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Matrix Bobcat 209S

Model: Matrix Bobcat 209S Asher  semiconductor process equipment

Category:  Plasma Asher Plasma Descum

Original Equipment Manufacturer: Matrix Integrated Systems, Inc

Condition: Refurbished by seller 

Wafer Size: 8 inch configuration. 

Valid Time: Subject to prior sale

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Description

Model: Matrix Bobcat 209S  Microwave Plasma Asher  semiconductor process equipment

Category:  Plasma Asher Plasma Descum

Original Equipment Manufacturer: Matrix Integrated Systems, Inc

Condition: Refurbished by seller 

SN: 10222

Vintage:2001

Wafer Size: 8 inch configuration. 

Valid Time: Subject to prior sale

Lead Time: 12 weeks

Location: Silicon Valley, CA, U.S.A.

Warranty: 12 months non-consumable parts.

Installation and training: Available at extra charge 

Service Contract: Available at extra charge

Matrix Bobcat 209S Asher plasma Asher Plasma descum semiconductor equipment General Description

  • Power: 208VAC, 3 Phase, 50/60HZ
  • Installed in Wafer Fab until January 26th 2017
  • Fully Operational
  • Manuals (CD) Available with Tool
 
 Asher Component Details
Mainframe
Type Standalone
Model Matrix Bobcat 209S asher
Chambers
How Many? 1
Type RIE
Process (e.g., Ash, Clean, Light Etch) ASH
Load Locks/Load Plate
Open Cassette or SMIF Open Cassette
How Many? 1
Robots
How Many? 1
Method of Transport: Transfer Unit
Make/Models: Rorze, RR701
RF Generators
How Many? 2
Make/Models: Comdel FR-111R2, Microwave generator 3kw
Gas Box
Gases used per chamber: 3
Identify gases: N2-1000, N2 -300, N2- 1000 ( gases run O2,N2, none)
MFC’s used (Make/Model): MKS
Control System
PC or Control Rack? PC
Software Type and Version: Windows NT

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