Description
Model: Tegal 903e plasma dry etch semiconductor process equipment
Photos: Download Here
Category: Plasma Etch
Original Equipment Manufacturer: Tegal Corp.
Condition: Complete, working condition. The system was de-installed from a Fab in USA in July, 2016.
Wafer Size: 6 inch configuration.
Vintage: 2000
Gas Lines: 4
Monitor: Upgraded LCD monitor
UPC: Yes
Valid Time: Subject to prior sale without notice
Lead Time: Ready to go
Location: Silicon Valley, CA, U.S.A.
Warranty and refund: N/A
Tegal 903e plasma dry etch description for reference
The Tegal 903e plasma dry etch semiconductor equipment were made by Tegal Corporation and represents the Industry Standard in single-wafer Dry Etch of Polysilicon, Nitride, Silicon Oxide and the mainstay of the highly successful plasma etch system.
The Tegal 903e plasma dry etch semiconductor equipment are used by the semiconductor industry for integrated circuit fabrication. The Tegal 903e plasma etcher plasma etch semiconductor equipment are used in one part of the sequence of manufacturing steps that transfer a pattern formed from a layer of photosensitive material, the photoresist, to a layer that makes up a permanent part of the finished device.
Wafers in the Tegal 903e plasma dry etch semiconductor equipment are transported to a Reaction Chamber. A gas mixture is introduced into the Reaction Chamber, and the gas mixture is caused to become reactive by the application of radio frequency (RF) electromagnetic radiation. The reactive mixture, or plasma, etches away material that is not covered by the masking photoresist. The etch process is terminated at an appropriate time, the wafer is unloaded from the Reaction Chamber, and a new wafer is introduced. The cycle repeats.
The Tegal 903e plasma dry etch semiconductor equipment Plasma/RlE etchers have been configured to take advantage of the characteristics of plasmas for etching various films. Each of the models in the 90Xe family have been optimized for specific etches of specific films. All models have the common ability to implement multi-step etch recipes using multiple process gases. An optical monitoring system provides a means for determining etch completion so that the etch process may be terminated.
(Check Tegal Spare Parts in stock)
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261 | Tegal 99-200-005 PCB, SIS-5, Sensor Interface, 98-200-002 |
262 | Tegal 99-200-005 Sensor Interface PCB SIS-5 |
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265 | TEGAL 99-203-004 PCB MNP-4 MTCH NTWK |
266 | Tegal 99-203-004 Rev G MNP-4 Control Board |
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268 | Tegal 99-207-004 MBE-4 Mem And Baud PCB Lagacy Semi Repaired 99-207-004RW |
269 | Tegal 99-207-004 MBE-4 Wafer Main Controller CD1043 Module PCB Daughter Board |
270 | Tegal 99-207-004 PCB |
271 | Tegal 99-207-004/K MBE-4 PCB |
272 | Tegal 99-209-002 Industrial AC/DC Power Monitor PCB Circuit Board Assembly |
273 | Tegal 99-209-003 Pcb Circuit Board Rev D |
274 | TEGAL 99-214-003 / G AME-3 |
275 | TEGAL 99-214-003RW Rev. A RWK-PCB ANE-3 AUTOTUNE 3 |
276 | Tegal 99-217-001 SOH-1 Wafer Elevator Motor Transfer Selector PCB Board |
277 | Tegal 99-219-001 Wafer Elevator 15-Pin Interface Sensor Controller PCB Board |
