Description
Please contact us for the MRC Spare Parts availability of the following parts. Please include the P/N, Description, Quantity and photos if possible.
| OEM | OEM# | Description |
| MRC | 022-101324-1 | Bearing |
| MRC | 022-101377-1 | Bearing |
| MRC | 022-101387-1 | Bearing |
| MRC | 024-000016-1 | Valve, Vacuum (Mark 2) |
| MRC | 024-001529-1 | Assembly, Valve, Coater |
| MRC | 024-001617-1 | Regulator (D.I.W., I.W.) |
| MRC | 024-001926-1 | Gauge, Pressure |
| MRC | 024-003220-1 | Actuator, Rotary |
| MRC | 024-004186-1 | Valve, 2 Way |
| MRC | 024-004437-1 | Dispense, Rotary, 90 Deg, Actuator |
| MRC | 024-005520-1 | Valve, Check |
| MRC | 024-0303502-1 | Valve, Relief |
| MRC | 027-100288-1 | O-Ring, 2.167 Size .103 Thk (Coater) |
| MRC | 080-101490-1 | Arm, Load, Ceramic |
| MRC | 1805-220008-11 | WINDOW, VIEW PORT |
| MRC | 1805-220012-14 | OTR FOCUS RING, QTZ |
| MRC | 1810-221018-14 | SHIELD RING, T5 MODIFICATION, CERAMIC |
| MRC | 1810-221329-12 | SHIELD RING |
| MRC | 1810-221439-02 | UPPER ELECTRODE, SILICON |
| MRC | 1810-221470-24 | UPPER ELECTRODE, SILICON CRYSTAL |
| MRC | 1810-221471-24 | UPPER ELECTRODE, SILICON |
| MRC | 1810-221616-11 | ALUMINUM SHOWERHEAD |
| MRC | 1810-222433-11 | RING, INNER |
| MRC | 1810-222443-11 | RING, INNER 8K-ESC MODIFICATION, CERAMIC |
| MRC | 1810-222662-11 | SHIELD RING, QUARTZ LOW SODIUM GE144 |
| MRC | 1810-224789-11 | ELECTRODE, UPPER (Silicon) |
| MRC | 1810-323878-14 | INNER FOCUS RING, SILICON CYRSTAL |
| MRC | 1810-324934-13 | BELLOWS COVER |
| MRC | 1810-428037-11 | BUSHING, RING SHIELD |
| MRC | 1810-428038-12 | SCREW, SET RING SHIELD |
| MRC | 1810-428721-11 | SCREW, BELLOWS |
| MRC | 1D05-300052-13 | INSULATOR RING A7 |
| MRC | 1D10-100327 | BAFFLE PLATE |
| MRC | 1D10-100854-13 | STRAIGHT SLOT EXHAUST RING |
| MRC | 1D10-101475-11 | BAFFLE PLATE A |
| MRC | 1D10-101475-11-RB | BAFFLE PLATE A, (Rebuilt) |
| MRC | 1D10-102848-13 | EXHAUST RING (Yttrium Coated) |
| MRC | 1D10-200704-14 | ELECTRODE, UPPER |
| MRC | 1D10-200734-12 | BELLOWS COVER |
| MRC | 1D10-201429-15 | UPPER ELECTRODE |
| MRC | 1D10-201588-12 | UPPER ELECTRODE, W/MONITOR |
| MRC | 1D10-202177-12 | UPPER ELECTRODE, VESPEL INSERT |
| MRC | 1D10-202204-12 | UPPER ELECTRODE, VESPEL INSERT, W/MONITOR |
| MRC | 1D10-204338-13 | ELECTRODE UPPER (Yttrium Coated) |
| MRC | 1D10-204419-12 | COVER BELLOWS (Yttrium Coated) |
| MRC | 1D10-300052-12 | RING, INSULATOR A7 (DRM) |
| MRC | 1D10-30052-13 | INSULATOR RING, QUARTZ |
| MRC | 1D10-302209-14 | SILICON FOCUS RING |
| MRC | 1D10-302209-15 | RING, FOCUS (Silicon) |
| MRC | 1D10-303124-16 | DEPO SHIELD |
| MRC | 1D10-303124-16-RB | GAS RING, (Rebuilt) |
| MRC | 1D10-303124-21 | SHIELD RING |
| MRC | 1D10-307773-13 | RING, FOCUS (4mm, Silicon) |
| MRC | 1D10-309946-12 | SILICON FOCUS RING |
| MRC | 1D10-310020-11 | RING, FOCUS (Silicon) |
| MRC | 1D10-315182-12 | WINDOW, SHIELD DEPOSITION (Yttrium Coated) |
| MRC | 1D10-315183-15 | SHIELD DEPOSITION (Yttrium Coated) |
| MRC | 1D10-315272-11 | RING SHIELD |
