MRC PVD Metal and PVD oxide Model 693

Description

MRC PVD Metal and PVD oxide Model 693

MANUFACTURER: MRC

MODEL: MRC 693

DESCRIPTION SIDE SPUTTER:

The fast cycle load lock eliminates the need to vent the process chamber to load substrates thereby reducing the pump down time along with reducing contamination of targets and interior chamber surfaces. Typically the TES-600 & 900 series sputtering systems will be able to automatically transfer the substrates from atmosphere to the process chamber and achieve a base pressure of 9 x 10-7 torr in less than seven minutes.

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