278 | Tegal 99-223-002 Pcb Circuit Board Rev G |
279 | Tegal 99-223-002 PCB, DSN-2, Dual Sensor |
280 | Tegal 99-228-001 PCB, FLS-1, Flag Sensor, 98-228-001 |
281 | Tegal 99-231-001 ITP-1 Wafer Etcher CE1029 DC Module Power Supply Board PCB |
282 | Tegal 99-232-003 Rev.5 M0C-3 Plug-In PCB Circuit Board Assembly Module |
283 | Tegal 99-232-003 Rev.P M0C-4 Plug-In PCB Circuit Board Assembly Module |
284 | Tegal 99-232-004 EX Plug-In PCB Circuit Board Assembly Module |
285 | Tegal 99-232-004 Rev.T M0C-4 Plug-In PCB Circuit Board Assembly Module |
286 | Tegal 99-232-004RW PCB |
287 | Tegal 99-235-004 Rev E MCM-4 Control Board |
288 | Tegal 99-237-002 Interface Board PCB EEP-2 |
289 | Tegal 99-240-002 PCB |
290 | Tegal 99-240-003 PCB |
291 | Tegal 99-240-004 ETS-4 Wafer Etcher CD1043 Main Controller Daughter Board PCB |
292 | Tegal 99-247-002 PCB |
293 | Tegal 99-249-002 PCB For Tegal 901E & 903E Plasma Etcher |
294 | Tegal 99-253-001 PMT-1 Rev-K Industrial Board Module Assy |
295 | Tegal 99-261-002 MFC-2 Wafer Chamber Etcher Gas Delivery Interface Board PARTS |
296 | Tegal 99-261-002 REV.C MFC-2 Wafer Etcher Gas Flow Control Interface PCB Board |
297 | Tegal 99-261-002 Rev.C-MFC-2 Industrial/Laboratory Connector Board Assy |
298 | Tegal 99-261-002 Rev.C-MFC-2 Industrial/Laboratory Connector Board Assy |
299 | Tegal 99-287-001D REV C SST PCB |
300 | Tegal 99-287-003 PCB SST-3 Shuttle Interface |
301 | Tegal 99-287-003 SST-3 Board |
302 | Tegal 99-287-003RW Board |
303 | Tegal 99-287-003RW Platine |
304 | Tegal 99-287-003RW Platine |
305 | Tegal 99-299-001 REV. D MCR-1 Wafer Etcher Transfer Driver Interface PCB Board |
306 | Tegal 99-299-001 REV. F MCR-1 Wafer Etcher Transfer Driver Interface PCB Board |
307 | Tegal 99-299-001 Rev.F Industrial/Laboratory MCR-1 Board Assembly Unit |
308 | Tegal 99-299-001RW Rev.F Industrial/Laboratory MCR-1 Board Assembly Unit |
309 | Tegal 99-318-001/B Industrial/Laboratory CSI-1 PCB Board Assembly |
310 | Tegal 99-339-001 PMC CPU Transition Board Plug-In Module Assembly |
311 | Tegal 99-340-001/A PMC Serial Transition Board Plug-In Module Assembly |
312 | Tegal 99-341-001 Industrial/Laboratory Console Interface Board PCB Assembly |
313 | Tegal 99-343-001/A Industrial/Laboratory Master Control Console Board Assembly |
314 | Tegal 99-344-001/C Industrial/Laboratory System Cable Interface Board Assy |
315 | Tegal 99-360-001 Processor Board VME PCB Card AOB-1 98-360-001 Used |
316 | Tegal 99-385-001 DC/DC Converter Board PCB Rev. 4 6500 HRe Dual Frequency |
317 | Tegal 99-385-001 DC/DC Converter Board PCB Rev. A 6500 HRe Dual Frequency |
318 | Tegal 99-395-002 CIP-2 CTC Board PCB Card 98-395-001 |
319 | Tegal 99-80267-01 PCB Shuttle Interface |
320 | Tegal 9XX PCB TMC-3 TEMP MONITOR CONTROL, P/N 99-138-003, NOS |
321 | Tegal 9XX PCB TMC-4 TEMP MONITOR CONTROL, P/N 99-138-004, NOS |
322 | Tegal 9XX PCB, 99-165-003 REV.J, NOS |
323 | Tegal 9XX PCB, 99-207-003 REV.2 MBE-3 |
324 | Tegal 9XX PCB, 99-207-004 REV.C MBE-4 |
325 | Tegal 9XX PLASMA ETCHER INTERFACE PCB, P/N 98-223-002 REV A, NOS |
326 | Tegal 9XX PLASMA ETCHER PCB IMN-3 RF MATCH INTERFACE, 99-172-003, 98-172-003 |
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329 | TEGAL AC MODULE 1028-00302 |
