Main Maker

100 PECVD

Oxford Plasmalab System 100 PECVD, Located at San Jose,CA, USA.  They were working. We sell them at AS IS,WHERE IS, without warranty, return. They are subject to prior sale without notice.

SKU: STS Multiplex ICP -5-1-1-1-1-1 Category:

Description

PECVD  Oxford Plasmalab 100, Located at San Jose,CA, USA.  They were working. We sell them at AS IS,WHERE IS, without warranty, return. They are subject to prior sale without notice.
  1. Foreline
  2. LF Generator Upgrade
  3. NF3 Upgrade
  4. PCW piping
  5. Process Gases:
  • Silane
  • Diborane
  • Phosphine
  • Trimethylborane
  • Nitrous Oxide
  • Methane
  • Hydrogen

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