| MRC | 1D10-400022-14 | WINDOW, SHIELD DEPOSITION |
| MRC | 1D10-405256-11 | SCREW, UPPER |
| MRC | 2910-290041-12 | Tweezers, 8″ |
| MRC | 2985-419058-12 | Assembly, Tweezers |
| MRC | 310-211696-2 | Chuck, Teflon w/Shaft Adapter |
| MRC | 310-290647-7 | Pincette |
| MRC | 6043190 | Ceramic Latch Ball Bearing |
| MRC | 607229P | SS Screw |
| MRC | 607305P | SS Screw |
| MRC | 607400P | SS Screw |
| MRC | 607402P | SS Slotted Pan Head Screw |
| MRC | 607409P | SS Slotted Pan Head Screw |
| MRC | 608061P | SS Flat Washer |
| MRC | 608062P | SS Washer |
| MRC | 608063P | #8 SS Flat Washer |
| MRC | 608066P | SS Washer |
| MRC | 608094P | SS Hex Nut |
| MRC | 608147P | #6 SS Lock Washer |
| MRC | 608148P | #8 SS Lock Washer |
| MRC | 608149P | SS Lock Washer |
| MRC | 6111150 | Location Pin Spring |
| MRC | 612063P | Location Pin Retaining Ring |
| MRC | 636242P | SS Vented Screw |
| MRC | 6362630 | SS Screw |
| MRC | 6363060 | SS Vented Screw, Coated |
| MRC | 813-28-450 | Bellows, Lock, Load |
| MRC | A110165 | Viton O-Ring |
| MRC | A110314 | SS Vented Pan Head Screw |
| MRC | A110315 | SS Vented Pan Head Screw |
| MRC | A110348 | Viton O-Ring |
| MRC | A110349 | Viton O-Ring |
| MRC | A112552 | SS Vented Screw, Coated |
| MRC | A113032 | SS Vented Screw, Coated |
| MRC | A113520 | Viton O-Ring |
| MRC | A113521 | Viton O-Ring |
| MRC | A115428 | 6″ Tabbed Wafer Holder Assy. |
| MRC | A115513 | Wafer Holder Assembly |
| MRC | A115760 | SS Screw, Coated |
| MRC | A117374 | Gas Lead-in Weldment |
| MRC | A117477 | Gas Distribution Ring |
| MRC | A117478 | Gas Distribution Ring |
| MRC | A119222 | SS Vented Screw, Coated |
| MRC | A119405 | Viton O-Ring |
| MRC | A119406 | Viton O-Ring |
| MRC | A121816 | 6″ MXB Tab Wafer Holder Assy. |
| MRC | A124957 | CCW Roller Latch Assembly |
| MRC | A124958 | CW Roller Latch Assembly |
| MRC | A125440 | Flexible Gas Fitting |
| MRC | A126155 | SS Vented Flat Head Screw |
| MRC | A126869 | 6″Clamp Ring Wafer Holder Assy. |
| MRC | A127225 | SS Vented Screw, Coated |
| MRC | A128289 | Wafer Holder Assy. |
| MRC | BB10-00181-13 | SHOWERHEAD |
| MRC | CT-1310-290833-13 | Indexer Ceramic Arm |
| MRC | CT1310-498062-11 | Spacer, Sopper |
| MRC | CT-2910-307094-11 | Nozzle, 3MM |
| MRC | CT-310-290498-2 | Chuck, Spin, 6″, Modified |
| MRC | D110508 | Screw Shield |
| MRC | D110556 | Latch Center Pivot Spring |
| MRC | D111128 | Dark Space Ring |
| MRC | D112425 | Wafer Tab Retainer |
| MRC | D112426 | Wafer Tab |
| MRC | D112576 | Spring Guide Loacting Pin |
| MRC | D112577 | Wafer Holder Locating Pin |
| MRC | D112578 | Locating Pin Retainer |
| MRC | D112646 | 6″ Heater Ring Segment Shield |
| MRC | D112647 | 6″ Heater Ring Segment Shield |
| MRC | D112650 | Dark Space Ring |
| MRC | D112776 | Filler Ring |
| MRC | D113033 | Pod Shield |
| MRC | D113703 | Etch Door Shield |
| MRC | D113871 | Pod Shield |
| MRC | D113950 | Dark Space Ring |
| MRC | D114056 | Door Shield |
| MRC | D114089 | Vented Screw |
| MRC | D114090 | Screw Shield |
| MRC | D114313 | Door Shield |
| MRC | D114421 | Ceramic Locating Pin |
