used semiconductor equipment Vacuum Valves Chambers Systems

Description

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Location: U.S.A.

Applied Materials HDP Chamber,Was used for 200mm substrates. No turbo pump or other accessories.
Balzers BVB 100 PX,Throttle Valve. Air operated. 100 mm conflat. 100 mm KF.
Edwards QSB160P,Quarter Swing Butterfly Vacuum Valve. Compact, quick acting, high conductance isolation valve. Polished stainless steel body. 7 in. OD ISO flange. 8 Available.
Edwards PV16PKA-B,KF16 Right Angle Valve. 24V. Never used, many available.
Edwards 1850,14.5 in. O.D. ISO Flange Throttle Valve. High speed motor delivers valve close to open in 0.3 secs. Highly corrosion resistant 316 stainless steel. Shutter type.
Hastings MD6,All Metal Right Angle Leak Valve. 2.75 in. OD conflat.
HPS Valve,1-7/8 in. ID, 3-3/8 in. OD conflat flange. Air actuated.
HPS Valve,120V, Air. KF50.
HPS Valve,Air driven. KF50.
HPS Valve,Right angle vacuum valve. KF 40.
HPS Manual Valve,Manual Vacuum Valve. Manual operation right angle valve. KF16 flange.
HPS Valve,KF 40 Right Angle Vacuum Valve. KF40 vacuum flanges. 2 Available.
HPS Valve,KF40 Vacuum Valve. 4 Available.
HPS Valve,Right Angle Vacuum Valve. 3-3/4 in. ISO flange. 2 Available.
Huntington A00-1554-REV-E, butterfly Valve. Pneumatic actuation with 24VDC solenoid. 24 holes. 9-1/8 in. bolt circle. 7-15/16 in.
HVA 21250-003062-001, Gate Valve. Air operated. 3 in. ID ISO flange.
HVA 21210-0306Z-002,3 in. Gate Valve. 3 in. ISO clamp style flange. Air operated. Stainless construction.
HVA 11212-9801R,Stainless Steel Gate Valve. MRC 900 Series system compatible. 8 in. ID, 11 in. OD.
HVA 11212-1009RB-00,gh Vacuum Gate Valve. Pneumatic operation. KF vacuum roughing port in back. 16 in. O.D. ASA flange. Stainless steel.
HVA 11212-1009RB-001,High Vacuum Stainless Steel Gate Valve. 10 in. ID flange. Roughing port. Dual O-Ring
HVA 11212-1009RS-001,High Vacuum Stainless Steel Gate Valve. 10 in. ID flange. Roughing port. Dual O-Ring.
HVA 14214-0150X,Right Angle Vacuum Valve. Air actuated. 2-3/4 in. OD conflat flange.
HVA 124-0600,Manual Conflat Gate Valve. 6 in. ID, 8 in. OD conflat flange. Manual open and close.
HVA Gate Valve,8-inch Conflat Flange Gate Valve.
HVA 11120-0400,Manual 6 in. OD Conflat Gate Valve. 4 Available.
Innotec Group SVB-22A-NW50,Gate Valve. Pneumatic actuation. KF 50 flange.
Kurt J. Lesker SL0150MVCF,Manual Vacuum Valve. 2-3/4 in. OD conflat flange.
Kurt J. Lesker Vacuum Chamber,Vacuum Chamber. Was used as a sputtering chamber on a cluster type deposition system. Originally a single target sputter up unit. Overall Outside Chamber Dimensions: 45 in. L x 24 in. W x 9 in. H. Not including flanges. System Height: 61 in.
Leybold IPC-2,Pressure Converter Valve. Three position valve extends sampling pressure range. 2-3/4 in. O.D. conflat.
Leybold L560,Empty Vacuum Chamber. Stainless steel vacuum chamber. 8 in. ASA flange on back for vacuum pump. Many vacuum feedthrough holes in base. U-shaped box deepest point 21-3/4 in. front to back. 21-1/2 in. W x 22-3/4 in. H. Viewport in door. Substrate rotation motor and feedthrough. Not tested, everything sold As Is.
