Description
Instrument Model: Dektak IIA Surface Profile Measuring System similar as a step measuring. Maker: Sloan (Veeco)
DEMO Service Rates and terms:
(1) Setup & Training Fee for In House Service: $100.00 ($50.00X2).
(2) Use the tool time rates: $50.00/hr
(3)Lead time: After payment, we will schedule time for the service. Normally the lead time is 1 to 2 weeks. Appreciate your time.
(4) We also sell the Dektak IIA Surface Profile Measuring System at complete, working, tested condition
Configuration:
- Wafer Size: small piece and up to 5″ Wafer Capability
- OS: The Dektak IIA is a microprocessor-based stylus profiler. The OS is in PROM and program variables are stored in RAM.
- Control Console: The control console’s keyboard includes keys to control the scan head, measure the acquired data and print out the results. The Dektak IIA video monitor is a 9” monochrome CRT which displays programs and graphics.
- Precision Scan Head: It contains the mechanical and optical components for sample placement, sample viewing, scanning and measurement. A 70X video camera permits viewing of the sample measurement area.
- X-Y Stage: A very high precision sample stage performs the scan and permits X-Y positioning with 360 degree theta rotation.
- Thermal Printer (optional).
- Stylus: A 12.5 micron radius. Diamond tipped stylus permits accurate profile measurements in a wide range of applications. User programmable stylus force from 1 to 40 mg allowing profiling on soft or hard surfaces.
- Standard Samples (Measurement Reference): We have a 10KA thickness and a 1KA thickness of original references.
Typical Specifications:
- Vertical Range: 200A to 655KA
- Vertical Resolution: 5A
- Scan Length Range: 50 microns to 30mm
- Scan Speed Ranges: Low, Medium, High
- Leveling: Manual, two-point programmable or cursor leveling
- Stylus (standard): Diamond, 12.5 micron radius
- Stylus Tracking Force: Adjustable, 10mg to 50mg (0.1 – 0.4 milliNewton)
- Maximum Sample Thickness: 20mm (0.75 inches)
- Sample Stage Diameter: 127mm (5 inches)
- Sample Stage Translation: (from center) X Axis, ±10mm (±0.4”) Y Axis, +10mm, -70mm (+0.4”, -2.77”)
- Sample Stage Rotation: 360° continuous
- Maximum Sample Weight: 0.5Kg (1 lb.)
- Power Requirements: 115/220Vac, 50-60Hz, @67W
- Warm-up Time: 15 minutes recommended for maximum stability
- Operating Temperature: 21°C, ±3°C (70°F, ±5°F)
- Zoom Magnification: 35X~200X
- Camera: 70X Solid State Video Camera
- Sample illumination: Variable intensity white light; IR & UV blocked
- Shipping Weight: Control Console Carton: 47 lbs; Scan Head Carton: 29 lbs
- Dimensions: Scan Head: 26.2cm (W) x 35.6cm (D) x 26.7cm (H) (10.3″W x 14″D x 10.5″H)
- Control Console: 40.1cm (W) x 51.3cm (D) x 27.4cm (H) (15.8” W x 20.2″D x 10.8″H)
Dektak IIA Surface Profile Measuring System is a very high precision measuring instrument capable of measuring minute physical surface variations, it accurately measures vertical features ranging in height from 131 microns to 50 angstroms on a wide variety of substrate surface.
Measurements are made electromechanically by moving the sample beneath a diamond-tipped stylus. The high precision stage moves a sample beneath the stylus according to a user-programmed scan length and speed. Surface variations cause the stylus to be translated vertically. Electrical signals corresponding to the stylus movement are produced as sensor position changes respectively. System digitized the signals from a single scan, store it in computer (microprocessor) memory for display, manipulation, measurement and print.
Stored programs that can be readily changed make the Dektak IIA ideal for both production and laboratory use.
