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MRC Spare Parts

Description

Please contact us for the availability of the following  MRC Spare Parts

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The items are subject to prior sale without notice. These items are only for end users.

Item Description
1 ACG-10B ENI ACG-10B-02 RF Generator 1000W MRC Eclipse Star Used Tested Working
2 AMAT Applied Materials 404663 300mm Source 4 CPI-VMO Chamber Copper Used Working
3 Applied Ceramics 102054681 Cylinder MRC Eclipse Star New
4 Applied Ceramics 300075811 Insulator Ring MRC Eclipse Star New
5 CTI-Cryogenics 8043074G036 Cryopump Helium Line Supply/Return Set of 2 MRC Used
6 CTI-Cryogenics 8107814G003 8F Cryopump CRYO-TORR MRC Eclipse Star Used Working
7 CTI-Cryogenics 8112898G005 8F Cryopump On-Board 8112582G001 MRC Eclipse Used
8 CTI-Cryogenics 8112898G005 8F Cryopump On-Board 8132030G002 MRC Eclipse Used
9 CTI-Cryogenics 8112898G005 8F Cryopump On-Board MRC Eclipse Star Used Working
10 CTI-Cryogenics 8116136G001 On-Board Waterpump MRC Eclipse Star Used Working
11 CTI-Cryogenics 8120948G001 On-Board Waterpump MRC Eclipse Star Used Working
12 Gasonics 90-2607 Display Decoder Board PCB Rev. A Used Working
13 Gasonics 90-2608 PCA Load Lock Interface Board PCB Rev B Used Working
14 Intel PBA 115970-008 Multibus PCB Card MRC Eclipse Star Used Working
15 Intel PBA 115970-009 Multibus PCB Card MRC Eclipse Star Used Working
16 Intel PBA 143461-014 Single Board Computer 88/40A PCB MRC A116470 Eclipse Used
17 Intel PBA 143461-015 Single Board Computer 88/40A PCB MRC Eclipse Used Working
18 Key GV-6AP-4010780 Gate Valve Throttle Valve Assembly MRC Eclipse A112990 Used
19 Key High Vacuum GV-6AP-4010780 Gate Valve MRC Eclipse Star Used Working
20 Key High Vacuum GV-6-AP-MRC Gate Valve MRC Eclipse Star Used Working
21 MDX AE 3152194-004 Magnetron Drive 30kW Master Slave Set MRC Eclipse Star Used
22 MDX AE 3152194-013 Magnetron Drive 20kW Delta Master Slave Set MRC Eclipse Used
23 MDX-10K AE Advanced Energy 2194-008-R DC Power Supply SLAVE Used Tested Working
24 MDX-10K AE Advanced Energy 2194-008-X DC Power Supply Slave Used Tested Working
25 Metron D131219 SST 200mm Filler Ring TEL Tokyo Electron MRC Used Working
26 MRC 701795-0 HOLDER WAFER HBUMP 6″
27 MRC D122742 HOLDER WAFER HBUMP 6″
28 MRC D122742 HOLDER WAFER HBUMP 6″
29 MRC Material Research Wafer Chuck RF Cylinder A118356 Rev. B Eclipse Used
30 MRC Material Research Wafer Chuck RF Cylinder A118357 Rev. B Eclipse Used
31 MRC Material Research Wafer Chuck RF Cylinder A121179 Rev. C Eclipse Star Used
32 MRC Material Research Wafer Chuck RF Cylinder S-23503-1 Eclipse Star Used
33 MRC Material Research Wafer Chuck RF Cylinder S-A00290 Eclipse Star Used
34 MRC Materials Research 022469 Asyst Gas PLC Controller Used Working
35 MRC Materials Research 026146 RMX Magnet Assembly TARGE GUN Eclipse Star Used
36 MRC Materials Research 115970-008 Multibus PCB Card Eclipse Used Working
37 MRC Materials Research 25438-2100 Plenum Chuck Assembly Eclipse Star As-Is
38 MRC Materials Research 368789-0 Asyst Theta Arm Set with Controller Used
39 MRC Materials Research 618793-002 Control PCB PSBC221S Eclipse Used Working
40 MRC Materials Research 884-29-000 Control Board 3MI PCB Used Working
41 MRC Materials Research 884-53-000 Transfer Arm PCB Rev. B Board Eclipse Used
42 MRC Materials Research 884-53-000 Transfer Arm PCB Rev. C Board Eclipse Used
43 MRC Materials Research 884-53-000 Transfer Arm PCB Rev. E Board Eclipse Used
44 MRC Materials Research 884-98-000 Power Supply PCB Rev. C Eclipse Star Used
45 MRC Materials Research A0789A Plenum Chuck Assembly Eclipse Star Used Working
46 MRC Materials Research A11011 Line Voltage Junction Box Eclipse Star Used
47 MRC Materials Research A110700 RMX Magnet Assembly TARGE GUN Eclipse Star Used
48 MRC Materials Research A110999 883-37-000 I/O Receiver Control Board Rev. B Used