Leybold Empty Vacuum Chamber,Empty Vacuum Chamber. Stainless steel vacuum chamber. Many feedthrough holes in base plate. U-Shaped box. Deepest point: 21-3/4 in. front to back. 21-1/2 in. W x 22-3/4 in. H. Viewport in door. Not tested, sold As Is.
Leybold 297 23 B2,Right Angle Vacuum Valve. Pneumatic actuation. KF40 flanges.
MDC GV-8000M-P-01-05,Pneumatic Gate Valve. 10 in. OD conflat flange. Stainless steel construction. 120V, 50/60 Hz.
Millipore MDV-160B,Throttle Valve. 6 in. I.D. ISO flange. Valve only, no cable.
Millipore MDVX160B05,Throttle Valve. Valve only. No cables or controllers. 6 in. ISO flange. CE.
Miscellaneous Vacuum Chamber,Inline Sputter System Chambers. Stainless steel construction. 24 in. L x 6-1/2 in. H opening at both ends. Some units have 20 in. x 1 in. slits for openings. Overall Size: 99 in. L x 36 in. W (at frame) x 47 in. H.
Miscellaneous Right Angle Valve,-3/4 in. OD conflat flange. Air actuated.
Miscellaneous Throttle Valve,From Applied Materials 8300 etcher. 9 in. OD, 6-1/4 in. ID, 8 in. bolt circle. Second Flange: 11 in. OD, 6 in. ID, 9-1/2 in. bolt circle.
Miscellaneous Isolation Gate Valve,Opening Size: 19 in. x 7 in. Previously used on Applied Materials 8300 etchers.
Miscellaneous Vacuum Chamber,Stainless Steel In-Line Sputtering Chamber with Single Magnetron Cathode. This is a single chamber from a large In-Line sputtering system. Chamber Length: 72 in. Opening Size: 34 in. L x 8-3/4 in. H. Single cathode mounted in sputter down configuration. Planar magnetron with target size 29-1/2 in. x 4-7/8 in. 14-1/2 in. OD ISO flange under chamber.
Miscellaneous Vacuum Chamber,Stainless Steel In-Line Sputtering Chamber with Single Magnetron Cathode. Single chamber from a larger In-Line sputtering system. Chamber Length: 72 in. Opening Size: 34 in. L x 8-3/4 in. H. Single cathode mounted in sputter down configuration. Planar magnetron with target size 29-1/2 in. x 4-7/8 in. 14-1/2 in. OD ISO flange under chamber.
Miscellaneous Vacuum Chamber,Stainless Steel In-Line Vacuum Chamber. This is a single chamber from a larger In-Line sputtering system. Chamber Length: 72 in. Opening Size: 34 in. L x 8-3/4 in. H. 14-1/2 in. OD ISO flange on chamber bottom. Vacuum chamber not tested.
Miscellaneous Throttle Valve,11 in. OD, 8 in. ID. 100-115V, 50/60 Hz. Valve only, no controller.
Miscellaneous Gate Valve,Pneumatic actuation. 11 in. OD, 8 in. ID. ASA flange. Stainless steel.
MKS 162-0063P,air Operated Valve. 3-3/4 in. OD ISO flange. 3 Available.
MKS 253A-3-2-2/152,Precision Vacuum Exhaust Control System. Used to control pumping speed. Butterfly flapper can be opened or closed in response to a signal from pressure transducer on the chamber. No transducer included. 3-inch ID. 115V/230V.
MKS 253A-3-2-2,Exhaust Throttle Valve. Non-linear actuator placed between the flapper shaft and the motor drive shaft in order to generate a linear valve transfer characteristic and provide smooth linear pressure control. Inner Diameter: 75mm/3 in. 3 Available.
Norcal 3870-01160,Ion Tube Isolation Valve. KF-25 flange.
Norcal 3870-01162,Valve. Air operated. KF-50.
Norcal 3870-01161,Valve. KF25.
Norcal Valve,Right angle vacuum valve. 2-3/4 in. OD conflat flange.
Norcal ESVP-1502-NWB-A,Right Angle Vacuum Valve. Pneumatic actuation. KF40 flange.
Norcal ESV-1002-NWB,Manual Right Angle Vacuum Valve. KF 25 flanges.
