Description

Model: Tegal 903e plasma dry etch semiconductor process equipment

Photos: Download Here

Category: Plasma Etch

Original Equipment Manufacturer: Tegal Corp.

Condition: Complete, working condition. The system was de-installed from a Fab in USA in July, 2016.

Wafer Size: 6 inch configuration.

Vintage: 2000

Gas Lines: 4

Monitor: Upgraded LCD monitor

UPC: Yes

Valid Time: Subject to prior sale without notice

Lead Time: Ready to go

Location: Silicon Valley, CA, U.S.A.

Warranty and refund: N/A

Tegal 903e plasma dry etch description for reference

The Tegal 903e plasma dry etch semiconductor equipment were made by Tegal Corporation and represents the Industry Standard in single-wafer Dry Etch of Polysilicon, Nitride, Silicon Oxide and the mainstay of the highly successful plasma etch system.

The Tegal 903e plasma dry etch semiconductor equipment are used by the semiconductor industry for integrated circuit fabrication. The Tegal 903e plasma etcher plasma etch semiconductor equipment are used in one part of the sequence of manufacturing steps that transfer a pattern formed from a layer of photosensitive material, the photoresist, to a layer that makes up a permanent part of the finished device.

Wafers in the Tegal 903e plasma dry etch semiconductor equipment are transported to a Reaction Chamber. A gas mixture is introduced into the Reaction Chamber, and the gas mixture is caused to become reactive by the application of radio frequency (RF) electromagnetic radiation. The reactive mixture, or plasma, etches away material that is not covered by the masking photoresist. The etch process is terminated at an appropriate time, the wafer is unloaded from the Reaction Chamber, and a new wafer is introduced. The cycle repeats.

The Tegal 903e plasma dry etch semiconductor equipment Plasma/RlE etchers have been configured to take advantage of the characteristics of plasmas for etching various films. Each of the models in the 90Xe family have been optimized for specific etches of specific films. All models have the common ability to implement multi-step etch recipes using multiple process gases. An optical monitoring system provides a means for determining etch completion so that the etch process may be terminated.

(Check Tegal Spare Parts in stock)

