Description
The following Semiconductor Spare Parts are only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!
1 | ULVAC | 1014896 | Viewport EPD |
2 | ULVAC | 1016689 | GDS-Shield |
3 | ULVAC | 1016698 | Bottom Ring |
4 | ULVAC | 1018517 | Baffle |
5 | ULVAC | 1018518 | Top Ring 2 Sections |
6 | ULVAC | 1019020 | Top Plate |
7 | ULVAC | 101980/1016738 | Bottom Plate (Combined Parts) |
8 | ULVAC | 2301700 | TUBE, CERAMIC |
9 | ULVAC | 2301856 | RING, CERAMIC, ASIQ |
10 | AXCELIS | 17208240 | TE Aaperature |
11 | AXCELIS | 17164510 | TE Insulator |
12 | AXCELIS | 17174410 | TE Insulator |
13 | AXCELIS | 392171 | Sapphire Tube |
14 | AXCELIS | 47402 | Quartz Lenz UV Backed |
15 | AXCELIS | 412961 | Disk Sapphire |
16 | AXCELIS | 280241 | Heater Window/Lower Quartz Plate |
17 | AXCELIS | 405241 | Heater Window/Quartz Plate Lower Sapphire Coated |
18 | AXCELIS | 396041 | Tube Quartz Cooling |
19 | AXCELIS | 281401 | Quartz Tube |
20 | AXCELIS | 203669 | Bulb H Mod 200 PCU |
21 | AXCELIS | 405231 | Sapphire Pin |
22 | AXCELIS | 401261 | Orifice Sapphire |
23 | AXCELIS | 472811 | Baffle Cooling Heater Window |
24 | AXCELIS | 478401 | Showerhead Upper Shielded |
25 | AXCELIS | 479312 | Showerhead 8″ |
26 | AXCELIS | 313806 | Thermocuple Assy |
27 | AXCELIS | 319371 | Assy Magnetron Water Cooled |
28 | AXCELIS | 47404 | Quartz Plate |
29 | Tel | ES1D10-309946-12 | Ring Focus Silicon |
30 | Tel | 1810-221471-24 | Showerhead |
31 | Tel | 3D05-100010-11 | Shower Head Electrode Cover |
32 | Tel | 1D10-101551-11 | Baffle Plate 8″ |
33 | Tel | 1D10-101475-11 | Baffle Plate 8″ |
34 | Tel | 1D10-202988-11 | DRM2 Cover Bellows 8″ |
35 | Tel | 1D10-202204-12 | Electrode Upper Vespel Insert W/Monitor |
36 | Tel | 1D10-100670-13 | Electrode Upper |
37 | Tel | 1D10-201429-15 | Electrode Upper |
38 | Tel | 1D10-100854-15 | DRM2 Baffle Plate |
39 | Tel | 1D10-303124-21 | DRM2 Shield Depo |
40 | Tel | 1D10-303124-21-CT | Shield Depo |
41 | Tel | 1D10-303124-21-CT | Shield Depo |
42 | Tel | 1810-221584-12 | Upper Cooling Plate |
43 | Tel | 1810-221471-24 | Electrode, Si 100% |
44 | Tel | 1D10-302209-14 | Focus Ring Si |
45 | Tel | 1D05-300161-11 | Support Shield Depo Q-S1 |
46 | Tel | 1D05-200020-11 | Shield Depo QU-A-3 |
47 | Tel | 1D05-200033-11 | Support Shield Depo Q-S5 |
48 | Tel | 1D05-400022-14 | Window Shield Depo |
49 | Tel | 1D05-300162-70H CT | Focus Ring Quartz |
50 | Tel | 1D05-300162-11 | Focus Ring Quartz |
51 | Tel | 1D10-407114-11 | Kapton Sheet Window |
52 | Tel | 1D10-406500-11 | Pin Window Peelc B-1 |
53 | Tel | 1D10-406499-11 | Sapphire Window |
54 | Tel | 1D10-309697-11 | Window DEP P-1 (Hole) |
55 | Tel | 1D05-400022-14 | Window Shield Depo (DRM 2) |
56 | Tel | 1D10-404285-11 | Pin Adjust |
57 | Tel | 1D10-401935-12 | Screw Blind A (DRM 2) |
58 | Tel | 1D10-401106-12 | Plug Thin (DRM 2) |
59 | Tel | 1D10-402088-11 | Plug SR (DRM 2) |
60 | Tel | 1D10-403927-11 | Plug Thick (DRM 2) |
61 | Tel | 1D10-302057-11 | JIG Gap |
62 | Tel | 1D10-405256-22 | Screw for Upper Quartz Flat (88DD) |
63 | Tel | 1D10-406675-11 | Vespel plug for Focus Ring (88DD) |
64 | Tel | 1D10-406875-11 | Pin Support Q-S1 (88DD) |
65 | Tel | 1D10-405257-11 | Washer Kapton A (88DD) |
66 | Tel | 3D10-201235-13 | Plate, Cooling C912-240-0.2 (HT) |
67 | Tel | 3D10-100844-11 | Plate, Shiled (TE GND FLAT) |