Sierra Technology Group Poppet Valve,Right angle vacuum valve with 8 in. ASA flanges. Air driven with 24VDC. 3 Available.
SMC XGT512-70508-X693,High Vacuum Slit Valve. Suitable for the partition valve between the load lock chamber and the transfer chamber or between the transfer chamber and process chamber in semiconductor equipment and other equipment. Cassette type. Veeco P/N: 1201184. MSRP is $35,000. New in crate. 3 Available.
Swagelok SS-65TS16,Stainless Manual Ball Valve. End connection 1 in.
Sweco PRESSURE VESSEL,Jacketed Stainless Vessel. Vessel is stainless but flanges are not. 300 psi, 300 degrees fahrenheit. Jacket: 90 psi. Tank Size: 18 in. OD x 24 in. Lightnin XJADS-100 mixer.
Tylan General MDVX-160BS05,Motor Driven Throttle Valve. No Controller. ISO-160 flange. 8-7/8 in. O.D.,6 in. I.D. 8 holes 7-7/8 in. on center
Ulvac Vacuum Chamber,Vacuum Chamber. Previously used to manufacture OLED devices. Chamber has two slotted openings on the sides where product was transferred in and out of glove box. Inside Dimensions: 19.75 in. x 21.5 in. D x 35.5 in. H. Stainless construction. Large full length front door.
Ulvac Vacuum Chamber,Vacuum Chamber. Previously used to manufacture OLED devices. Chamber has two slotted openings on the sides where product was transferred in and out of glove box. Inside Dimensions: 19.75 in. x 21.5 in. D x 35.5 in. H. Stainless construction. Large full length front door
Vacuum Research Gate Valve,Electro Pneumatic Operation. 6 Holes with a 5.25 in. Bolt Circle, O.D.: 7.25 in., I.D.: 4 in.
Vacuum Research Gate Valve,Gate Valve. Air operated. Flange: 6 in. OD, 3-1/4 in. ID. 1 in. ion tube fitting.
Varian 951-5090,Valve. Air operated. 2-3/4 in. OD conflat.
VAT Gate Valve,Stainless Steel MONVAT Series 02. Transfer valve for process systems. Double acting, pneumatic actuator. Air operated. ID: 8-1/4 in. x 2 in. Sealed bellows, solenoid, Viton. Pressure Range: 1.10^-9 mbar to 1.2 bar.
VAT Rectangular Gate Valve,10 in. x 1 in. opening. 11 in. x 2-1/8 in. O-Ring. Air actuated.
VAT Gate Valve,Opening: 9-1/4 x 1-3/4 in. Flange-ISO Clamp: 13-3/8 in. x 5-3/4 in. x 1-15/16 in. CE.
VAT 6 in. ISO Gate Valve,Air operated. 6 in. ISO flange.
VAT GATE VALVE,7-3/4 in. ID conflat flange. Stainless steel construction. 110V, 60 Hz.
VAT Gate Valve,Large stainless steel gate valve. 14 in. OD conflat flange. CE marking. Rebuilt by Manufacturer.
VAT Gate Valve,11-1/4 in. OD conflat flange. 24 VDC.
VAT Series S022/032,Rectangular Gate Valve Monovat. Direct DN special. Flange side a DN, Side B larger than A. Sizes >56mm opening. Valve Type: A, B. Insert C. 4 Available.Four units available with the following part numbers: 1. Inv. No. 60890 P/N 0220X-BA24-CCY1/0017. 2. Inv. No. 60891 P/N 0220X-BE24-CDE2.3. Inv. No. 60892 P/N 0220X-BE24-CDE2.
VAT Gate Valve,.5 in. OD conflat flange. Manual operation.
VAT Valve,Vacuum Gate Valve. 3-3/4 in. OD ISO flange. 4 Available.
VAT Gate Valve,Manual Gate Valve. Stainless steel construction. 8 in. OD conflat flange. Manual open and close.
VAT Gate Valve,Manual Gate Valve. Outside Diameter: 6 in. Conflat flange. Stainless steel construction. Manual open and close.
VAT Gate Valve,8-inch ID ASA Flange Gate Valve.