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Mini-Lab/Fab equipment

Category: LIST

Description

Description

Turn Key Lab/Fab equipment. Please contact us for the equipment availability. Appreciate your time.

Thin Film Deposition

Perkin-Elmer 4400 Sputter
Perkin-Elmer 4450 Sputter
MRC 8671 MRC 8671 MRC 8″ Sputtering System
Varian 3118 E-beam Evaporator And Thermal Evaporator System
Airco Temescal FC-1800 E-Beam Evaporator
AMAT AMP-3300 PECVD
Plasma Therm 700 Series Wafer Batch Plasma Etcher PECVD Deposition
Varian 3120 EB Evaporator
CVC AST-601 Sputter
Temescal FC-1800
Temescal FC-1800
Temescal FC-1800
Temescal FC-1800 -TES
Temescal BJD-1800 -TES Sputter
MRC 603 Sputter
MRC 643 Sputter
MRC 603 Sputter
MRC 603 MRC 693 TES
Kurt J Lesker Dual Thermo Evaporator
Plasmalab CVD-2

Dry Etching

Plasma-Therm 720 RIE
Oxford 133 RIE
Tegal 903e Etcher/RIE
STS ICP
STS DRIE
Branson/IPC 3000 Asher
Gasonics 9102 Asher

Lithography

Canon PLA-501
Canon PLA-501
Canon PLA-501
Neutronix PLA-545
Karl Suss MA 200 Mask Aligner
BOLD Technologies INC Batch Develop Station
Solitec Model 820-ACB Automatic Coat Bake System With Aotocoat Dispense
Track Coater And Bake SVG-8136 HPO SVG Spin Track

Thermal Processing

AG Associates Heatpulse 610
AG Associates Heatpulse 610
AG Associates Heatpulse 310
AG Associates Heatpulse 210
AG Associates Heatpulse 610i
MTI OTF-1200X Open Tube Furnace
VWR 1410 VWR Scientific Vacuum Oven
Oven Technology Inc Oven Technology 4400
VWR Scientific 1370 F Oven
Blue M OV-472A-2 38C-260C (4 sets)
Associated Vacuum Technology Lab-Line 3625 With LAB-LINE SQUAROID Duo-VAC Oven

Inspection and Metrology

Rudolph Research AutoEL Automatic Ellipsometer Laser Model 2,4C
Nanometrics NanoSpec/AFT 210 Film Thickness Measurement
EG 1034 Probe
HP 4062UX Tester
Hewlett Packard 4061A
Hewlett Packard
EG 2001 Probe
Lucas/Signatone Corp. Quad Pro Four-Point Probes
Nanoline CD Measurement
Olympus MX50A-F With Nikon DN 100, Digital Net Camera
Tencor M-Gage 200

Wet Chemistry

Gold Techni TG25T Bath Rhodium 225 Bath
Coppy MHY Bath 24 Liter,2 Bathes, Coppy MHY Plating Solution
Wet Process Equipment 3X
Semitool SD250 Spin Dryer
STI Semitool Spin Rinse Dryer ST-260
Technic Inc. Portable Wet Bench

Back End and Post Processing

Kulicke & Soffa K&S 8028 Auto Gold Ball Bonder
Kulicke & Soffa K(&S) Triton RDA Auto Wedge Bonder
Dynatex International DX-III Scriber Breaker
WEST-BOND 7400IW BONDER or equivalent

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Recommended Hot Equipment

Metrology | Tester | Wafer Carriers
Main Refurbished Equipment

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