Description
Parts list of Lam and Novellus parts. Please contact us if you are interested in any of them.
| OEM | TOOL TYPE | PART NAME | PART NUMBER ON ITEM |
| LAM | 44XX | Etcher Inner Gate Valve Drive | 853-012200-002 |
| LAM | 44XX | Outer Gate Assy | 853-012350-002 |
| LAM | 44XX | HARMONIC ARM DRIVE ASSEMBLY | 853-012123-001 |
| LAM | 44XX | MONITOR ASSY | 852-017500-003 |
| LAM | 44XX | Wafer Shuttle assy | 853-012550-001 |
| LAM | 44XX | ASSY EDGE SENSOR | 853-012500-002 |
| LAM | 44XX | SPINNER ASSY | 853-012525-001 |
| LAM | 44XX | SEAL PLATE? | 853-020936-002 |
| LAM | 44XX | BRAKE,GAP,ASSY | 853-011141-003 |
| LAM | 44XX | LAM MINI MATCH | 853-015130-503 |
| LAM | 44XX | RESISTOR PACK | 853-017340-202 |
| LAM | 44XX | UPPER ARM ASSEMBLY | 853-012100-001 |
| LAM | 44XX | MANOMETER 100TORR | 853-017643-003 |
| LAM | 44XX | TC, GAP HEATER,THERMOCOUPLE,ANAFAZE | 853-034112-003 |
| LAM | 44XX | HARD DRIVE | |
| LAM | 44XX | WAFER HANDLER | 715-130080-008 |
| LAM | 44XX | End Effector | 715-130092-008 |
| LAM | 44XX | ADAPTORR MODEL AC-2 | 796-6238-001 |
| LAM | 44XX | TRANSFORMER & CAP | 853-017370-001 |
| LAM | 44XX | TWIN FAN ASSY | 853-017335-101 |
| LAM | 44XX | INTERFACE PCB | 810-017001-010 |
| LAM | 44XX | STEPPER MOTOR MOTHER BOARD | 810-17010-001 |
| LAM | 44XX | INTERFACE PCB | 044-612 |
| LAM | 44XX | PCB | 810-017075-003 |
| LAM | 44XX | ASSY DIP HIGH FREQUENCY | 810-017003-004 |
| LAM | 44XX | PCB HEARTBEAT | 810-17012-002 |
| LAM | 44XX | FORCE COMPUTERS PCB | 810-017038-002 |
| LAM | 44XX | FORCE COMPUTERS PCB | 810-017034-300 |
| LAM | 44XX | FORCE COMPUTERS PCB | 810-017035-001 |
| LAM | 44XX | ASSEMBLY HARD DRIVE, IDE W/CONTROLLER | 853-190023-001 |
| LAM | 44XX | GAP MOTOR CONTROLLER BOARD | 810-17018 |
| LAM | 44XX | GAP DRIVE AMP INTERLOCK BOARD | 810-17013 |
| LAM | 44XX | INTERFACE PCB/ORBITAL GAS BOX PCB | 810-017074 |
| LAM | 44XX | SOLENOID INTERLOCK BOARD/SOLENOID INTLK PCB | 810-17004-001 |
| LAM | 44XX | 16 CHANNEL HEAT/COOL BOARD | 810-17082 |
| LAM | 44XX | STEPPER MOTOR DRIVER BOARD | 810-017016-001 |
| LAM | 44XX | CONVECTRON TUBE INTERFACE BOARD | 810-017007-001 |
| LAM | 44XX | TEMP SENSOR AMP | 810-17008-001 |
| LAM | 44XX | WELDMENT | 839-011237-001 |
| LAM | 44XX | ASSY GAP DRIVE PROTECTOR | 853-011168 |
| LAM | 44XX | END POINT DETECTOR | 853-001983 |
| LAM | 44XX | Wafer Shuttle assy | 853-012550-001 |
| LAM | 44XX | NOISE FILTER ZCAT2035-1330 | 037-000909-1 |
| LAM | 44XX | SOLENOID INTERLOCK BOARD | 810-17004-001 |
| LAM | 44XX | NOISE FILTER TRCN-40-27-15 | 037-001122-1 |
| LAM | 44XX | PLATE BAFFLE UPPER 8.3 | 715-011912-083 |
| LAM | 44XX | COVER BELL | 1D10-402315-11 |
| LAM | 44XX | OXA UL 805 | |
| LAM | 44XX | UPPER COOLING RING | 853-011555-001 |
| LAM | 44XX | LAM COOLING RING LOWER ELECTRODE | 715-011626-001 |
| LAM | 44XX | 14021T-93812 | |
