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STS MESC Multiplex ICP -6 inch

SKU: STS Multiplex ICP -1 Category:


SOLD! Model:  STS MESC Multiplex ICP

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Category:  Etch RIE ICP

Original Equipment Manufacturer: Surface Tech Sys ( STS )

Condition: Used, Complete, working condition. We sell it at AS IS,Where IS condition. Refurbished and fully tested is optional at extra charge.

Valid Time: Subject to prior sale

SN: 17343

Lead Time: Ready to go. 8 to 10 weeks for the Refurbished and fully tested condition.

Location: Morgan Hill,CA USA

Warranty: No warranty for the AS IS,WHERE IS condition. 3 months for the Refurbished and fully tested condition.

Installation and training: Available at extra charge for the Refurbished and fully tested condition

Service Contract: Available at extra charge for the Refurbished and fully tested condition

Surface Tech Sys (STS)  STS MESC Mutiplex ICP Etcher Description:

  • STS MESC Multiplex ICP Plasma etcher, 6″
  • Load lock system
  • Al chamber
  • Dual chlorine gas and BCL3
  • Injection of gas mixtures: N2, O2, SF6, (C4F8), CF4, BCl3, Ar, Cl2 and HBr
  • Roughing pump
  • Diffusion pump
  • Turbo molecular pump
  • Pumping system: MP, DP and TMP
  • Inductively coupled plasma: RF1 kW
  • RF Generator: 13.56 MHz and 0 to 300 W

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