| MRC | D114421 | Pin, Loc, Holder, Wafer, Ceramic, 603 |
| MRC | D114736 | Pod Shield |
| MRC | D115052 | Ceramic Locating Pin |
| MRC | D115068 | SS Flat Washer |
| MRC | D115238 | Pod Shield |
| MRC | D115267 | 8″ Wafer Pan Shield |
| MRC | D115445 | Guide Locating Pin Spring |
| MRC | D115512 | 6″ Clamp Housing |
| MRC | D115556 | Pod Shield |
| MRC | D115634 | Door Shield |
| MRC | D115635 | Door Shield |
| MRC | D115638 | Door Shield |
| MRC | D115764 | Pod Shield |
| MRC | D115767 | Pod Shield |
| MRC | D115768 | Pod Shield |
| MRC | D115770 | Pod Shield |
| MRC | D115859 | 4″ Tabbed Wafer Housing |
| MRC | D116049 | 8″ Filler Ring |
| MRC | D116050 | 8″ Filler Ring |
| MRC | D116374 | Cryo Shield |
| MRC | D116375 | Cryo Shield |
| MRC | D116543 | Wafer Pan Shield |
| MRC | D116686 | 8″ Wafer Pan Shield |
| MRC | D116931 | Pod Shield |
| MRC | D116931-A | Pod Shield |
| MRC | D117540 | Pod Shield |
| MRC | D117572 | Wafer Holder Retaining Ring |
| MRC | D117574 | Pod Shield |
| MRC | D117579 | Pod Shield |
| MRC | D117750 | RMX10 Cathode Ring |
| MRC | D117777 | Dark Space Ring |
| MRC | D117824 | Tab, Mini, Wafer Holder |
| MRC | D117831 | Gas Ring Shield |
| MRC | D117832 | Gas Ring Shield |
| MRC | D117878 | Cathode Adapter Shield |
| MRC | D117879 | Nut Plate |
| MRC | D117923 | Cathode Adapter Shield |
| MRC | D117924 | Dark Space Ring |
| MRC | D119017 | Door Shield |
| MRC | D119118 | Cathode Adapter Shield |
| MRC | D119119 | Cathode Adapter Shield |
| MRC | D119222 | SS Vented Screw |
| MRC | D119223 | Shld, Dark Space, PM, A12, SS |
| MRC | D119224 | Shld, Dark Space, RMX-12, Al |
| MRC | D119278 | Door Shield |
| MRC | D119348 | Spacer Ring |
| MRC | D119450 | Corner Shield |
| MRC | D119451 | Corner Shield |
| MRC | D119691 | Preclean Bell Jar |
| MRC | D120490 | Pod Shield |
| MRC | D120938 | 8″ Wafer Pan Shield |
| MRC | D121043 | Tab, MXB, Wafer Holder |
| MRC | D121114 | 6″ Heater Ring Segment Shield |
| MRC | D121115 | 6″ Heater Ring Segment Shield |
| MRC | D121385 | 5″ Heater Ring Segment Shield |
| MRC | D121386 | 5″ Heater Ring Segment Shield |
| MRC | D121398 | Front Roller |
| MRC | D121428 | 8″ Clamp Ring Housing |
| MRC | D121429 | 8″ SS Tab Clamp Ring |
| MRC | D121504 | Pod Shield |
| MRC | D121505 | Door Shield |
| MRC | D121506 | Shld, Gate, Valve Spacer, Al Grit |
| MRC | D121510 | Shld, Gate, Valve Spacer, SS |
| MRC | D122310-A | Cathode Adapter Shield |
| MRC | D122310-S | Cathode Adapter Shield |
| MRC | D122742 | 6″ Clamp Housing |
| MRC | D122743 | 6″ Clamp Ring |
| MRC | D122747 | Latch Screw |
| MRC | D122750 | Captive Screw |
| MRC | D122851 | Clamp Ring |
| MRC | D122946 | Etch Door Shield |
| MRC | D123041 | Leaf Spring Bracket |
| MRC | D123061 | Latch Captive Spacer |
| MRC | D123167 | Dark Space Ring with Girdle |
| MRC | D123306 | Dark Space Ring |
| MRC | D123461 | Shld, Spnt, Sm Bend, 150 mm |
| MRC | D123463 | Shld, Door, RMX-12, Long, Al |
| MRC | D123464 | Ring, Spacer, Al |
| MRC | D123465 | Shld, Door, RMX-12, Short, SS |