330 | Tegal BES-530-8-PCB 8-Port/Channel Solenoid Valve Control Board |
331 | Tegal CC1147-00303 REAC Industrial/Laboratory Triode Split Assembly Unit |
332 | Tegal CC1326-00100 Chamber-Stripper For Parts As-Is |
333 | Tegal CC1327-00300 EZ Reactor Assembly HRE-PM1 6500 HRe |
334 | Tegal CD1039-00301 Industrial/Laboratory Endpoint Detector Assembly Unit |
335 | Tegal CD-1039-00303 Endpoint Detector Detection System Module/Plug-In |
336 | Tegal CD-1039-00303 Endpoint Detector Detection System Module/Plug-In |
337 | Tegal CD1039-00403 Wafer Etcher Plasma Chamber System Endpoint Detector Module |
338 | Tegal CD1043-00601 Industrial Wafer Etcher System Main Controller Module |
339 | Tegal CD1043-00601 Wafer Etcher Plasma Main Controller Module Chassis Frame |
340 | Tegal CD1043-00601RW Industrial/Lab Main Controller Assembly Module |
341 | TEGAL CD1298-02300 CON-MDL-VME-1HD CHASIS |
342 | Tegal CD1310-00104 Endpoint Module |
343 | Tegal CD1310-00300 Endpoint Module PM1 PM Tegal 6550 Etcher |
344 | Tegal CD1310-00300 Endpoint Module Tegal 6550 Etcher |
345 | Tegal CE00839 2 PINS WIDE 104ZA051 FEEDTHROUGH |
346 | Tegal CE00840 WDE 103 ZA053-600 |
347 | Tegal CE00841 2 CTS FEMALE PLUG S 104 Z051-1 |
348 | Tegal CE00842 4 CTS FEMALE PLUG S 103 Z053-1 |
349 | Tegal CE00843 2 CTS MALE PLUG S 104 A051-130 |
350 | Tegal CE00844 4 CTS MALE PLUG S 103 A053-130 |
351 | Tegal CE00845 CABLE CLAMP E3 103.6/6.7 103.1 |
352 | Tegal CE00845 CABLE CLAMP E3 104.3/6.7 + B I |
353 | Tegal CE1028-00303 AC Module Wafer Etcher 1/3/5/10/15A Power Controller Module |
354 | Tegal CE1028-00303 Industrial AC Module Wafer Processing Plug-In Assembly |
355 | Tegal CE1028-00304 AC Module Wafer Etcher 1/2/5/15A Power Controller Module |
356 | Tegal CE1028-00304 Industrial AC Module Wafer Processing Plug-In Assembly |
357 | Tegal CE1028-00304 Industrial/Laboratory AC Module Assembly Unit |
358 | Tegal CE1028-00401RW Industrial/Lab AC Module Assembly Unit |
359 | Tegal CE1029-00201 DC Module Wafer Etcher Power Supply Chassis Enclosure Frame |
360 | Tegal CE1029-00201 DC Module Wafer Etcher System -15/5/15/24V Power Supply PSU |
361 | Tegal CE1029-00201 DC Module Wafer Etcher System -15/5/15/24V Power Supply Unit |
362 | Tegal CE1029-00201 Industrial/Laboratory DC Module Assembly Unit |
363 | Tegal CE1029-00201 Industrial/Laboratory DC Power Module Plug-In Unit |
364 | Tegal CE1029W00840 Industrial/Laboratory DC Power Module Plug-In Assembly |
365 | Tegal CE1093-0030 Industrial Motor Controller Control Module/Unit/Plug-In |
366 | Tegal CE1093-00303 Industrial Motor Controller Module Plug-In Unit |
367 | Tegal CE1093-00303 Industrial Plug-In Motor Controller Module Assembly |
368 | Tegal CE1153-00102 Industrial/Lab PSVTN Module Assy w/Watlow 804 Controller Unit |
369 | Tegal CE1153-00102 Watlow 804 Temperature Controller Passivation Module PARTS |
370 | Tegal CE1153-00102RW PSVTN Watlow 804 Temperature Controller Passivation Module |
371 | Tegal CE1323-10101 AC Module Distribution |
372 | Tegal CE1323-10101 AC Module Distribution Unit 6500 HRe SW HTR 208 Working Spare |
373 | Tegal CE1354-00200 DC Power Supply Module |
374 | Tegal CG1041-00402RW Industrial Pressure Controller Module Assembly |
