Description
Ulvac XeF2 release etch cluster tool FRE-200E
ULVAC – XeF2 Etch Release FRE-200E
Manufacturer: ULVAC
Model: FRE-200E
Equipment Details: RF Power supply.
Voltage: 208V Frequency: 60Hz
Phase, Wire: 3Phase, 3Wire+ G Line
Full Load Current: 142A
Max Load(unit): 15.5A
Over current protective: 250A
Short Circuit Current Rating: 5Ka
Valid Time: Subject to prior sale without notice.
SS112540573862
