Description
Please contact us for the availability of the used LAM RESEARCH / DRYTEK 384T Plasma etcher, 4″. The item is subject to prior sale without notice. This items are only for end users.
Gases:
O2
CHf3
Sf6
C2F6
CF4
ADVANCED ENERGY RF Generator upgrade, NESLAB Water chiller, Power supply: 208 VAC
SS5487