375 | Tegal CG1148-00602 Wafer Chamber Gass Delivery Valve UFC-1020 BCI3 MFC Assembly |
376 | Tegal CG1150-00205RN Industrial 8-Channel RWK Gas Controller Plug-In Module Unit |
377 | Tegal CG1150-00206 Industrial 8-Channel Plug-In Gas Controller Module Unit |
378 | Tegal CG1150-0020G Industrial 8-Channel Gas Controller Module |
379 | Tegal CM04345 POTENTIOMETER MONOTURN 10K 1 TURN BIAS MATCH |
380 | Tegal CM05136 O-RING KIT VAT PENDULUM THROTTLE VALVE PUMPING CHAMBER |
381 | Tegal CM05346 POT, 10K, 10 TURN, SOURCE MATCH (PKG 2) |
382 | Tegal CM05473 BELT TIMING BROOKS MX600 116GRV LOAD LOCK |
383 | Tegal Compact Air Products Water Chuck, Vacuum Pump |
384 | Tegal Control Unit |
385 | Tegal Corp 39-452-002A ARM UPPER LH DOOR T915 |
386 | TEGAL CORP 39-453-001 |
387 | TEGAL CORP 39-453-002 |
388 | Tegal Corp 39-659-001 Screw Stud Standoff Aluminum 38 T915 |
389 | Tegal Corp 39-958-001 TEGAL PULLEY TENSION DOOR T915 |
390 | TEGAL CORP 40-575-002-C RING, CHUCK FRONTLINE – 6″ |
391 | TEGAL CORP 40-751-601-A RING, 6″ WAFER CENTER STRIPPER |
392 | Tegal Corp 42-401-002 O-Ring, 235 V |
393 | Tegal Corp 42-402-001 Bracket Slide Front LH T915 |
394 | Tegal Corp 42-402-002 Bracket Slide Front RH T915 |
395 | Tegal Corp 57-017-001 TEGAL PULLEY IDLER (BIG) DOOR T915 |
396 | Tegal Corp 80-095-146 Transformer 220/115-24V AC Module T9156-P-1623420 |
397 | Tegal Corp 81-105-222 Sensor, Control(Platinum)Temperature TEGAL T915 RES-ASHER |
398 | Tegal Corp 99-196-003RW PCB ATI-3 AUTO TUNE T915 |
399 | Tegal Corp 99-206-001 PCB AGCP-1 TEGAL 915 |
400 | Tegal CP1037 CRT Program Terminal 13″ Wafer Etcher System Display Monitor PARTS |
401 | Tegal CR1031-00305 Industrial 100kHz Matching Network Plug-In Module Unit |
402 | Tegal CR1031-00305RW Industrial 100kHz Matching Network Plug-In Module Unit |
403 | Tegal CR1031-00306 Industrial/Laboratory 100kHz Matching Network Assembly |
404 | Tegal CR1040-00205EX Industrial RF Controller Plug-In Module Unit |
405 | Tegal CR1040-00205RW RF Controller Wafer Etcher Signal Generator Module PARTS |
406 | Tegal CR1087-20101RW RWK-RF Generator CR1087-20101RW – RF Plasma Model# T-502S |
407 | Tegal CR1296-00100 KHZ Controller CONT MTCH NTWK 500W 45 Tegal 6500 Etcher |
408 | Tegal CR1324-00100 RF Match Network Source Strip |
409 | Tegal CR1324-00400 RF Match Network Source Strip 6500 HRe |
410 | Tegal CR1325-00300 MHz Controller CONT MTCH NTWK STRIPPE |
411 | Tegal CR1330-10100 MHz Controller Cont 6550 RF Source Tegal 6550 Etcher |
412 | Tegal CR1338-10102 RF Match MTCH NTWK 450KHZ-ESC T Tegal 6550 |
413 | Tegal CR1338-10102 RF Match MTCH NTWK 450KHZ-ESC T Tegal 6550 |
414 | Tegal CR1350-00100 Source Reactor Module Process Chamber Tegal 6550 Etcher |
415 | Tegal CR1350-00100 Source Reactor Module Process Chamber Tegal 6550 Etcher Tool |
416 | Tegal CV00110 O-RING 699 |
417 | Tegal CV00133 O-RING 178 01250 |
418 | Tegal CV00134 O-RING 200 21313 G2 T47501 FPM |
419 | Tegal CV00136 O-RING 300 41145 COOLANT LOWER COOLING PLATE OUTER SOURCE |
420 | Tegal CV00137 O-RING 300 38500 COOLANT LOWER COOLING PLATE OUTER SOURCE |
421 | Tegal CV00325 O-RING 200 23100 COOLANT LOWER COOLING PLATE INNER SOURCE |
422 | Tegal CV00476 O-RING 0.138 X 0.609 |
423 | Tegal CV00477 O-RING 0.139 X 0.734 CHEMRAZ |