49 MRC Materials Research A111010 Interface System Assembly 990-004552-005 Used
50 MRC Materials Research A112489 125mm Back Plane Heater Eclipse Star New
51 MRC Materials Research A112654 100mm Back Plane Heater Eclipse Star New
52 MRC Materials Research A112990 Throttle Valve Assembly Rev. F Eclipse Star Used
53 MRC Materials Research A112990 Throttle Valve Assembly Rev. H Eclipse Star Used
54 MRC Materials Research A112990 Throttle Valve Assembly Rev. M Disassembled As-Is
55 MRC Materials Research A112990 Throttle Valve Assembly Rev. M Eclipse Star Used
56 MRC Materials Research A114265 Quad 1000 RF Deck Eclipse Star Used Working
57 MRC Materials Research A114569 Index Assembly Rev. A Eclipse Star Used Working
58 MRC Materials Research A114569 Index Assy. Rev. A Eclipse Star Incomplete As-Is
59 MRC Materials Research A114569 Indexer Eclipse Star 200
60 MRC Materials Research A114569 Indexer Eclipse Star 200mm Used Working
61 MRC Materials Research A114569 Stepper Elevator Assembly Eclipse Star Used
62 MRC Materials Research A114569 Stepper Motor Assembly Eclipse Star Used Working
63 MRC Materials Research A114570 Cassette A Stepper & Shaft Elevator Eclipse Used
64 MRC Materials Research A114570 Cassette A Stepper Elevator Eclipse Star Used
65 MRC Materials Research A114570 Cassette B Stepper & Shaft Elevator Eclipse Used
66 MRC Materials Research A114570 Cassette B Stepper Elevator Eclipse Star Used
67 MRC Materials Research A114570 Stepper Elevator Assembly Eclipse Star Used
68 MRC Materials Research A114571 Wafer Aligner Assembly Eclipse Star A114575 Used
69 MRC Materials Research A114575 Index Chuck Assembly Eclipse Star Used Working
70 MRC Materials Research A114929 Plenum Chuck Assembly Eclipse Star Used Working
71 MRC Materials Research A115015 Remote Rev. B 14H1351A Eclipse Star System Used
72 MRC Materials Research A115015 Remote Rev. C Eclipse Star Sputtering System Used
73 MRC Materials Research A115105 KBD Remote Assembly Eclipse Star Used Working
74 MRC Materials Research A115893 Back Plane Heater 100mm Eclipse Star New
75 MRC Materials Research A116582 10/10kW DC Tower B Frame Eclipse Star As-Is
76 MRC Materials Research A116584 30/30kW DC Tower B Frame Eclipse Star As-Is
77 MRC Materials Research A116985 High Voltage Assembly A118144 Lot of 2 As-Is
78 MRC Materials Research A117198 Power Module A119126 Rev.C Eclipse Star Used
79 MRC Materials Research A117198 Power Module D117199 Rev. B Eclipse Star Used
80 MRC Materials Research A117198 Power Module D117199 Rev. J Eclipse Star Used
81 MRC Materials Research A117198 Power Module Rev. K Eclipse Star Used Working
82 MRC Materials Research A118144 Autotune RF Network Used Working
83 MRC Materials Research A118144 Wafer Chuck Head Cylinder S-23503-1 Eclipse Used
84 MRC Materials Research A118144 Wafer Chuck RF Cylinder Rev. B Eclipse Star Used
85 MRC Materials Research A118144 Wafer Chuck RF Cylinder Rev. C Eclipse Star Used
86 MRC Materials Research A118144 Wafer Chuck RF Cylinder Rev. F Eclipse Star Used
87 MRC Materials Research A118144 Wafer Chuck RF Cylinder Rev. G Eclipse Star Used
88 MRC Materials Research A118173 10/30kW DC Tower B Frame Eclipse Star As-Is
89 MRC Materials Research A118439 Power Control Module Eclipse Star Used Working
90 MRC Materials Research A119124 RMX Magnet Assembly A119182 RD Eclipse Star Used
91 MRC Materials Research A119124 RMX Magnet Assembly TARGE GUN A119182 RB Used
92 MRC Materials Research A119124 RMX Magnet Assembly TARGE GUN D101-131 Used
93 MRC Materials Research A119124 RMX Magnet Assembly TARGE GUN Rev. M1 Used
94 MRC Materials Research A119124 RMX Magnet Assembly TARGE GUN Used Working
95 MRC Materials Research A119909 RF Module Rev. E Eclipse Star TEL Used Working
96 MRC Materials Research A120024 Remote Sputtering System Eclipse Used Working
97 MRC Materials Research A120466 Power Module Rev. A Eclipse Star TEL Used Working
