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Plasma-Therm SLR 770 ICP Etcher

Categories: Plasma Etcher, Resell Products

Description

Description

Plasma-Therm SLR 770 ICP Etcher is only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!

ICP Process Module (PM)
- High Power/Easy Maintenance ICP Applicator
- 10” (dia.) Lower Electrode
- Ceramic Wafer Clamp
- Helium Backside Cooling
- Configured for 6” Wafers
- Other Wafer Sizes Available
Load Lock Chamber with Linear Robotic Arm
- LL Arm with Programmable Stepper Motor & Controller
- Manual Wafer Loading for 6” & 8” Wafers
Gas Distribution Box with 4ea Gas Channels
- MKS 1479 Metal Sealed Mass Flow Controllers
- Additional Gas Channels Available
RFPP RF5S RF Generator: 500W @ 13.56MHz
RFPP AMN-5 500W Auto Matching Network
RFPP RF20M RF Generator: 2000W @ 2.0MHz
RFPP AMN-20 2KW Auto Matching Network
2ea RFPP AMNPS-2A Auto Matching Network Controllers
SHIMADZU TMP1003 MAG LEV Turbo Pump with Controller
VAT 64 Rectangular Throttle Valve with VAT PM5 Controller
INFICON MPG500 Ion Gauge on ICP Chamber
MKS 325 Moducell Pirani Gauge on Load Lock
Watlow Three Zone Chamber Heater Controller
Industrial PC Running LINUX OS, Intel I7 CPU @ 3.4GHz, 16GB RAM and 500GB SSD
All Analog & Digital I/O Modules Controlled by BECKHOFF Ethernet I/O Via Modbus TCP/IP Communications Protocol
All Pneumatic Valves Controlled by SMC Modules Via Modbus TCP/IP Communications Protocol
All SMC Pneumatic Valves Available from SMC USA
Standard 22” Flat Panel Monitor, Keyboard & Mouse
Edwards QDP80 Dry Roughing Pump on Process Module-Option
Agilent DS 302 Mechanical Pump on Load Lock -Option
SMC HRR018 Rackmount Chiller; 5-45° C Temperature Range-Option
Electrical Disconnect Box – 208VAC, 60Hz, 3 Ph

Condition:

System Completely Remanufactured
Guaranteed to Meet or Exceed OEM Specifications

Location: USA

ID-OEM-Model

S

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