424 | Tegal CV00481 O-RING 0.210 X 1.1 |
425 | Tegal CV00482 O-RING CHEMRAZ 366C639 7.225 INCH X 0.210 INCH SC639 |
426 | Tegal CV00507 O-RING 533 |
427 | Tegal CV00508 O-RING 270 |
428 | Tegal CV00527 O-RING TOR 240 00660 HE FEED ESCP SH |
429 | Tegal CV00528 O-RING 200 00570 HE FEED ESCP SH |
430 | Tegal CV00553 O-RING KIT VAT VALVE PROCESS PUMPING |
431 | Tegal CW 1047-00302 Industrial Electrostatic Wafer Chuck Assembly Unit |
432 | Tegal CW 1047-01101RW Industrial Wafer Chuck Assembly W/ 2x SMC NAQ2000 |
433 | Tegal CW1033-00301 Industrial Wafer Elevator Assembly w/Stepping Motor |
434 | Tegal CW1033-00302 Industrial Wafer Elevator Assembly w/Stepping Motor |
435 | Tegal CW1033-00303 Wafer Elevator Library Selector Transfer Handling Assembly |
436 | Tegal CW1033-00303 Wafer Elevator Library Selector Transfer Handling Assembly |
437 | Tegal CW1038-00402 Industrial Spatula Drive Belt Assembly w/Stepping Motor |
438 | Tegal CW1038-00402RW Industrial/Laboratory Spatula Drive Assembly |
439 | Tegal CW1048-00502 Industrial Wafer Shelf Lift Assembly Machine Indexer Module |
440 | Tegal CW1048-00502 Industrial/Lab Pneumatic Indexer Module Assembly Unit |
441 | Tegal CW1048-00502 Industrial/Laboratory Indexer Pneumatic Assembly |
442 | Tegal CW1048-00502 Industrial/Laboratory Indexer Pneumatic Assembly |
443 | Tegal CW1048-00502 Wafer Chamber Shelf Lift Assembly Machine Indexer Module |
444 | Tegal CW1078-W00304RW Spatula Drive, 99-200-003 PCB Board |
445 | Tegal CW1299-20103 VCE Left Generic Load Lock Chamber Tegal 6550 Etcher |
446 | Tegal CW-1302 00500 Wafer Aligner Tegal 6550 Etcher |
447 | TEGAL DEIONIZED WATER HEATER CONTROLLER CE132100201 |
448 | Tegal elevator frame assembly |
449 | TEGAL ENDPOINT MODULE, STRIPP, 99-390-004 CD1310-00202 |
450 | TEGAL EPROM 400k MEMORY PCB, PN 99-095-320 |
451 | Tegal FLIP 03601-22-040 Alphanumeric Fluorescent Display |
452 | TEGAL Front Robot Loader interface |
453 | Tegal Heater Controller Tegal 6550 Etcher *working |
454 | Tegal Industrial Computer Source 7410-14H Control Unit CD1100-00302 4U Rack |
455 | Tegal Industrial Lab REAC Heated Upper Electrode Chamber Assembly Plate Unit |
456 | Tegal Industrial Lab Upper Body Chamber Ring Unit w/Viewing Side Ports PARTS |
457 | Tegal Industrial Optical Fiber Laser Head System I/O RF Driver Amplifier Module |
458 | Tegal Industrial Plasma Etcher Chamber Ceramic Insulator Ring 12.5″ Diameter |
459 | Tegal Industrial Plasma Etcher Chamber Ceramic Insulator Ring 13.5″ Diameter |
460 | Tegal Industrial REAC Heated Upper Electrode Chamber Assembly Plate CC1230-00100 |
461 | Tegal INS-1 Wafer Etcher System 15-Pin Connector Sensor Component Board PCB |
462 | Tegal M3 X 16MM SCREW BUTON HEAD STAINLESS STEEL CLS. .3C16BHCS |
463 | Tegal Model 421 Manual PCB 99-011-001 |
464 | Tegal Model 421, 3″, 75 mm Aluminum Wafer Carrier, 25 Slot |
465 | Tegal Model 421, 3″, 75 mm Aluminum Wafer Carrier, 25 Slot, |
466 | Tegal Model 901e / 903e Plasma Etcher SHUTTLE REBUILD KIT, 80-202-034, NOS |
467 | Tegal Model 903e Plasma Etcher FRONT PANEL INTERFACE PCB, 99-125-008, NOS |
468 | Tegal Model 903e Plasma Etcher GAS INTERFACE PCB ICG5 99-126-005 REV M |
469 | Tegal MX01136 PHYTRONIC ASSEMBLY ESCP SH |