| MRC | D123466 | Ring, Spacer, SS |
| MRC | D123606 | Shld, Pod, Sht, SS Grit |
| MRC | D123608 | Shld, Pod, Long, Al Grit |
| MRC | D123611-A | Cryo Shield |
| MRC | D123611-S | Cryo Shield |
| MRC | D123923 | Captive Spacer |
| MRC | D124090 | Pod Shield |
| MRC | D124432-A | Door Shield |
| MRC | D124432-S | Door Shield |
| MRC | D124432-SP | Door Shield |
| MRC | D124681-CR | Mounting Ring |
| MRC | D124715-125S | 5″ Funnel Shield |
| MRC | D124715-125SP | 5″ Funnel Shield with Arc Spray |
| MRC | D124715-150S | 6″ Funnel Shield |
| MRC | D124715-150SP | 6″ Funnel Shield with Arc Spray |
| MRC | D124736-A | Plenum Shield |
| MRC | D124736-S | Plenum Shield |
| MRC | D124819-LA | Pod Shield |
| MRC | D124819-LS | Pod Shield |
| MRC | D124819-LSP | Pod Shield with Arc Spray |
| MRC | D124819-SA | Pod Shield |
| MRC | D124819-SS | Pod Shield |
| MRC | D124819-SSP | Pod Shield with Arc Spray |
| MRC | D124820-LA | Door Shield |
| MRC | D124820-LS | Door Shield |
| MRC | D124820-LSP | Door Shield with Arc Spray |
| MRC | D124820-SA | Door Shield |
| MRC | D124820-SS | Door Shield |
| MRC | D124820-SSP | Door Shield with Arc Spray |
| MRC | D124821-125A | 5″ Wafer Pan Shield |
| MRC | D124821-125S | 5″ Wafer Pan Shield |
| MRC | D124821-125SP | 5″ Wafer Pan Shield w/ Arc Spray |
| MRC | D124821-150A | 6″ Wafer Pan Shield |
| MRC | D124821-150S | 6″ Wafer Pan Shield |
| MRC | D124821-150SP | 6″ Wafer Pan Shield w/ Arc Spray |
| MRC | D124821-200A | Wafer Pan Shield |
| MRC | D124821-200S | Wafer Pan Shield |
| MRC | D124821-200SP | Wafer Pan Shield w/ Arc Spray |
| MRC | D124822-A | Corner Shield |
| MRC | D124822-S | Corner Shield |
| MRC | D124822-SP | Corner Shield with Arc Spray |
| MRC | D124832-LA | Door Shield |
| MRC | D124832-LS | Door Shield |
| MRC | D124832-LSP | Door Shield with Arc Spray |
| MRC | D124832-SA | Door Shield |
| MRC | D124832-SS | Door Shield |
| MRC | D124832-SSP | Door Shield with Arc Spray |
| MRC | D124839 | Cathode Adapter Shield |
| MRC | D124839-A | Cathode Adapter Shield |
| MRC | D124839-S | Cathode Adapter Shield |
| MRC | D124840-A | Cathode Adapter Shield |
| MRC | D124840-S | Cathode Adapter Shield |
| MRC | D124841-A | Cathode Adapter Shield |
| MRC | D124841-S | Cathode Adapter Shield |
| MRC | D124845-150P | 6″ Etch Wafer Pan Shield |
| MRC | D124942 | Latch Body, CCW |
| MRC | D124943 | Latch Body, CW |
| MRC | D124955 | Rear Roller |
| MRC | D124959 | Roller Latch Washer |
| MRC | D125112 | Stud Screw |
| MRC | D125181-125A | 5″ Wafer Pan Shield |
| MRC | D125181-125S | 5″ Wafer Pan Shield |
| MRC | D125181-125SP | 5″ Wafer Pan Shield w/Arc Spray |
| MRC | D125181-150A | 6″ Wafer Pan Shield |
| MRC | D125181-150S | 6″ Wafer Pan Shield |
| MRC | D125181-150SP | 6″ Wafer Pan Shield w/ Arc Spray |
| MRC | D125181-200A | Wafer Pan Shield |
| MRC | D125181-200S | Wafer Pan Shield |
| MRC | D125181-200SP | Wafer Pan Shield w/ Arc Spray |
| MRC | D125182-125P | Etch Wafer Pan Shield |
| MRC | D125182-150P | 6″ Etch Wafer Pan Shield |
| MRC | D125182-200N | Wafer Pan Shield |
