Description
Temescal FC-1800 Fast Cycle Coater
Condition: Refurbished with the following specifications.
Location: Morgan Hill,CA USA95037
Description
The Temescal Model FC-1800 E-Beam Evaporator is designed for thin metal film deposition for production and R&D applications. The main components of the system include a stainless steel high vacuum chamber with substrate holder designed to hold substrates, a pumping system consisting of a mechanical pump, a Cryo pump and automated interlocks. This unit has an up to six-pocket crucible system for deposition of multiple films without the need to open the chamber.
The process control for FC-1800 system is fully automated to run pre-programmed steps.
Features:
- Load locked source tray for fast cycle time
- Fully automatic valve sequencing
- Inficon IC6000 Deposition controller
- Temescal CV8 E-beam Gun Power Supply with X-Y sweep
- Six pocket electron beam gun with motorized pocket indexer TRC3460
- CTI-8 Cryo pump and compressor
- Granville-Philips GP303 Vacuum Gauge Controller
Specifications:
- 20″ x 11″ diameter chamber size bell jar
- Cycle time: 10 to 15 minutes for 1u of aluminum
- Coating uniformity: +/- 7% with high speed planetary substrate fixtures
- Source chamber: 18″ diameter (457mm)
- Source tray: 19″ diameter
- Pumpdown Time for Load Lock: Less than 2 minutes
- Typical Operating Vacuum: Mid 10-6 to mid 10-7 torr range with standard pumping system
- Ultimate Operating Vacuum: 10-8 torr with standard pumping system
- Water System: SST manifold with four available circuits/Flow meter, flow switch and all necessary interconnects provided
- Air System: Pressure regulator, meter and all necessary interconnects provided
- Installation Requirements:
- Water: Filterd 1.25 gpm at 50 psig inlet pressure at 60° to 80°F (4.73 l/m, 3.51 kg/cm2, 16° to 27°C)
- CDA: 5 cfm at 60 to 125 psig inlet pressure, filtered and dried (2360 cc/sec, 4.22 to 8.75 kg/cm2)
- Power: 208V, 3 Phases, 70A, 50/60Hz, 5-wire with active neutral and equipment ground, Tolerable voltage ±5%
- Ambient Temperature: 80°±10°F (26.8°±5°C)
- Humidity: 50% maximum
- Instrument weight: ~1800-lb (818kg)
IC6000 Specification
- Thickness Display Range
- Thickness Display Resolution (three automatic ranges)
- Rate Display Range
- Rate Display resolution
- Accuracy (Thickness and Rate Display)
- Rate Control Range
- Measurement and Control Loop Update Period
- Programmable Functions (6 film programs; 37 parameters)
- Density
- Z-Ratio
- Tooling
- Ramp Times (4 setpoints)
- Soak Times (2 setpoints)
- Soak Power (2 setpoints)
- Sensor
- Source
- Gain
- Approach
- Limiter
- Rate
- Shutter Delay
- Thickness Limit (2 setpoints)
- Feed Power
- Feed Time
- Idle Power
- Max Power
- Crystal Switch ( 2 parameters)
- Time Limit
- PreSoak Enable
- Rate Ramps
- Plot Dwell
- Rear Panel Plug-In Modules
Please contact us for the availability of the following used semiconductor equipment and parts.
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The items are subject to prior sale without notice. These items are only for end users.
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103 | Temescal BOC Coating Technology Filament Module Cables 6024-6113-0 NOS CV-XS |
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105 | Temescal BOC Coating Technology High Voltage Output Cable 6024-6112-0 NOS HV |
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107 | Temescal BOC Coating Technology High Voltage Output Cable 6024-6116-0 NOS HV |
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[Pls use “CTRL+F “key button to search the model/key word you are interested in]
The items are subject to prior sale without notice. These items are only for end users.
LOT 114+SSEB380