| LAM | 44XX | JIG P-PIN SHAFT | 1D10-303003-11 |
| LAM | 44XX | ASSY GAP DR MOT PTCTR & B/O | 853-011168-002 |
| LAM | 44XX | PUMP | 853-013542-002-1 |
| LAM | 44XX | ASSY DIP HIGH FREQUENCY | 810-017003-004 |
| LAM | 44XX | PCB ASSY DUAL DC MTR | 233-2974-29 |
| LAM | 44XX | CHAMBER GARD | WG3D228R2 |
| LAM | 44XX | MPS-4/ASSY GAP DRIVE PROTECTOR | 853-011168-001 |
| LAM | 44XX | RETAINER WINDOW | 715-011039-001 |
| LAM | 44XX | CVP CLASS BC/RF SWITCH BOX | 853-017163-001 |
| LAM | 44XX | RESISTOR BANK | ? |
| LAM | 44XX | CHILLER RESISTIVITY | 810-025369-002 |
| LAM | 44XX | 4 PIN LIFTER PCB | 853-017435-001 |
| LAM | 44XX | OUTER GATE ASSY | 853-012350-002 |
| LAM | 44XX | CHAMBER RIM | ? |
| LAM | 44XX | CHAMBER LID | 715-11035-001 |
| LAM | 44XX | CHAMBER | 715-011002-002 |
| LAM | ELECTROINC MODULE | TRK2/5 | |
| LAM | ELECTROINC MODULE | NO NUMBER | |
| LAM | MICROSCOPE | Y8000080 | |
| LAM | PNEUMATIC CONTROOL UNIT | Y7654000 | |
| LAM | WAFER DISPENSER | 47603203 | |
| LAM | KENSINGTON STAGE | Q2SL | |
| LAM | WAFER LOADERS | Y7603203 | |
| LAM | MONITOR | 38-C34DND-01 | |
| LAM | KENSINGTON STAGE | Q2SL | |
| LAM | WAFER DISPENSER | EMA 54-010633 A 0501 | |
| LAM | WAFER DISPENSER | 18-010698 | |
| LAM | COHU CAMERA POWER UNIT | 6712-2000/0000 | |
| LAM | POWER UNIT | Q2515 | |
| LAM | Etch | Board, ADIO A0 | 810-17031-002 |
| LAM | Etch | Board, Solenoid Interlock | 810-17004-1 |
| LAM | TOOL ALIGN 6″ WFR,W/TAPE | 853-330940-006 | |
| LAM | RING ACTR B.A.C. | 715-330151-004 | |
| LAM | SHLD B.A.C THK | 715-330161-002 | |
| NOVELLUS | GSNX New Elevator Alignment Tool | ||
| NOVELLUS | C2 ALTUS | ASSY,VENT PURGE | 02-834770-00 |
| NOVELLUS | C2 ALTUS | IO CONTROLLER | 27-10157-00 |
| NOVELLUS | C2 ALTUS | LOCD LOCK DOOR ACTUATOR LEFT ASSY | |
| NOVELLUS | C2 ALTUS | LOCD LOCK DOOR ACTUATOR LEFT ASSY | |
| NOVELLUS | C2 ALTUS | VAT VALVE ASSY | 02-115275-00 |
| NOVELLUS | C2 ALTUS | VAT VALVE ASSY | 02-115274-00 |
| NOVELLUS | C2 ALTUS | TYLAN GENERAL ADAPTORR MODEL AC2 | 27-053667-00 |
| NOVELLUS | C2 ALTUS | PNEUMATIC SOLENOID ASSY | 02-828715-00 |
| NOVELLUS | C2 ALTUS | ASSY,FLAT PNL DISPP PWR | 02-041243-00 |
| NOVELLUS | C2 ALTUS | INDEXER END EFFECTOR | 15-055682-00 |
| NOVELLUS | C2 ALTUS | INDEXER END EFFECTOR | 15-110374-01 |
| NOVELLUS | C2 ALTUS | LEFT LOADLOCK INTFC PCB | 03-034719-00 |
| NOVELLUS | C2 ALTUS | RIGHT LOADLOCK INTFC PCB DLCM-S | 03-034720-00 |
| NOVELLUS | C2 ALTUS | BOARD,VALVE,RLL,DLCM/HILO | 60-10131-00 |
| NOVELLUS | C2 ALTUS | BOARD,VALVE,LLL,DLCM/HILO | 60-10130-00 |
| NOVELLUS | C2 ALTUS | KEYENCE ASSY | 02-834711-00 |
| NOVELLUS | C2 ALTUS | TEACH PENDANT | |
| NOVELLUS | C2 ALTUS | DLCM POWER CONTROL ASSY | C2-DLCM-S0790 |
| NOVELLUS | C2 ALTUS | ADVANCE POWER SUPPLY | |
| NOVELLUS | C2 ALTUS | POWER SUPPLY | |
| NOVELLUS | C2 ALTUS | POWER SUPPLY | |
| NOVELLUS | C2 ALTUS | POWER SUPPLY | |
