Model: STS MESC Multiplex ICP
Photos: Download here
Category: Etch RIE ICP
Original Equipment Manufacturer: Surface Tech Sys ( STS )
Condition: Used, Complete, working condition. We sell it at AS IS,Where IS condition. Refurbished and fully tested is optional at extra charge.
Valid Time: Subject to prior sale
Lead Time: Ready to go. 8 to 10 weeks for the Refurbished and fully tested condition.
Location: Morgan Hill,CA USA
Warranty: No warranty for the AS IS,WHERE IS condition. 3 months for the Refurbished and fully tested condition.
Installation and training: Available at extra charge for the Refurbished and fully tested condition
Service Contract: Available at extra charge for the Refurbished and fully tested condition
Surface Tech Sys (STS) STS MESC Mutiplex ICP Etcher Description:
- STS MESC Multiplex ICP Plasma etcher, 6″
- Load lock system
- Al chamber
- Dual chlorine gas and BCL3
- Injection of gas mixtures: N2, O2, SF6, (C4F8), CF4, BCl3, Ar, Cl2 and HBr
- Roughing pump
- Diffusion pump
- Turbo molecular pump
- Pumping system: MP, DP and TMP
- Inductively coupled plasma: RF1 kW
- RF Generator: 13.56 MHz and 0 to 300 W