Description
Equipment Model: Sopra SE 5-FPD Ellipsometer
Condition: Used. It was complete, working in a Fab in USA. It was de-installed and stored in a warehouse in USA.We sell it at any of the conditions: AS IS without warranty, return.
Price: Contact Us via email
Quantity: 2 sets
Vintage: 2007
Valid Time: Subject to prior sale without notice
ID: 8412-5-1-1
Description from OEM for your reference:
Ellipsometer, Optical bench, Motion stage, Measurement, Motion control, Housed electronics
Xe short arc lamp:
185 < λ < 2000 nm
75 W
Ozone free
Lifetime: 2000 Hours
Spectral range:
Scanning: From 190 nm to 850 nm
CCD: From 290 nm to 1000 nm
Resolution:
Polarizer: 0.045°
Analyzer: 0.045°
CCD: 0.65 nm / pixel
+/- 0.5 nm Over the whole spectral range
Accuracy:
< +/- 0.5 nm @ 313 nm
< +/- 0.4 nm Over the whole spectral range
Repeatability:
σ Standard deviation on 30 static measurements taken at the same location
Stability:
σ Standard deviation on 5 static measurements taken at the same location
Alignment marks:
Any geometry
Minimum size 30 x 30 pm
Standard according to zoom 1x to 10x
Measurement area: 2×2 mm
Elliptical microspot std: 50 μm x 50 μm
Box size std: 80 μm x 80 μm
Throughput:
Initialization (chuck, spectrometer): Around 2 min
Loading job: Around 1 min (depending on the loader)
Alignment mapping:
20 Points: Around 3 min
42 Points: Around 6 min
121 Points: Around 16 min
Thin film measurement specifications:
Glass size: 730 mm x 920 mm
Glass thickness: From 0.5 to 1.1 mm
Metrology performances:
Film thickness:
Refractive index / Extinction coefficients
Single / Multi-layers capabilities
Optical band gap for dielectrics / Tauc
Band gap for a-Si:
Options: 4PP electrical
Contact angle measurements
Stress measurement on full panel
Application field:
SiNx, SiOx, a-Si, p-Si, pc-Si, SiON, photoresist, RGB filter, ITO, IZO
Stage for chuck/stage for optical head specifications:
Stage travel:
Axis Values
X 1400 mm
Y 1400 mm
Z 12 mm
Resolution (per count):
Axis Values
X 5 pm
Y 5 pm
Z 0,1 pm
Maximum velocity:
Axis Values
X 250 mm/s
Y 250 mm/s
Z 7 mm/s
Pitch: +/-12 pm Over 800 mm average
Yaw: +/-12 pm Over 800 mm average
Position accuracy: Axis Values
Mark: SS380EB
All the used equipment trademarks belongs to the O.E.M. , the original equipment manufacturer. All rights reserved.