| NOVELLUS | C2 ALTUS | POWER SUPPLY | |
| NOVELLUS | C2 ALTUS | VOLGEN ESK70U-1515 | ESK70U-1515 |
| NOVELLUS | C2 ALTUS | FLAT SCREEN NATIONAL DISPLAY SYSTEMS DM-3S12/ZN | DM-3S12/ZN |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | I/O CONTROLLER | 27-810157-00 |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | I/O CONTROLLER | 27-10157-00 |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | CONTROLLER | 02-810123-00 |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | ASSY VACUUM UTILITIES WEVD | 02-810131-00 |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | PNEUMATIC PANEL | 02-810546-00 |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | POWER & SIGNAL INTERFACE BOX | 03-10766-00 |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | SETRA DATUM 2000 | SETRA DATUM 2000 METER |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | CVD-W LPB/UPS | 02-810540-10 |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | VOLGEN EXU-156R6 | EXU-156R6 |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | VOLGEN EXU-246R3 | EXU-246R3 |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | VOLGEN ESK70U-1212A | ESK-1212A |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | VOLGAN SX100U-15S | SX100U-15S |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | CVD-W GAS BOX | 02-824316-01 |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | BROOKS 5866 RT SERIES PRESSURE CONTROLLER | 22-10502-00 |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | CARDWELL 154-30-1 | |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | PLATE MTG PED | 16-032558-00 |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | PLATE,MOUNTING,PED | 16-032609-00 |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | ASSY PIN LIFT 1 AND 2 | 02-00470 |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | NDEXER, WAFER,EXCLUSION OPTION,200MM | 15-00934-02 |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | MANIFOLD RING | |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | CVDW INTERLOCK ASSY PCB 03-810748-00 | 03-10748-00 |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | DLCM-LITE LOCAL POWER BOX B/O BOARD | 02-021383 |
| NOVELLUS | C2 ALTUS (W CHAMBER MODULE) | GAS BOX PCB | 03-10738-00 |
| NOVELLUS | C2 ALTUS | COMP CONT,P100/16M | 02-834310-00 |
| NOVELLUS | C2 ALTUS | CONTROLLER PM 250 | 233-4148-86 |
| NOVELLUS | C2 ALTUS | I/O CONTROLLER | 27-810157-00 |
| NOVELLUS | C2 ALTUS | TRANSPECTOR | TSP TH100 |
| NOVELLUS | C2 ALTUS | MODEL 4421 RF POWER METER | 3509 / 4421 |
| NOVELLUS | C2 ALTUS | DIAGNOSTIC HUB | 10087285 |
| NOVELLUS | C2 ALTUS | VAT VALVE ASSY | 02-115275-00 |
| NOVELLUS | C2 ALTUS | VAT VALVE ASSY | 02-115274-00 |
| NOVELLUS | C2 ALTUS | PCB | 001-5526-01 |
| NOVELLUS | C2 ALTUS | CVD-W INTERLOCK | 03-10748-00 |
| NOVELLUS | C2 ALTUS | C2 HEATER PEDESTAL | 02-033134-00 |