470 | Tegal MyDax 2H14A Temperature Controller Instruction Manual |
471 | Tegal P/N 31-165-006 Stepping Motor, Carrier |
472 | TEGAL PCB ASSY (PARTS) 98-391-004 |
473 | TEGAL PCB ASSY 31-398-002 |
474 | TEGAL PCB ASSY 98-391-004 |
475 | TEGAL PCB ASSY 99-406-001 |
476 | TEGAL PCB ASSY 99-416-001 |
477 | Tegal PEP-250-Te High Voltage Power AC Plasma Source Generator 100Kz RF Supply |
478 | Tegal PEP-250-Te Industrial/Laboratory AC Plasma Source Assembly 3157508-000A |
479 | TEGAL PLASMA 903 |
480 | TEGAL PLASMA ETCHER 9XX 98-247-002, TSI. REV B |
481 | TEGAL PLASMA ETCHER 9XX GAS INTERFACE PCB, ICG-6, 99-126-006 REV F |
482 | Tegal PlasmaLine 200 Plasma Barrel Etcher – Power Supply |
483 | Tegal Plasmaline 415 Plasma Chamber w/Varian L6267-301 NW40 Vacuum Valve |
484 | TEGAL PLASMALINE MODEL 421 WITH SPARE PARTS |
485 | TEGAL PLASMOD w/ MARCH GCM 100 PLASMA ASHER CLEANER ETCHER |
486 | Tegal PM3 Over Temp PM4 Level Sense Tegal 6550 Etcher |
487 | Tegal Quartz PIN P/N 40-297-001-E, NEW |
488 | Tegal RF Delivery |
489 | Tegal RF Interface PCB # 99-173-008 |
490 | TEGAL RF SIGNAL GENENRATOR SUPPLY T-1000E |
491 | Tegal SE 1496A A/D Plug-In PCB Circuit Board Assembly Unit |
492 | Tegal SE 2059 AX CPU Plug-In PCB Circuit Board Assembly Unit |
493 | Tegal source reactor ICP CR1350-00300 with Tegal MHZ controller CR1325-00400 |
494 | Tegal SPI-80-095-057 Probe Temperature SST |
495 | Tegal T-1000E Comdel T1000E/DCX Wafer RF Signal Generator DC Power Supply Module |
496 | Tegal T-1000E Comdel T1000E/RFG 13.56MHz RF Signal High Voltage Power Supply |
497 | Tegal T-1000E Industrial 40VDC DC Power Supply Plug-In Module Unit Assembly #2 |
498 | Tegal TG00461 MONOBLOCK CENETRING RING CERAMIC PART |
499 | Tegal TR01785 PIPE ALUMINA INTEGRATED CIRCUIT SUPPORT ICS-2471883 |
500 | Tegal TR05113 CONNECTOR HELIUM ESCP SH (PKG 2) |
501 | Tegal Type 41-137-001 Flag Chuck For Tegal Etcher |
502 | Tegal Type 80-202-186 Timing Belt (Pack Of 4) |
503 | Tegal Vacuum Cassette Elevator Loadlock VCE, 100/150MM, Left CW1299-10102 |
504 | Tegal Wafer Elevator Vexta Motorized Linear Transfer Selector Library Handler |
505 | Tegal Wafer Lift Quartz Tip ANOD PIN, 49-042-002, 6 ea. |
506 | Tegal Wafer Transfer System Motorized Linear Selector Handler +Vexta C4412 PARTS |
507 | TEGAL XJET-11503 TCU Elbow Fitting, 416192 |
508 | Tegal XJET-14004-2 HGST Carrier 6500 Centring Ring Assembly |
509 | Tegal/Bay Pneumatic BES-530-8-PCB 8-Port/Channel Solenoid Valve Control Board |
510 | Tegal/Comdel T1000E/RF Industrial/Laboratory 13.56MHz RF Power Supply Unit |
511 | TEGAL/DDI SHUTTLE INTERFACE CIRCUIT BOARD 00094072, 98-287-002 REV. A DVO 450-B |
512 | TEGAL1513e MOTOR CONTROLLER ITEM CE 1093 |
513 | Thermo Couple (TC) TEGAL 80-700-xx JES-CE |
514 | Unit/Tegal CHF3 80SCCM — UFC-1000 |
515 | Vacuum valve, KF-40. Tegal P/N |
516 | VAT 14046-PE44-1016 HV High Vacuum Gate Valve Tegal 6500 HRe |
517 | Veriflo NPR400Z (TEGAL) High Pressure Regulator w/ Vacuum Torr Gauge |
518 | Xycom MVME-490/1 Circuit Board Tegal 6550 Etcher |
MSP-165000
All the Tegal 903e Plasma Etch Plasma Etcher semiconductor process equipment trademarks belongs to Tegal , the original equipment manufacturer. All rights reserved.
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