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Ulvac Qulee BGM-102L Residual Gas Analyzer

Ulvac Qulee BGM-102L Residual Gas Analyzer , Semiconductor Equipment

Category: Equipment Parts

Description

Description

Ulvac Qulee BGM-102L Residual Gas Analyzer with Pfeiffer dry pumping system 0-100amu EM tube/Faraday cup

Features

Excellent in Cost Performance: Suitable for RGA application
Integrated Display: No need for PC
Simple Operation: “One Click” function
Max 120°C (248°F) high temperature bake (250°C (482°F) when sensors are removed)
Electron bombard degas
Ion source and secondary electron multiplier protection maintenance help function
Traceability of analysis tube (patent pending)
Various Leak Tests are Available (Helium leak test, air leak test, leak up)
Capable of total pressure measurement (ionization gauge)
Qulee QCS is Included:
This software is included and compatible with (Windows XP/7)
QIP (Quick Install Package system) is Included:
Auto measuring package (refer to the options catalog for details)
Conforms with CE

Applications

Residual gas monitoring for PV, FPD, and semiconductor manufacturing system
Residual gas analysis in PVD system and vacuum deposition
Residual gas analysis for high vacuum pumping equipment, etc.
Residual gas analysis for freeze drying system
Various types of gas analysis for research and development

Please contact us if you are interested in the item. This item is only for end users and are subject to sale without notice. Appreciate your time.

SS7270

All used equipment /parts trademarks belongs to the original equipment manufacturer. All rights reserved.

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