| NOVELLUS | C2 ALTUS | POWER SUPPLY | ESK70U-1515 |
| NOVELLUS | C2 ALTUS | POWER SUPPLY | EXU-246R3 |
| NOVELLUS | C2 ALTUS | MODULE CONTROLLER P100 | 02-034310-00 |
| NOVELLUS | C2 ALTUS | ARMS | |
| NOVELLUS | C2 ALTUS | MOER 2.25MM | 500027083 |
| NOVELLUS | C2 ALTUS | POWER SUPPLY 12V | 233-2215-46 |
| NOVELLUS | C2 ALTUS | AC POWER INPUT | 233-2219-92 |
| NOVELLUS | C2 ALTUS | POWER SUPPLY & CIRCUIT BREAKER | |
| NOVELLUS | C2 ALTUS | PM SERVO MOTORS | JGHT-4921-2 |
| NOVELLUS | C2 ALTUS | POWER ONE POWER SUPPLY | PFC500-1024 |
| NOVELLUS | C2 ALTUS | TRANSPECTOR | TSP TH100 |
| NOVELLUS | C2 ALTUS | MOER RINGS 2.5 | |
| NOVELLUS | C2 ALTUS | INDEXER TONGS | |
| NOVELLUS | C2 ALTUS | PNEUMATIC BOARD | 02-810546-00 |
| NOVELLUS | C2 ALTUS | POWER SUPPLY | EXU-246R3 |
| NOVELLUS | C2 ALTUS | RIGHT LOADLOCK INTFC PCB | 03-834720-00 |
| NOVELLUS | C2 ALTUS | CVD-W INTERLOCK | 03-10748-00 |
| NOVELLUS | C2 ALTUS | I/O CONTROLLER | 27-810157-00 |
| NOVELLUS | C2 ALTUS | INTF CVD-W & ETCH | 03-10355-00 |
| NOVELLUS | C2 ALTUS | ASSY,LWR SPINDLE | 03-810534-02 |
| NOVELLUS | CVD | PEDESTAL | 050-01-912-0100 |
| NOVELLUS | CVD | DEGAS ASSY QUAD 4 CHANNEL | 02-103445-00 |
| NOVELLUS | CVD | SERIES 11 BOARD | 3200-1065-01 |
| NOVELLUS | CVD | DIRECTIONAL POWER SENSOR | 4025 |
| NOVELLUS | CVD | SENSOR INTEGRATION PLATFORM | TWSPK001 |
| NOVELLUS | SABRE | HEATER PEDESTAL | 02-287781-00 |
| NOVELLUS | SABRE | HOST PORT CONTROL | 27-260607-00N |
| NOVELLUS | SABRE | CONTROL BOX | 03-056905-00 |
| NOVELLUS | SABRE | CONTROL BOX | 119370R |
| NOVELLUS | SABRE | PLATFORM CONTROLLER | 02-168112-00 |
| NOVELLUS | SABRE | PLATFORM CONTROLLER | 02-257935-00 |
| NOVELLUS | SABRE | VECTOR DRIVE | 27-130440-00 |
| NOVELLUS | INOVA | NOVELLUS INOVA | |
| NOVELLUS | CPW 6/480 | 04-722791-02 | |
| NOVELLUS | CVD | MOUNT DRIVE SHAFT RF ENCLOSERE | 15-344507-00 |
| NOVELLUS | CVD | HEATER PEDESTAL | 02-145733-00N |
| NOVELLUS | CVD | FIXTURE BLANK LEFT LTM VCTR | 72-252834-02 |
| NOVELLUS | CVD | FIXLOAD ALIGNMENT PDO | 72-254110-00 |
| NOVELLUS | CVD | FIXTURE BLANK RIGHT LTM VCTR | 72-252834-01 |
| NOVELLUS | CVD | POWER METER | 4421 |
| NOVELLUS | CVD | BAR CENTRE PLANE | 15-155151-00 |
| NOVELLUS | CVD | COVER PROTECTIVE PM | 15-251882-00 |
| NOVELLUS | CVD | HOIST AND CRANE FOR VACUUM ROBOT | 79-169649-00 |
| NOVELLUS | CVD | HOIST AND CRANE | E20-13087-05-000 |
| NOVELLUS | CVD | DUCT | 16-177756C01 |
| NOVELLUS | CVD | TOOL SUSCEPTOR | 16-185099D01 |
| NOVELLUS | CVD | EXHAUST FLANGE | 0513012-107 |
| NOVELLUS | CVD | PEDESTAL | 02-159684-00N |
| NOVELLUS | CVD | PEDESTAL | 02-145732-00N |
| NOVELLUS | CVD | AMP PWB PCB | 13-406263-01 |
| NOVELLUS | CVD | PEDESTAL | 02-176383-00 |
| NOVELLUS | CVD | PEDESTAL | 050-01-912-0100 |
| NOVELLUS | CVD | MFC FC-7820C | 22-133312-00 |
These items are subject to prior sale without notice.
SS6044