98 MRC Materials Research A120516 Load Lock Door Eclipse Star New Surplus
99 MRC Materials Research A120946 Chamber Assembly Eclipse Star Used Working
100 MRC Materials Research A121208 Power Supply Module Eclipse Star Used Working
101 MRC Materials Research A121214 High Voltage Source Rev. D Eclipse Star Used
102 MRC Materials Research A121893 100mm Back Plane Heater Eclipse Star New
103 MRC Materials Research A122887 Chamber Source Assembly S-A00290 Used Working
104 MRC Materials Research A122887 Wafer Chuck RF Cylinder Assembly Eclipse Used
105 MRC Materials Research A125807 Back Plane Heater 150mm Eclipse Star New
106 MRC Materials Research A126387 RMX Magnet 51K40GN-AW TARGE GUN Eclipse Star Used
107 MRC Materials Research A126387 RMX Magnet Assembly TARGE GUN Eclipse Star Used
108 MRC Materials Research A129350 SS Relay Assembly Eclipse Star New
109 MRC Materials Research Asyst 06764 001 Vacuum Arm Controller 023092 Eclipse Used
110 MRC Materials Research D112823 I/O Intec Wrist 150mm 6 Inch A114645 Eclipse Used
111 MRC Materials Research D119691 12″ Preclean Bell Jar 4629211-0001 Eclipse Used
112 MRC Materials Research DC Tower A Frame Eclipse Star Untested As-Is
113 MRC Materials Research Eclipse Front Plane Heat 300mm Used Working
114 MRC Materials Research Plenum Chuck Head S-A00290 Nupro SS-BNV51-C Eclipse Used
115 MRC Materials Research Plenum Wafer Chuck Head Mosier S-A00290 Eclipse Star Used
116 MRC Materials Research Plenum Wafer Chuck Head S-A00290 Eclipse Star Used
117 MRC Materials Research RMX Magnet 51K40GN-AW TARGE GUN Eclipse Star Used Working
118 MRC Materials Research RMX Magnet AlCu.2% TARGE GUN NCI-13D3 Eclipse Used
119 MRC Materials Research RMX Magnet AlCu.5% TARGE GUN NCI-13D3 Eclipse Used
120 MRC Materials Research RMX Magnet Assembly AICu.5% TARGE GUN Eclipse Used
121 MRC Materials Research RMX Magnet Assembly AlCu.2% TARGE GUN Eclipse Used
122 MRC Materials Research RMX Magnet Assembly Ti TARGE GUN Eclipse Used
123 MRC Materials Research RMX Magnet Assembly TiW TARGE GUN Eclipse Used
124 MRC Materials Research RMX Magnet Assembly V TARGE GUN Eclipse Used
125 MRC Materials Research Wafer Chuck Head Cylinder Norgren S-A00936 Eclipse Used
126 MRC MR-22377 HOLDER WAFER HBUMP 6″
127 MTI Muto Technology MR-18407 Cu Shields Kit (6″) MRC New
128 MTI Muto Technology MT-49949 Sput #1 TiW Shield Kit MRC D123611-A New
129 MTI Muto Technology MT-49950 Sput #2 TiW Shield Kit MRC D123611-A New
130 MTI Muto Technology MT-49951 Sput #3 Cu Shield Kit MRC D123611-A New
131 MTI Muto Technology MT-49963 Sput #2/3 Cu Shield Kit (6″) MRC D123167 New
132 Opto 22 885-23-000 Relay Board PCB MRC Materials Research Eclipse Star Used
133 Opto 22 PB32P2 Relay Board 884-15-000 MRC Materials Research Eclipse Star Used
134 Opto 22 PB32P2 Relay Board PCB IDC5Q 6 MRC Materials Research Eclipse Star Used
135 Opto 22 PB32P2 Relay Board PCB IDC5Q 8 MRC Materials Research Eclipse Star Used
136 Opto 22 PB32P2 Relay Board PCB ODC5Q MRC Materials Research Eclipse Star Used
137 Pentagon 0021-20572 Advanced 6″ Pedestal AMAT Applied Materials MRC Eclipse New
138 Pentagon Technologies D116049 F V MRC PVD Cu Filler Ring 633000404 New
139 Pentagon Technologies D124821-200A Cu Pie Pan Shield MRC Eclipse Star New
140 Stearns 2-12-1807-00-AE​H Drive Assembly MRC A126257 Eclipse Star Used Working
141 Stearns 2-12-1807-00-AE​H Drive Assembly MRC Eclipse Star Used Working
142 Tadin 815200000 TadiGuard Process & Machine Enhancer Type 006 MRC Eclipse Used
143 TEL Tokyo Electron 42755-0500 Shield Kit MRC Eclipse Star New
144 TEL Tokyo Electron A116007 200mm Back Plane Heater MRC Materials Research New
145 TEL Tokyo Electron A119182 Magnet Winding Assembly RMX 12 MRC Used Working

The items are subject to prior sale without notice. These items are only for end users.

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