition Ring | ||
| 0200-06863 | Deposition Ring AL W/ESC Dual Anti Lift 300mm PVD | ||
| 0200-04633 | Bottom Ring Quartz Mech Polished 200mm EMAX VHF | ||
| 0020-30335 | Housing for Quartz Tube SACVD | ||
| 0200-36418 | Ceramic | Ceramic Cover Pumping Channel | |
| 0200-36416 | Ceramic | Pumping Ring Ceramic DXZ SACVD | |
| 0200-14030 | Purge Baffle 7700 | ||
| 0200-00354 | Ceramic | Purge Ring Ceramic WxZ | |
| 0020-20126 | Ceramic | Stand-Off Ceramic DC Bias | |
| 0020-03673 | Vespel | Clamp Ring Vespel 4″ Poly 3.0 | |
| 0200-09185 | Pin Wafer Lift 200mm BW | ||
| 0021-10395 | Vespel | 6″ Vespel Clamp Ring | |
| 0020-31708 | Vespel | 6″ Vespel Clamp Ring | |
| 0200-36691 | Ring Low Profile 150mm | ||
| 0200-02220 | Ceramic | Wafer 8″ AL203 Notch HDPCV | |
| 0040-21289 | Adapter 16″ Durasource | ||
| 0200-01990 | Quartz | Quartz Dome .50 Thk DPN Chamber | |
| 0041-28674 | Profiler Head Retaining Ring | ||
| 0200-10221 | Ceramic | Ring Clamp Ceramic 150/144mm 1SMF HEWEB | |
| 0190-18430 | Sapphire | Probe Mount Assy, Sapphire, WTM, HDP CVD | |
| 0020-23670 | Quartz | Quartz Finger | |
| 0140-77637 | Cable | C/A Digital I/O Head Pneumatic | |
| 0040-87766 | CVD Producer | Face Plate 300mm | |
| 0040-76820 | CVD Producer | Face Plate HARP 300mm | |
| 0040-44713 | CVD Producer | Bellows Loadlock 300mm | |
| 0020-64656 | CVD Producer | Blocker Plate 300mm | |
| 0040-80830 | CVD Producer | Bellows Finget Lift 300mm | |
| 0040-53688 | CVD Producer | Gas Box 300mm | |
| 0040-86768 | CVD Producer | Gas Box 300mm | |
| 0040-82246 | CVD-HDP Ultima | Gas Box 300mm | |
| 3320-01123 | CVD-HDP Ultima | Shield 300mm | |
| 0200-08449 | Insert Ring Silicon | ||
| 0040-85643 | PVD Endura | Actuator HT SWLL BLW | |
| 0021-19312 | PVD Endura | Face Plate & Blocker Plate (MOCVD) | |
| 0040-03157 | CVD-HDP Ultima | Assy SWLL Bellows Enhanced #7 | |
| 0010-22609 | PVD Endura | CH Slit Valve Actuator New Bellows ASSY 300mm | |
| 0010-22609 | PVD Endura | Slit Valve Actuator ASSY 300mm | |
| 0040-75296 | PVD Endura | Bellows Wafer Lift 300mm | |
| 0040-91678 | PVD Endura | Siconi Lift Bellows 300mm | |
| 0010-15418 | PVD Endura | 300mm B101 Heater | |
| 0010-27432 | PVD Endura | 300mm A101 Heater | |
| 0040-21402 | PVD Endura | Wafer Lift Bellows 300mm | |
| 0040-48318 | PVD Endura | RF Feedthru Housing 300mm | |
| 0190-23942 | Etch DPS2, EMAX CT+ | ESC OPUS 300mm | |
| 0190-25087 | Etch DPS2, EMAX CT+ | ESC / G3 300mm | |
| 0040-99867 | Etch DPS2, EMAX CT+ | DPS II Axtion Lift Bellows | |
| 0040-09193 | Etch DPS2, EMAX CT+ | DPS II Metal SLD Bellows | |
| 0040-76767 | Etch DPS2, EMAX CT+ | DPS II SLD Bellows | |
| 0041-03157 | Etch DPS2, EMAX CT+ | Loadlock Bellows | |
| 0040-39066 | Etch DPS2, EMAX CT+ | Bellows Assy Lift Pin W/Ball Bearings | |
| 0010-35105 | Etch DPS2, EMAX CT+ | Slit Valve Cylinder Assy | |
| 0040-08232 | Etch DPS2, EMAX CT+ | EMAX CT+Assy Bellows V/V Door | |
| 0021-27653 | Etch DPS2, EMAX CT+ | Gaskets / EMABLE E2 | |
| 0045-00239 | Etch DPS2, EMAX CT+ | Gaskets / EMABLE E5 | |
