Lam 4528 Oxide Etcher

Description

Lam 4528 Oxide Etcher Lam Rainbow 4528

Oxide Etcher, 200mm, with (1) LAM Research Generator includes Advanced Energy PDW2200 RF Generator and Cables; with (1) LAM Research 2080 Temperature Control Unit.(Chemicals previously run through system: Fomblin Oil, Ammonia, Process Cooling Water, Nitrous Oxide, Helium, Carbon Tetrafluoride, Octafluorotetrahydrofuran, Nitrogen, Oil Free Air, Silane) Comes complete with Chiller and Generator Rack.

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This Item is subject to prior sale without notice.

SS5880

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