Description
Typical NANOTECHNOLOGY Lab Fab Equipment
Please contact us for our Main Refurbished Equipment. Appreciate your time.
The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.
Voyager EBL System including “traxx” (FBMS) and “periodixx” (MBMS)
MLA 150 Advanced MaskLess Aligner
Maskless Lithography tool, “SmartPrint”
Karl Süss Contact Mask Aligner, MJB3
Helios 5 Dual beam system (SEM/FIB)
FEI Nova 200 Dual beam system (SEM/FIB)EDX detector for element analysis
AFM Bruker ICON
AFM Bruker FastScan
AFM JPK Nanowizard 3 Bioscience
AFM JPK Nanowizard 3 Ultraspeed
AFM/SPM Bruker (Veeco) Multimode
Nikon ME600 Optical microscope, DIC, DF, 3 Mpix camera
Nikon ME600 Optical Microscope, DIC, DF, 5 Mpix camera
Nikon Eclipse L200, Optical microscope, wafer inspection
Nikon ME600 Fluorescence microscope, cooled 2 Mpix CCD camera
Stereo Microscope
AccuThermo AW610M Rapid Thermal Processing Equipment
AccuThermo AW820M Rapid Thermal Processing Equipment
AccuSputter AW4450 Sputtering Deposition Equipment
AW-105R Plasma Asher Plasma Descum
AW-B3000 Plasma Asher Plasma Descum
AW-901eR Plasma Etcher
AW-903eR Plasma Etcher
AWgage-150 Thin Film Metrology, 6 inch
RIE Oxford Plasmalab 80+, Ar, O2
RIE Oxford PlasmaPro 100 Cobra 300 ICP,Process gases: O2, Ar, CF4, CHF3, SF6, C4F8, N2
RIBE Oxford
RIE Oxford Plasmalab 100, cryo,CF4, CHF3, SF6, Cl2, Ar, O2,He-backside cooling.
AJA Orion, Multi target Sputtering System
AJA ATC 2200, Multi target Sputtering System
AJA3 Multi target Sputtering System
Thermionics UHV E-gun deposition, “Eurovac”
Edwards Auto 306 HV E-gun deposition, Thermal deposition
AGAR SEM Carbon coater
Moorfield vacuum annealer
Paroteq Flip-Chip Bonder
EMS 4000 Spin Coater
EMS 6000 Spin Coater (in yellow lab)
Schaefer Tec SCE-15 Spin Coater
Diamond scriber OEG MR200
EMS Hotplate
VWR Hotplate
Millipore MilliQ Reference Clean Water system
Memmert UNE 200 Programmable Oven
Memmert UP400 Programmable Oven
Salvis Lab Evacuated Oven
VWR Ultrasonic Cleaner, Vari-Power
Kulicke & Sofa Digital Wedge Wire Bonder
Laminar flow clean air benches
Miele G7804 Laboratory Dishwasher
Critical Point Dryer
PPMS Quantum Design
KLA Tencor P-7 Profilometer
AFM Bruker ICON
AFM Bruker FastScan
AFM JPK Nanowizard 3 Bioscience
AFM JPK Nanowizard 3 Ultraspeed
AFM/SPM Bruker (Veeco) Multimode currently outside of Nanolab
Preliminary height calibrations
AFM Bruker ICON
AFM Bruker FastScan
AFM JPK Nanowizard 3 Bioscience
AFM JPK Nanowizard 3 Ultraspeed
Instruction videos
Preliminary height calibrations
AFM/SPM Bruker (Veeco) Multimode
TES FC-1800
Temescal FC-1800
CHA Mark 50
CHA Evaporator
Temescal BJD-1800
Varian 3120 E-Beam
Airco FC-1800
Temescal FC-1800
Thermal Evaporation
E-Beam Evaporation Sharon
E-Beam Evaporation Temescal
E-Beam Evaporation CHA
E-Beam Evaporation Plasys
Thermal Evaporation
Thermal Evaporation Solder
Sputter Deposition
Perkin-Elmer 4400
Perkin-Elmer 4450
Perkin-Elmer 2400
MRC 603 693 TES
Temescal BJD-1800
CPA S-Gun -Sputter
MRC 643 -Sputter
MRC 603 Sputter
MRC 8671 Sputtering
Emscope SC-650
SAVANNAH S200-ALD
PlasmaLab 80 Plus
Plasmalab 80+ DPCVD
PlasmaTherm 790
PlasmaTherm 720
PlasmaTherm 700
STS PECVD
PECVD PlasmaTherm 790
Tegal 901e
Tegal 903e
Lam AutoEtch 490
Lam AutoEtch 590
Matrix 303
Matrix 403
PlasmaTherm 790 RIE
PlasmaTherm 720
Oxford 133 RIE
OXFORD 100 RIE
SAMCO RIE 10 NR
STS ICP Multiplex
STS ICP Bosch Process
STS ICP HRM
Lam Rainbow 4420
PlasmaTherm 700
Branson/IPC 3000
Branson/IPC L3200
Gasonics L3510
Gasonics Aura 3010
Gasonics Aura 1000
Gasonics Aura 3000
Gasonics Aura 2000
Matrix 105
Matrix 205
Matrix 209S
March PX-250
AST Barrel Asher
PlasmaEtch PE-100
Plasma Etch BT1
Technics 2000
Technics PE-IIA
Heatpulse 8108
Heatpulse 4100
Heatpulse 4100S
Heatpulse 610
Heatpulse 8800
Heatpulse 4108
Heatpulse 610I
Heatpulse 410
Heatpulse 310
Heatpulse 210
MPT RTP-3000
JETFIRST 100 -RTP
JETFIRST 150 -RTP
Jipelec Jetfirst 200
JETFIRST 200 RTP
AnnealSys AS-One
Tencor Mgage-300
Tencor Mgage-200
Tencor Sonogage 200
KLA Tencor P-7
KLA Tencor P6
ResMap 178
Sloan Dektak II
Microscope AFX-II
Gaertner L117
Electroglas EG 4090u+
Electroglas EG 4090X
Electroglas EG 2001
Electroglas EG 1034
Cascade PS-21
HITACHI S-4700
F.E.I.Quanta 200
HEWLETT PACKARD,Agilent HP 4062UX
SS6743-20240524