| 0150-38910 | PEEK | Heater Plug End Encasement Assy. | |
| 0200-09036 | Ceramic | Pin Wafer Lift 5″ | |
| 0200-09951 | Pad Wafer Lift Ring | ||
| 0150-97115 | Cable | Cable Assy VHP Motor | |
| 0200-03983 | Quartz | Top Plate 300mm APC | |
| 0200-05512 | Quartz | Gas Distribution Plate | |
| 0200-05511 | Quartz | Focus Ring AI HTR APC | |
| 0200-03979 | Quartz | Liner 300mm APC | |
| 0200-04366 | Quartz | Liner Bottom 300mm | |
| 0041-47677 | Face Plate SIN XG DXZ DCVD | ||
| 0200-36537 | Quartz | Quartz Disk | |
| 0021-14432 | Low K Face Plate | ||
| 0021-35788 | PTL Blocker 200mm | ||
| 0040-77085 | Lower Platen | ||
| 0200-35350 | Ceramic | Ring Capture145mm Semi-Maj Flat Ceramic | |
| 0200-35432 | Ceramic | Ring Single ESC 145mm Semi Flat Ceramic | |
| 0200-00159 | Cap Top Silicon (Passivation) | ||
| 0200-09740 | Quartz | Focus Ring Quartz 200mm Poly/WSI 220mm | |
| 0200-03012 | NOZZLE, CERAMIC, 2.55L, 100%FLOW | ||
| 0070-20146 | Bellows Wafer Orienter | ||
| 0200-35357 | Ceramic | Ring Capture Ceramic 145mm | |
| 0200-35008 | Window Center Finder | ||
| 0200-09049 | Ceramic | Ceramic Screw | |
| HQT35525-MOD | Ceramic | Ceramic Near Net Shape | |
| 0140-00481 | Harness | HARNESS ASSEMBLY, CNTRL, CNTR, DXZ, FLUORINE | |
| 0140-06248 | Harness | HARNESS ASSEMBLY, CENTURA DXZ, RPS/DPA/E | |
| 0020-31626 | Ultem Plastic | Ultem Ring | |
| 0150-01690 | Cable | Cable Assy 40 Ft. Gas Interlock ABCD | |
| 0200-04305 | Nozzle | ||
| 0150-76739 | Cable | C/A 15 Cond. Umbilical 60 Ft. EMC Com | |
| 0010-20328 | Magnet | A Type Magnet | |
| 0010-21844 | Magnet | Assembly Source Magnet AME Endura TTN | |
| 0040-36300 | Bellows | WELDMENT, BELLOWS ASSY, LOWER, GIGA-FILL | |
| 3350-01007 | Quartz | Disk Quartz Gnd & Polish 1-3/4″ D x 1/4″ Thk | |
| 0200-01967 | Ceramic | Injector Gas 300mm EMAX Blank-off Ceramic | |
| 0200-04619 | Single Ring Quartz .09 Height .12 Recessed DPSII | ||
| 0010-10982 | ESC | MXP Oxide Chamber | ESC (2nd Source New) |
| 0010-10982 | ESC | MXP Oxide Chamber | ESC (OPM Brand New) |
| 0010-10612 | MXP Oxide Chamber | Lid Assy (Second Source New) | |
| 0020-34695 | MXP Oxide Chamber | Cathode Liner (Second Source New) | |
| 0020-34684 | MXP Oxide Chamber | Wafer Lift | |
| 0020-31658 | Vespel | Clamp Ring Vespel 200mm | |
| 0020-32005 | Vespel | Clamp Ring Vespel 150mm | |
| 0200-36687 | Ceramic | Ring Single Low Profile 150mm SMF Ceramic DPS | |
| 0040-18158 | AL6061 | CVD/ULTIMA | Gas Ring (18) |
| 0040-70319 | AL6061 | CVD/PRODUCER | Face Plate (Harp) |
| 0020-62362 | AL6061 | CVD/PRODUCER | FACE PLATE (ACL) |
| 0010-02616 | AL6061 | CVD/ULTIMA | Gas Ring (24) |
| 0021-25875 | AL6061 | CVD/PRODUCER | Blocker Plate |
| 0040-02520 | AL6061 | CVD/PRODUCER | Water Box |
| 0040-80969 | AL6061 | CVD/PRODUCER | Water Box |
| 0040-70746 | AL6061 | CVD/ULTIMA | Gas Ring (36) |
| 0040-72756 | AL6061 | CVD/ULTIMA | Gas Block |
| 0040-78841 | AL6061 | CVD/PRODUCER | Gas Box |
| 0040-79071 | AL6061 | CVD/PRODUCER | Gas Box |
| 0040-54098 | AL6061 | CVD/PRODUCER | Manifold |
