Description
MRC942 Sputter System
Load locked, 2 target sputter system. Handles substrates up to 12″ square. Present targets are ITO and TiW, but can be changed to buyer preference. Main chamber is cryo-pumped, and the load lock is heated. Subsystem details are:
CTI Cryo-torr 8 cryopump
CTI Cryogenics 8200 cryo-compressor
ITO Target
TiW target
Huttinger PFG-300 RF power supply
Advanced Energy MDX DC power supply
GE / Fanuc Programmable Logic Controller
This Item is subject to prior sale without notice.
SS132402887217