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290	Tegal 99-240-003 PCB
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296	Tegal 99-261-002 REV.C MFC-2 Wafer Etcher Gas Flow Control Interface PCB Board
297	Tegal 99-261-002 Rev.C-MFC-2 Industrial/Laboratory Connector Board Assy
298	Tegal 99-261-002 Rev.C-MFC-2 Industrial/Laboratory Connector Board Assy
299	Tegal 99-287-001D REV C SST PCB
300	Tegal 99-287-003 PCB SST-3 Shuttle Interface
301	Tegal 99-287-003 SST-3 Board
302	Tegal 99-287-003RW Board
303	Tegal 99-287-003RW Platine
304	Tegal 99-287-003RW Platine
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306	Tegal 99-299-001 REV. F MCR-1 Wafer Etcher Transfer Driver Interface PCB Board
307	Tegal 99-299-001 Rev.F Industrial/Laboratory MCR-1 Board Assembly Unit
308	Tegal 99-299-001RW Rev.F Industrial/Laboratory MCR-1 Board Assembly Unit
309	Tegal 99-318-001/B Industrial/Laboratory CSI-1 PCB Board Assembly
310	Tegal 99-339-001 PMC CPU Transition Board Plug-In Module Assembly
311	Tegal 99-340-001/A PMC Serial Transition Board Plug-In Module Assembly
312	Tegal 99-341-001 Industrial/Laboratory Console Interface Board PCB Assembly
313	Tegal 99-343-001/A Industrial/Laboratory Master Control Console Board Assembly
314	Tegal 99-344-001/C Industrial/Laboratory System Cable Interface Board Assy
315	Tegal 99-360-001 Processor Board VME PCB Card AOB-1 98-360-001 Used
316	Tegal 99-385-001 DC/DC Converter Board PCB Rev. 4 6500 HRe Dual Frequency
317	Tegal 99-385-001 DC/DC Converter Board PCB Rev. A 6500 HRe Dual Frequency
318	Tegal 99-395-002 CIP-2 CTC Board PCB Card 98-395-001
319	Tegal 99-80267-01 PCB Shuttle Interface
320	Tegal 9XX PCB TMC-3 TEMP MONITOR CONTROL, P/N 99-138-003, NOS
321	Tegal 9XX PCB TMC-4 TEMP MONITOR CONTROL, P/N 99-138-004, NOS
322	Tegal 9XX PCB, 99-165-003 REV.J, NOS
323	Tegal 9XX PCB, 99-207-003 REV.2 MBE-3
324	Tegal 9XX PCB, 99-207-004 REV.C MBE-4
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326	Tegal 9XX PLASMA ETCHER PCB IMN-3 RF MATCH INTERFACE, 99-172-003, 98-172-003
327	Tegal 9XX PLASMA ETCHER PCB SIS-5 SENSOR INTERFACE P/N 99-200-005 REV B
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335	Tegal CD-1039-00303 Endpoint Detector Detection System Module/Plug-In
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345	Tegal CE00839 2 PINS WIDE 104ZA051 FEEDTHROUGH
346	Tegal CE00840 WDE 103 ZA053-600
347	Tegal CE00841 2 CTS FEMALE PLUG S 104 Z051-1
348	Tegal CE00842 4 CTS FEMALE PLUG S 103 Z053-1
349	Tegal CE00843 2 CTS MALE PLUG S 104 A051-130
350	Tegal CE00844 4 CTS MALE PLUG S 103 A053-130
351	Tegal CE00845 CABLE CLAMP E3 103.6/6.7 103.1
352	Tegal CE00845 CABLE CLAMP E3 104.3/6.7 + B I
353	Tegal CE1028-00303 AC Module Wafer Etcher 1/3/5/10/15A Power Controller Module
354	Tegal CE1028-00303 Industrial AC Module Wafer Processing Plug-In Assembly
355	Tegal CE1028-00304 AC Module Wafer Etcher 1/2/5/15A Power Controller Module
356	Tegal CE1028-00304 Industrial AC Module Wafer Processing Plug-In Assembly
357	Tegal CE1028-00304 Industrial/Laboratory AC Module Assembly Unit
358	Tegal CE1028-00401RW Industrial/Lab AC Module Assembly Unit
359	Tegal CE1029-00201 DC Module Wafer Etcher Power Supply Chassis Enclosure Frame
360	Tegal CE1029-00201 DC Module Wafer Etcher System -15/5/15/24V Power Supply PSU
361	Tegal CE1029-00201 DC Module Wafer Etcher System -15/5/15/24V Power Supply Unit
362	Tegal CE1029-00201 Industrial/Laboratory DC Module Assembly Unit
