Description
Veeco-Miller Design FPP-5000 with optional external 4 pt probe for large substrates
- Easy to operate, simply load the wafer and close the lid.
- Automatic calculation and display of sheet or slice resistivity, V/I metallization thickness and P-N type.
- Substrates up to 6″ diameter. Larger substrates may be measured with optional external probe.
- Ideal for epitaxial, diffused, ion implanted and metallized layers.
- Automatic ranging
- Four selectable displays
- Sheet Resistivity
- V/I
- Bulk resistivity of a slice with a known thickness
- Thickness in, A, MILS, or microns of a slice or layer with a known bulk resistivity ·
- RETEST button allows additional measurements without disturbing the probes ·
- Automatically holds the last reading after the probe is released and until the next measurement is made
- Error code displays indicate improper operation, readings and electronics
- Extended measurement range displays sheet resistivity up to 450k ohm/sq and down to a resolution of .001 milliohm/SQ
- High accuracy of 0.5% of reading on all reading between 5 milliohm to 5 k ohm
- Self test circuitry built in to determine if a fault is present
- Self calibration and zero circuitry assures high accuracy in all but extreme ranges
- Index substrate holder allows repeatable probe positioning on the substrate
- Probe up permits repeatable measurements independent of operator force and substrate thickness
- Plug in probe head adaptors make probe head changing convenient and non critical
- Typing mode determines N and P typing for most semiconductor substrates or layers
- input power of 115/230 VAC +/- 10%, 50/60 Hz
Please contact us if you are interested in the item. This item is only for end users and are subject to sale without notice. Appreciate your time.
SS7270
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