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LAM Research Spare Parts

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LAM Research Spare Parts

1 LAM Research 713-018426-369 Insert, Vespel Ring
2 LAM Research 713-028487-001 Confindment Vespel Ring
3 LAM Research 715-011531-014 Electrode 8″, Rainbow 4400
4 LAM Research 715-011531-015 Electrode 6″ Rainbow 4400
5 LAM Research 715-011531-102 Electrode 6″ Rainbow 4400
6 LAM Research 715-011640-005 Focus Ring 4″
7 LAM Research 715-011640-006 Focus Ring 6″, Rainbow
8 LAM Research 715-011673-105 Lower Electrode 5″,
9 LAM Research 715-011746-141 Plate Wafer Clamp 4″
10 LAM Research 715-011746-151 Plate Wafer Clamp 5″
11 LAM Research 715-011746-161 Plate Wafer Clamp 6″
12 LAM Research 715-018991-206 Electrode Upper 6″ Rainbow 4400
13 LAM Research 715-018991-208 Electrode Upper 8″ Rainbow 4400
14 LAM Research 715-018991-006 Electrode Upper 8″ Rainbow 4400
15 LAM Research 715-028087-005 Shroud 6″ 2 mil hard
16 LAM Research 715-028559-001 Showerhead 6″
17 LAM Research 715-028606-161 Wafer Clamp 6″
18 LAM Research 715-030320-001 BSR Injection Ring
19 LAM Research 715-28608-161 Non-Contact Wafer Clamp
20 LAM Research 715-31752-206 Electrode Lower 6″
21 LAM Research 715-31752-208 Electrode Lower 8″
22 LAM Research 715-330000-090 Gas Injection Ring 9600
23 LAM Research 715-007469-002 Lower Electrode 6″, 4 pin AUTO ETCH
24 LAM Research 715-330135-001 BSR Injection Ring 9600
25 LAM Research 715-330984-001 BSR Injection Ring 9600
26 LAM Research 715-330987-001 BSR Injection Ring 9600
27 LAM Research 715-11986-108 Lower Elctrode
28 LAM Research 715-008721-001 Electrode 6″ 490
29 LAM Research 715-011531-008 Electrode 6″ 4400
30 LAM Research 715-011531-009 Electrode 8″ 4400
31 LAM Research 715-011531-012 Electrode
32 LAM Research 715-007469-001 Lower Electrode 6″, 4 pin AUTO ETCH
33 LAM Research 715-007469-102 Lower Electrode 6″, 4 pin AUTO ETCH
34 LAM Research 715-007025-001 Electrode AUTO ETCH

Valid time: Subject to prior sale without notice.

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