363	Tegal CE1029-00201 Industrial/Laboratory DC Power Module Plug-In Unit
364	Tegal CE1029W00840 Industrial/Laboratory DC Power Module Plug-In Assembly
365	Tegal CE1093-0030 Industrial Motor Controller Control Module/Unit/Plug-In
366	Tegal CE1093-00303 Industrial Motor Controller Module Plug-In Unit
367	Tegal CE1093-00303 Industrial Plug-In Motor Controller Module Assembly
368	Tegal CE1153-00102 Industrial/Lab PSVTN Module Assy w/Watlow 804 Controller Unit
369	Tegal CE1153-00102 Watlow 804 Temperature Controller Passivation Module PARTS
370	Tegal CE1153-00102RW PSVTN Watlow 804 Temperature Controller Passivation Module
371	Tegal CE1323-10101 AC Module Distribution
372	Tegal CE1323-10101 AC Module Distribution Unit 6500 HRe SW HTR 208 Working Spare
373	Tegal CE1354-00200 DC Power Supply Module
374	Tegal CG1041-00402RW Industrial Pressure Controller Module Assembly
375	Tegal CG1148-00602 Wafer Chamber Gass Delivery Valve UFC-1020 BCI3 MFC Assembly
376	Tegal CG1150-00205RN Industrial 8-Channel RWK Gas Controller Plug-In Module Unit
377	Tegal CG1150-00206 Industrial 8-Channel Plug-In Gas Controller Module Unit
378	Tegal CG1150-0020G Industrial 8-Channel Gas Controller Module
379	Tegal CM04345 POTENTIOMETER MONOTURN 10K 1 TURN BIAS MATCH
380	Tegal CM05136 O-RING KIT VAT PENDULUM THROTTLE VALVE PUMPING CHAMBER
381	Tegal CM05346 POT, 10K, 10 TURN, SOURCE MATCH (PKG 2)
382	Tegal CM05473 BELT TIMING BROOKS MX600 116GRV LOAD LOCK
383	Tegal Compact Air Products Water Chuck, Vacuum Pump
384	Tegal Control Unit
385	Tegal Corp 39-452-002A ARM UPPER LH DOOR T915
386	TEGAL CORP 39-453-001
387	TEGAL CORP 39-453-002
388	Tegal Corp 39-659-001 Screw Stud Standoff Aluminum 38 T915
389	Tegal Corp 39-958-001 TEGAL PULLEY TENSION DOOR T915
390	TEGAL CORP 40-575-002-C RING, CHUCK FRONTLINE – 6″
391	TEGAL CORP 40-751-601-A RING, 6″ WAFER CENTER STRIPPER
392	Tegal Corp 42-401-002 O-Ring, 235 V
393	Tegal Corp 42-402-001 Bracket Slide Front LH T915
394	Tegal Corp 42-402-002 Bracket Slide Front RH T915
395	Tegal Corp 57-017-001 TEGAL PULLEY IDLER (BIG) DOOR T915
396	Tegal Corp 80-095-146 Transformer 220/115-24V AC Module T9156-P-1623420
397	Tegal Corp 81-105-222 Sensor, Control(Platinum)Temperature TEGAL T915 RES-ASHER
398	Tegal Corp 99-196-003RW PCB ATI-3 AUTO TUNE T915
399	Tegal Corp 99-206-001 PCB AGCP-1 TEGAL 915
400	Tegal CP1037 CRT Program Terminal 13″ Wafer Etcher System Display Monitor PARTS
401	Tegal CR1031-00305 Industrial 100kHz Matching Network Plug-In Module Unit
402	Tegal CR1031-00305RW Industrial 100kHz Matching Network Plug-In Module Unit
403	Tegal CR1031-00306 Industrial/Laboratory 100kHz Matching Network Assembly
404	Tegal CR1040-00205EX Industrial RF Controller Plug-In Module Unit
405	Tegal CR1040-00205RW RF Controller Wafer Etcher Signal Generator Module PARTS
406	Tegal CR1087-20101RW RWK-RF Generator CR1087-20101RW – RF Plasma Model# T-502S
407	Tegal CR1296-00100 KHZ Controller CONT MTCH NTWK 500W 45 Tegal 6500 Etcher
408	Tegal CR1324-00100 RF Match Network Source Strip
409	Tegal CR1324-00400 RF Match Network Source Strip 6500 HRe
410	Tegal CR1325-00300 MHz Controller CONT MTCH NTWK STRIPPE
411	Tegal CR1330-10100 MHz Controller Cont 6550 RF Source Tegal 6550 Etcher
412	Tegal CR1338-10102 RF Match MTCH NTWK 450KHZ-ESC T Tegal 6550
413	Tegal CR1338-10102 RF Match MTCH NTWK 450KHZ-ESC T Tegal 6550
414	Tegal CR1350-00100 Source Reactor Module Process Chamber Tegal 6550 Etcher