| MRC | D125243 | Gas Distribution Ring Shield |
| MRC | D125243-A | Gas Distribution Ring Shield |
| MRC | D125243-S | Gas Distribution Ring Shield |
| MRC | D125243-SP | Gas Ring Shield w/ Arc Spray |
| MRC | D125302-LA-L | Pod Shield |
| MRC | D125302-LS-L | Pod Shield |
| MRC | D125302-LSP-L | Pod Shield with Arc Spray |
| MRC | D125302-SA-L | Pod Shield |
| MRC | D125302-SA-R | Pod Shield |
| MRC | D125302-SS-L | Pod Shield |
| MRC | D125302-SSP-L | |
| MRC | D125302-SSP-R | Pod Shield with Arc Spray |
| MRC | D125302-SS-R | Pod Shield |
| MRC | D125409-150A | 6″ Wafer Pan Shield |
| MRC | D125409-150S | 6″ Wafer Pan Shield |
| MRC | D125409-150SP | 6″ Wafer Pan Shield w/ Arc Spray |
| MRC | D125663 | Clamp Ring |
| MRC | D125676 | 0.021″ Thick Leaf Spring |
| MRC | D125677 | Clamp Ring Stud Spring |
| MRC | D125834 | 6″ Jeida Clamp Ring |
| MRC | D125939 | Gas Distribution Ring |
| MRC | D125953-S | Gas Ring Shield |
| MRC | D125953-SP | Gas Ring Shield |
| MRC | D126401-RA | Plenum Shield |
| MRC | D126401-RS | Plenum Shield |
| MRC | D126429 | Reclaim Bowl Shield |
| MRC | D126429-150S | 6″ Wafer Bowl Shield |
| MRC | D126707 | 5″ Heater Ring Segment Shield |
| MRC | D126727-150P | 6″ Etch Wafer Pan Shield |
| MRC | D126771 | 6″ Wafer Pan Shield |
| MRC | D126771-125A | Wafer Pan Shield |
| MRC | D126771-125S | Wafer Pan Shield |
| MRC | D126771-150A | 6″ Wafer Pan Shield |
| MRC | D126771-150S | 6″ Wafer Pan Shield |
| MRC | D126845 | Front Roller |
| MRC | D126850 | Rear Roller |
| MRC | D126870 | 6″ Full Face Clamp Ring Housing |
| MRC | D126917 | Dark Space Shield |
| MRC | D127037 | 6″ Heater Ring Segment Shield |
| MRC | D127146-062A | Dark Space Shield |
| MRC | D127154-A | Adapter Shield |
| MRC | D127154-S | Adapter Shield |
| MRC | D127154-SP | Adapter Shield |
| MRC | D127367-A | Adapter Shield |
| MRC | D127396 | Latch Body |
| MRC | D127397 | Latch Shim |
| MRC | D127684 | Latch Sleeve |
| MRC | D127708 | Universal Latch Spring |
| MRC | D128173-150S | Wafer Pan Shield |
| MRC | D128173-150SP | 6″ Wafer Pan Shield |
| MRC | D128194 | Wafer Holder Housing |
| MRC | D128227-150S | 6″ Wafer Pan Shield |
| MRC | D128227-150SP | 6″ Wafer Pan Shield |
| MRC | D128288 | 8″ Clamp Ring |
| MRC | D128289 | Wafer Holder Assembly |
| MRC | D128456 | Center Support Bearing |
| MRC | D128510 | 6″ Jeida Clamp Ring |
| MRC | D128774 | Clamp Ring |
| MRC | D128859 | Dark Space Ring |
| MRC | D128860 | 6″ Full Face Clamp Ring |
| MRC | D129038 | 8″ SS Clamp Ring with Notch |
| MRC | D129428-150P | 6″ Etch Wafer Pan Shield |
| MRC | D129678-LA | Pod Shield |
| MRC | D129678-LS | Pod Shield |
| MRC | D129678-LSP | Pod Shield w/ Arc Spray |
| MRC | D129679 | Spacer Ring |
| MRC | D130228 | Clamp Ring |
| MRC | D131372-100P | Etch Wafer Pan Shield |
| MRC | D131406 | Clamp Ring |
| MRC | ES1D10-309946-12 | Ring |
| MRC | ID05-400022-14 | Window |
| MRC | MRC-813-28-450 | Bellows, Lock, Load |
| MRC | MRC-D112577 | Pin, Holder, Wafer, Ceramic, 603 |
| MRC | PT-TIM-3 | Insulator, Upper, TC, Ceramic, 603 |