68 | Tel | 3D10-101152-13 | Plate, Exhaust Y-AL |
69 | Tel | 3D10-101190-11 | Ring STM Shield Y-AL |
70 | Tel | 3D10-100845-11 | Shuttle BTM Type Y-AL |
71 | Tel | 3D10-302734-12 | Shield Depo (TE-GLEX45-FLAT) |
72 | Tel | 1D10-201588-12 | Upper Electrode W/Monitor |
73 | Tel | 1D10-202177-12 | Upper Electrode Vespel Insert |
74 | Tel | 1D10-303124-21 | DRM2 Depo Shield |
75 | Tel | 1D10-406499-11 | Sapphire Window |
76 | Tel | 1810-329157-11M | Modify Inner Focus Ring (SCCM) |
77 | Tel | ES1D10-310020-11 | Si Focus Ring |
78 | Tel | HDL99-040302R2 | Focus Ring 2 piece Ceramic Inner |
79 | Tel | 1105-200159 | Si Collar Ring |
80 | Tel | 1D10-100854-15 | DRM2 BAFFLE PLATE |
81 | Tel | 1D10-101398-11 | BAFFLE PLATE |
82 | Tel | 1D10-101475-11. | BAFFLE PLATE |
83 | Tel | 1D10-101551-11 | BAFFLE PLATE |
84 | Tel | 1D10-102848-13 | BAFFLE PLATE Y203 |
85 | Tel | 1D10-200734-14 | COVER BELLOW |
86 | Tel | 1D10-202177-12 | UPPER ELECTRODE, VESPEL INSERT |
87 | Tel | 1D10-201429-15 | UPPER ELECTRODE |
88 | Tel | 1D10-201588-12 | UPPER ELECTRODE W/MONITOR |
89 | Tel | 1D10-202204-12 | UPPER ELECTRODE, VESPEL INSERT, W/MONITOR |
90 | Tel | 1D10-202988-11 | DRM2 COVER BELLOW |
91 | Tel | 1D10-204418-12 | BELLOW COVER Y203 |
92 | Tel | 1D10-204419-12 | BELLOW COVER Y203 |
93 | Tel | 1D10-204338-13 | UPPER ELECTRODE Y203 |
94 | Tel | 1D10-303124-21 | DRM2 DEPO SHIELD |
95 | Tel | 1D10-309697-11 | DEPO WINDOW |
96 | Tel | 1D10-315183-15 | DEPO SHIELD Y203 |
97 | Tel | 1D10-406499-11 | Window Sapphire |
98 | Tel | 3M87-029068-16 | Showerhead (High Temp) 300mm |
99 | Tel | 3M10-150159-12 | Showerhead (Low Temp) 300mm |
100 | Tel | 3M10-352195-11 | Block (Low Temp) 300mm |
101 | Tel | 3M10-101634-11 | Low Plate 300mm |
102 | Tel | 3M10-101633-11 | Middle Plate 300mm |
103 | Tel | 3M10-313563-11 | Diffuser Tube 300mm |
104 | Tel | 3M10-410298-11 | Diffuser Tube 300mm |
105 | Tel | 3D10-404449-11 | Gaskets Type TEL Shin 12″ |
106 | Tel | 2L10-354181-11 | Gaskets Type TEL 4W/mk |
107 | Tel | 2L10-354527-11 | Gaskets Type TEL 2W/mk |
108 | Tel | 3D10-100280-11 | TE-12″ Silicon Cathode (H836) |
109 | Tel | 3D10-302020-11 | Vigus- 12″ Silicon Cathode (H912) |
110 | Tel | 3D10-250316-11 | Shin-12″ Silicon Cathode Inner (H1283) |
111 | Tel | 3D10-201579-11 | Shin-Electrode Upper T10-75-C708 |
112 | Tel | 3D10-201761-11 | Shin-Electrode Upper D38 (DM-SE) |
113 | Tel | 3D10-201784-11 | Shin-Electrode Upper D38 (DM-SE) |
114 | Tel | 3D10-202364-12 | Shin-Si CEL Inner (TE-T10-P-Laby) |
115 | Tel | 3D10-202175-11 | Shin-CEL Inner (TE-T10-P) |
116 | Tel | 3D10-201089-13 | Telius – 12″ Focus Ring |
117 | Tel | 3D10-200499-11 | Telius – 12″ Focus Ring |
118 | Tel | 3D10-201348-11 | Telius – 12″ Focus Ring |
119 | Tel | 3D10-201448-11 | Telius – 12″ Focus Ring |
120 | Tel | 3D10-201448-12 | Telius – 12″ Focus Ring |
121 | Tel | 3D10-201448-13 | Telius – 12″ Focus Ring |
122 | Tel | 3D10-200585-13 | Telius – 12″ Ring Shield Si |
123 | Tel | 3D10-101195-11 | Depo Shield |
124 | Tel | 3805-320070-B1 | Quartz Injector Straight |
125 | Tel | 3805-320072-B1 | Quartz Plug |
126 | Tel | 3805-420016-B1 | Quartz Guide |
127 | EBARA | C-3812-388-0001 | Retaining Ring 48GRV |
128 | ASM | 70055-00907E | Shower Plate SiH4 & TEOS 200mm ASM |
129 | ASM | 70055-70656C | Shower Plate (SiH4) 200mm ASM |
130 | MKS | FB13154 | Circular Torus |
ID-SS5302-2ND
S