415	Tegal CR1350-00100 Source Reactor Module Process Chamber Tegal 6550 Etcher Tool
416	Tegal CV00110 O-RING 699
417	Tegal CV00133 O-RING 178 01250
418	Tegal CV00134 O-RING 200 21313 G2 T47501 FPM
419	Tegal CV00136 O-RING 300 41145 COOLANT LOWER COOLING PLATE OUTER SOURCE
420	Tegal CV00137 O-RING 300 38500 COOLANT LOWER COOLING PLATE OUTER SOURCE
421	Tegal CV00325 O-RING 200 23100 COOLANT LOWER COOLING PLATE INNER SOURCE
422	Tegal CV00476 O-RING 0.138 X 0.609
423	Tegal CV00477 O-RING 0.139 X 0.734 CHEMRAZ
424	Tegal CV00481 O-RING 0.210 X 1.1
425	Tegal CV00482 O-RING CHEMRAZ 366C639 7.225 INCH X 0.210 INCH SC639
426	Tegal CV00507 O-RING 533
427	Tegal CV00508 O-RING 270
428	Tegal CV00527 O-RING TOR 240 00660 HE FEED ESCP SH
429	Tegal CV00528 O-RING 200 00570 HE FEED ESCP SH
430	Tegal CV00553 O-RING KIT VAT VALVE PROCESS PUMPING
431	Tegal CW 1047-00302 Industrial Electrostatic Wafer Chuck Assembly Unit
432	Tegal CW 1047-01101RW Industrial Wafer Chuck Assembly W/ 2x SMC NAQ2000
433	Tegal CW1033-00301 Industrial Wafer Elevator Assembly w/Stepping Motor
434	Tegal CW1033-00302 Industrial Wafer Elevator Assembly w/Stepping Motor
435	Tegal CW1033-00303 Wafer Elevator Library Selector Transfer Handling Assembly
436	Tegal CW1033-00303 Wafer Elevator Library Selector Transfer Handling Assembly
437	Tegal CW1038-00402 Industrial Spatula Drive Belt Assembly w/Stepping Motor
438	Tegal CW1038-00402RW Industrial/Laboratory Spatula Drive Assembly
439	Tegal CW1048-00502 Industrial Wafer Shelf Lift Assembly Machine Indexer Module
440	Tegal CW1048-00502 Industrial/Lab Pneumatic Indexer Module Assembly Unit
441	Tegal CW1048-00502 Industrial/Laboratory Indexer Pneumatic Assembly
442	Tegal CW1048-00502 Industrial/Laboratory Indexer Pneumatic Assembly
443	Tegal CW1048-00502 Wafer Chamber Shelf Lift Assembly Machine Indexer Module
444	Tegal CW1078-W00304RW Spatula Drive, 99-200-003 PCB Board
445	Tegal CW1299-20103 VCE Left Generic Load Lock Chamber Tegal 6550 Etcher
446	Tegal CW-1302 00500 Wafer Aligner Tegal 6550 Etcher
447	TEGAL DEIONIZED WATER HEATER CONTROLLER CE132100201
448	Tegal elevator frame assembly
449	TEGAL ENDPOINT MODULE, STRIPP, 99-390-004 CD1310-00202
450	TEGAL EPROM 400k MEMORY PCB, PN 99-095-320
451	Tegal FLIP 03601-22-040 Alphanumeric Fluorescent Display
452	TEGAL Front Robot Loader interface
453	Tegal Heater Controller Tegal 6550 Etcher *working
454	Tegal Industrial Computer Source 7410-14H Control Unit CD1100-00302 4U Rack
455	Tegal Industrial Lab REAC Heated Upper Electrode Chamber Assembly Plate Unit
456	Tegal Industrial Lab Upper Body Chamber Ring Unit w/Viewing Side Ports PARTS
457	Tegal Industrial Optical Fiber Laser Head System I/O RF Driver Amplifier Module
458	Tegal Industrial Plasma Etcher Chamber Ceramic Insulator Ring 12.5″ Diameter
459	Tegal Industrial Plasma Etcher Chamber Ceramic Insulator Ring 13.5″ Diameter
460	Tegal Industrial REAC Heated Upper Electrode Chamber Assembly Plate CC1230-00100
461	Tegal INS-1 Wafer Etcher System 15-Pin Connector Sensor Component Board PCB
462	Tegal M3 X 16MM SCREW BUTON HEAD STAINLESS STEEL CLS. .3C16BHCS
463	Tegal Model 421 Manual PCB 99-011-001
464	Tegal Model 421, 3″, 75 mm Aluminum Wafer Carrier, 25 Slot
465	Tegal Model 421, 3″, 75 mm Aluminum Wafer Carrier, 25 Slot,
466	Tegal Model 901e / 903e Plasma Etcher SHUTTLE REBUILD KIT, 80-202-034, NOS
467	Tegal Model 903e Plasma Etcher FRONT PANEL INTERFACE PCB, 99-125-008, NOS
