TEGAL 515 PLASMA ASHER
Manufacturer: Tegal
TEGAL 515 PLASMA ASHER
ALUMINUM CHAMBER ID 6X6X10″ WIDE
Aluminum Chamber for Up To 5″ Wafers
Single Gas Input
Optional
Dual Gas Control Box is Available
REBUILT DIRECT DRIVE PUMP
FOMBLIN/KRYTOX PREP (IF PUMPING EXPLOSIVE GAS)
1/4 GALLON RECLAIMED FOMBLIN/KRYTOX OIL
SS152114646269
Metrology | Tester | Wafer Carriers
Main Refurbished Equipment
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AlN epitaxial layers,centrotherm c.OXIDATOR , high-temperature oxidation furnace , Rapid Thermal Processing system for silicon and compound semiconductors,c.RAPID 200,fully automatic loading system,centrotherm PECVD,c.PLASMA, c.DIFF,centrotherm highly versatile diffusion,wide band gap,c.CRYSCOO HTA,AP Systems,AP Systems Korea,KORONA RTP-12MP, KORONA RTP-12LPO , KORONA RTP-12LR/LPRR,Seebeck Coefficient / Electric Resistance Measurement System ZEM-3 series，Mini Lamp Annealer MILA-5050， Atmospheric Thermoelectric Module Evaluation System F-PEM，
