GEN II MBE SYSTEM REACTOR

Description

GEN II MBE SYSTEM REACTOR

  • 2″ WAFER
  • USED FOR InAlGaAs MATERIALS
  • EFFUSION CELLS (In, IN2, Ga, al, Sb)
  • AS VALVED CRACKER
  • LOAD, LOCK, AND GROWTH SUBSTRATE HEATERS
  • OPERATIONAL RHEED AND QMS
  • TURBO AND DIAPHRAM PUMPS
  • SORPTION PUMPS
  • 2 ION PUMPS & COMPRESSOR
  • Ti BALL PUMP
  • BAKE OUT PANELS

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