Description
Ultratech 1100 Widefield Cost Effective Sub-Micron Workhorse Projection Stepper System
Condition: Used. Refurbished.
Quantity: 3 sets (OEM-1-2-1-4/5/6)+ 5 sets (OEM-2)
The UltraStep 1100 Wide Field 1:1 Projection Stepper System exposes reticle images in a stepand-repeat manner onto 3″, 4″, 5″, and 6″ wafers with fine line resolution ( 1.0um standard, 0.8um optional) and tight overlay accuracy.
The low cost and compact design of the UltraStep 1100 make it an ideal choice for chipmakers upgrading from older equipment to the more advanced UltraStep 1100.
The UltraStep 1100 can be integrated in a mix-and-match scenario with other, higher resolution steppers, maximizing throughput while minimizing production costs.
The Intelligent Autoloader included with this system allows the user to program custom belt speeds and sensor tolerances. The integrated Status Light System alerts the user when the cassette is finished processing.
The system is equipped with the HP 362 computer system. The internal 500MB hard disk can store up to 20,000 recipe files.
SPECIFICATIONS:
- Wafer Size: 3”, 4”, 5”, 6”
Loader Type: Intelligent or Automation
Computer: HP 362 with Hard Disk
Uniformity: 3.0 %
Depth of Focus: 3.0 ums @ 1.0um lines
Maximum Square: 14.1 x 14.1 mm
Maximum Aspect: 30 x 9.5 mm
Maximum Area: 27.5 x 10.6 mm
Reticle Size: 3” x 5” x 0.090”
Valid time: Subject to prior sale without notice. This is only for end user. Appreciate your time.
Contact us (sales@semistarcorp.com) for more info pls. Appreciate your time.
ID-OEM-1-2-1-4/5/6 SS10634
