Description
Instrument Model: KLA Tencor M-Gage 200 with PC controller
Capability:
- Wafer Size: 2~5 inch.
- Sheet Resistance: 1 mΩ/square to 1,999 Ω/square
- Film Thickness: .100 Angstroms to 270K Angstroms
- Resistivity: 0.05 mΩ-cm to 100 mW-cm or 0.05 Ω-cm to 100 Ω-cm (For a 500 micrometer wafer)
- Total repeatability is the standard deviation (s) percent of mean value,±1 count
Standard Range: s / x (± %) 1 to 100 mΩ/sq;Ω/sq 1.0 100 to 500 mΩ/sq;Ω/sq 2.0 500 to 1,000 mΩ/sq;Ω/sq 4.0 1,000 to 1,999 mΩ/sq;Ω/sq 6.0
Price Unit: Per Hour. Minimum 2 hours.
Lead time: After payment, we will schedule time for the service. Normally the lead time is 1 to 2 weeks. Appreciate your time.
The Tencor Instruments M-Gage™ 200 with the new Upgrade Kit from seller is a Sheet Resistance Measurement System. The M-Gage™ 200 measures sheet resistance in ohms per square or milliohms per square. If specific resistivity is known, the thickness of the deposited film layer can be computed from the sheet resistance. The choice of measurement data is easily switch selectable, as is the choice of units. The Tencor M-Gage 200 Sheet Resistance Measurement System can accommodate 125mm (5”) wafers as well as the standard 2″, 3″, and 4″ wafers.
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