468	Tegal Model 903e Plasma Etcher GAS INTERFACE PCB ICG5 99-126-005 REV M
469	Tegal MX01136 PHYTRONIC ASSEMBLY ESCP SH
470	Tegal MyDax 2H14A Temperature Controller Instruction Manual
471	Tegal P/N 31-165-006 Stepping Motor, Carrier
472	TEGAL PCB ASSY (PARTS) 98-391-004
473	TEGAL PCB ASSY 31-398-002
474	TEGAL PCB ASSY 98-391-004
475	TEGAL PCB ASSY 99-406-001
476	TEGAL PCB ASSY 99-416-001
477	Tegal PEP-250-Te High Voltage Power AC Plasma Source Generator 100Kz RF Supply
478	Tegal PEP-250-Te Industrial/Laboratory AC Plasma Source Assembly 3157508-000A
479	TEGAL PLASMA 903
480	TEGAL PLASMA ETCHER 9XX 98-247-002, TSI. REV B
481	TEGAL PLASMA ETCHER 9XX GAS INTERFACE PCB, ICG-6, 99-126-006 REV F
482	Tegal PlasmaLine 200 Plasma Barrel Etcher – Power Supply
483	Tegal Plasmaline 415 Plasma Chamber w/Varian L6267-301 NW40 Vacuum Valve
484	TEGAL PLASMALINE MODEL 421 WITH SPARE PARTS
485	TEGAL PLASMOD w/ MARCH GCM 100 PLASMA ASHER CLEANER ETCHER
486	Tegal PM3 Over Temp PM4 Level Sense Tegal 6550 Etcher
487	Tegal Quartz PIN P/N 40-297-001-E, NEW
488	Tegal RF Delivery
489	Tegal RF Interface PCB # 99-173-008
490	TEGAL RF SIGNAL GENENRATOR SUPPLY T-1000E
491	Tegal SE 1496A A/D Plug-In PCB Circuit Board Assembly Unit
492	Tegal SE 2059 AX CPU Plug-In PCB Circuit Board Assembly Unit
493	Tegal source reactor ICP CR1350-00300 with Tegal MHZ controller CR1325-00400
494	Tegal SPI-80-095-057 Probe Temperature SST
495	Tegal T-1000E Comdel T1000E/DCX Wafer RF Signal Generator DC Power Supply Module
496	Tegal T-1000E Comdel T1000E/RFG 13.56MHz RF Signal High Voltage Power Supply
497	Tegal T-1000E Industrial 40VDC DC Power Supply Plug-In Module Unit Assembly #2
498	Tegal TG00461 MONOBLOCK CENETRING RING CERAMIC PART
499	Tegal TR01785 PIPE ALUMINA INTEGRATED CIRCUIT SUPPORT ICS-2471883
500	Tegal TR05113 CONNECTOR HELIUM ESCP SH (PKG 2)
501	Tegal Type 41-137-001 Flag Chuck For Tegal Etcher
502	Tegal Type 80-202-186 Timing Belt (Pack Of 4)
503	Tegal Vacuum Cassette Elevator Loadlock VCE, 100/150MM, Left CW1299-10102
504	Tegal Wafer Elevator Vexta Motorized Linear Transfer Selector Library Handler
505	Tegal Wafer Lift Quartz Tip ANOD PIN, 49-042-002, 6 ea.
506	Tegal Wafer Transfer System Motorized Linear Selector Handler +Vexta C4412 PARTS
507	TEGAL XJET-11503 TCU Elbow Fitting, 416192
508	Tegal XJET-14004-2 HGST Carrier 6500 Centring Ring Assembly
509	Tegal/Bay Pneumatic BES-530-8-PCB 8-Port/Channel Solenoid Valve Control Board
510	Tegal/Comdel T1000E/RF Industrial/Laboratory 13.56MHz RF Power Supply Unit
511	TEGAL/DDI SHUTTLE INTERFACE CIRCUIT BOARD 00094072, 98-287-002 REV. A DVO 450-B
512	TEGAL1513e MOTOR CONTROLLER ITEM CE 1093
513	Thermo Couple (TC) TEGAL 80-700-xx JES-CE
514	Unit/Tegal CHF3 80SCCM — UFC-1000
515	Vacuum valve, KF-40. Tegal P/N
516	VAT 14046-PE44-1016 HV High Vacuum Gate Valve Tegal 6500 HRe
517	Veriflo NPR400Z (TEGAL) High Pressure Regulator w/ Vacuum Torr Gauge
518	Xycom MVME-490/1 Circuit Board Tegal 6550 Etcher

MSP-165000

Plasma Etcher, Please Etching, Dry Etching, Dry Clean, Semiconductor Equipment, Used Semiconductor Equipment, Semiconductor Process Equipment, Tegal 901e, Tegal 903e, Tegal 901e TTW, Tegal 915,Tegal 701,Tegal 703,Tegal 801,Tegal 803,Tegal 981e,Tegal 903ePlasma Etcher, Plasma Etching, Dry Etching, Dry Clean, Semiconductor Equipment, Used Semiconductor Equipment, Semiconductor Process Equipment, Gasonics AE 2001, Microwave Etcher, Microwave Plasma Etcher, Microwave Etch, Downstream Plasma Etch